1/28/2011	2:09:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	2:09:12 AM	Recipe started at 2:09 AM
1/28/2011	2:09:12 AM	H2 valve closed
1/28/2011	2:09:12 AM	BCl3 valve closed
1/28/2011	2:09:12 AM	PH3 valve closed
1/28/2011	2:09:12 AM	SiCl4 pre valve closed
1/28/2011	2:09:12 AM	SiCl4 post valve closed
1/28/2011	2:09:12 AM	Main Vac valve closed
1/28/2011	2:09:12 AM	Bypass valve closed
1/28/2011	2:09:12 AM	Bubbler valve closed
1/28/2011	2:09:12 AM	Helium valve opened
1/28/2011	2:09:12 AM	Helium MFC set to  500.000000
1/28/2011	2:09:12 AM	H2 MFC set to  0.000000
1/28/2011	2:09:12 AM	BCl3 MFC set to  0.000000
1/28/2011	2:09:12 AM	PHl3 MFC set to  0.000000
1/28/2011	2:09:12 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:09:12 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:09:12 AM	Tube furnace set to 0
1/28/2011	2:10:26 AM	Helium valve closed
1/28/2011	2:10:26 AM	H2 valve closed
1/28/2011	2:10:26 AM	BCl3 valve closed
1/28/2011	2:10:26 AM	PH3 valve closed
1/28/2011	2:10:26 AM	SiCl4 pre valve closed
1/28/2011	2:10:26 AM	SiCl4 post valve closed
1/28/2011	2:10:26 AM	Main Vac valve closed
1/28/2011	2:10:26 AM	Bypass valve closed
1/28/2011	2:10:26 AM	Bubbler valve closed
1/28/2011	2:10:26 AM	Helium MFC set to  0.000000
1/28/2011	2:10:26 AM	H2 MFC set to  0.000000
1/28/2011	2:10:26 AM	BCl3 MFC set to  0.000000
1/28/2011	2:10:26 AM	PHl3 MFC set to  0.000000
1/28/2011	2:10:26 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:10:26 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:10:26 AM	Tube furnace set to 0
1/28/2011	2:10:26 AM	Run finished at 2:10 AM
1/28/2011	2:10:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	2:18:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:18:49 AM	Recipe started at 2:18 AM
1/28/2011	2:18:49 AM	Helium valve closed
1/28/2011	2:18:49 AM	H2 valve closed
1/28/2011	2:18:49 AM	BCl3 valve closed
1/28/2011	2:18:49 AM	PH3 valve closed
1/28/2011	2:18:49 AM	SiCl4 pre valve closed
1/28/2011	2:18:49 AM	SiCl4 post valve closed
1/28/2011	2:18:49 AM	Main Vac valve closed
1/28/2011	2:18:49 AM	Bubbler valve closed
1/28/2011	2:18:49 AM	Bypass valve opened
1/28/2011	2:18:49 AM	Helium MFC set to  0.000000
1/28/2011	2:18:49 AM	H2 MFC set to  0.000000
1/28/2011	2:18:49 AM	BCl3 MFC set to  0.000000
1/28/2011	2:18:49 AM	PHl3 MFC set to  0.000000
1/28/2011	2:18:49 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:18:49 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:18:49 AM	Tube furnace set to 0
1/28/2011	2:19:23 AM	Helium valve closed
1/28/2011	2:19:23 AM	H2 valve closed
1/28/2011	2:19:23 AM	BCl3 valve closed
1/28/2011	2:19:23 AM	PH3 valve closed
1/28/2011	2:19:23 AM	SiCl4 pre valve closed
1/28/2011	2:19:23 AM	SiCl4 post valve closed
1/28/2011	2:19:23 AM	Bubbler valve closed
1/28/2011	2:19:23 AM	Main Vac valve opened
1/28/2011	2:19:23 AM	Bypass valve opened
1/28/2011	2:19:23 AM	Helium MFC set to  0.000000
1/28/2011	2:19:23 AM	H2 MFC set to  0.000000
1/28/2011	2:19:23 AM	BCl3 MFC set to  0.000000
1/28/2011	2:19:23 AM	PHl3 MFC set to  0.000000
1/28/2011	2:19:23 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:19:23 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:19:23 AM	Tube furnace set to 0
1/28/2011	2:19:23 AM	Run finished at 2:19 AM
1/28/2011	2:19:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:19:28 AM	Tube furnace set to 200
1/28/2011	2:21:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	2:21:18 AM	Recipe started at 2:21 AM
1/28/2011	2:21:18 AM	Helium valve closed
1/28/2011	2:21:18 AM	H2 valve closed
1/28/2011	2:21:18 AM	BCl3 valve closed
1/28/2011	2:21:18 AM	PH3 valve closed
1/28/2011	2:21:18 AM	SiCl4 pre valve closed
1/28/2011	2:21:18 AM	SiCl4 post valve closed
1/28/2011	2:21:18 AM	Main Vac valve closed
1/28/2011	2:21:18 AM	Bubbler valve closed
1/28/2011	2:21:18 AM	Bypass valve opened
1/28/2011	2:21:18 AM	Helium MFC set to  0.000000
1/28/2011	2:21:18 AM	H2 MFC set to  0.000000
1/28/2011	2:21:18 AM	BCl3 MFC set to  0.000000
1/28/2011	2:21:18 AM	PHl3 MFC set to  0.000000
1/28/2011	2:21:18 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:21:18 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:21:18 AM	Tube furnace set to 0
1/28/2011	2:21:18 AM	Helium valve closed
1/28/2011	2:21:18 AM	H2 valve closed
1/28/2011	2:21:18 AM	BCl3 valve closed
1/28/2011	2:21:18 AM	PH3 valve closed
1/28/2011	2:21:18 AM	SiCl4 pre valve closed
1/28/2011	2:21:18 AM	SiCl4 post valve closed
1/28/2011	2:21:18 AM	Bubbler valve closed
1/28/2011	2:21:18 AM	Main Vac valve opened
1/28/2011	2:21:18 AM	Bypass valve opened
1/28/2011	2:21:18 AM	Helium MFC set to  0.000000
1/28/2011	2:21:18 AM	H2 MFC set to  0.000000
1/28/2011	2:21:18 AM	BCl3 MFC set to  0.000000
1/28/2011	2:21:18 AM	PHl3 MFC set to  0.000000
1/28/2011	2:21:18 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:21:18 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:21:18 AM	Tube furnace set to 0
1/28/2011	2:22:18 AM	H2 valve closed
1/28/2011	2:22:18 AM	BCl3 valve closed
1/28/2011	2:22:18 AM	PH3 valve closed
1/28/2011	2:22:18 AM	SiCl4 pre valve closed
1/28/2011	2:22:18 AM	SiCl4 post valve closed
1/28/2011	2:22:18 AM	Bubbler valve closed
1/28/2011	2:22:18 AM	Helium valve opened
1/28/2011	2:22:18 AM	Main Vac valve opened
1/28/2011	2:22:18 AM	Bypass valve opened
1/28/2011	2:22:18 AM	Helium MFC set to  100.000000
1/28/2011	2:22:18 AM	H2 MFC set to  0.000000
1/28/2011	2:22:18 AM	BCl3 MFC set to  0.000000
1/28/2011	2:22:18 AM	PHl3 MFC set to  0.000000
1/28/2011	2:22:18 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:22:18 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:22:18 AM	Tube furnace set to 0
1/28/2011	2:23:18 AM	Helium valve closed
1/28/2011	2:23:18 AM	H2 valve closed
1/28/2011	2:23:18 AM	BCl3 valve closed
1/28/2011	2:23:18 AM	PH3 valve closed
1/28/2011	2:23:18 AM	SiCl4 pre valve closed
1/28/2011	2:23:18 AM	SiCl4 post valve closed
1/28/2011	2:23:18 AM	Bubbler valve closed
1/28/2011	2:23:18 AM	Main Vac valve opened
1/28/2011	2:23:18 AM	Bypass valve opened
1/28/2011	2:23:18 AM	Helium MFC set to  0.000000
1/28/2011	2:23:18 AM	H2 MFC set to  0.000000
1/28/2011	2:23:18 AM	BCl3 MFC set to  0.000000
1/28/2011	2:23:18 AM	PHl3 MFC set to  0.000000
1/28/2011	2:23:18 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:23:18 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:23:19 AM	Tube furnace set to 0
1/28/2011	2:24:19 AM	H2 valve closed
1/28/2011	2:24:19 AM	BCl3 valve closed
1/28/2011	2:24:19 AM	PH3 valve closed
1/28/2011	2:24:19 AM	SiCl4 pre valve closed
1/28/2011	2:24:19 AM	SiCl4 post valve closed
1/28/2011	2:24:19 AM	Bubbler valve closed
1/28/2011	2:24:19 AM	Helium valve opened
1/28/2011	2:24:19 AM	Main Vac valve opened
1/28/2011	2:24:19 AM	Bypass valve opened
1/28/2011	2:24:19 AM	Helium MFC set to  100.000000
1/28/2011	2:24:19 AM	H2 MFC set to  0.000000
1/28/2011	2:24:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:24:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:24:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:24:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:24:19 AM	Tube furnace set to 0
1/28/2011	2:25:19 AM	Helium valve closed
1/28/2011	2:25:19 AM	H2 valve closed
1/28/2011	2:25:19 AM	BCl3 valve closed
1/28/2011	2:25:19 AM	PH3 valve closed
1/28/2011	2:25:19 AM	SiCl4 pre valve closed
1/28/2011	2:25:19 AM	SiCl4 post valve closed
1/28/2011	2:25:19 AM	Bubbler valve closed
1/28/2011	2:25:19 AM	Main Vac valve opened
1/28/2011	2:25:19 AM	Bypass valve opened
1/28/2011	2:25:19 AM	Helium MFC set to  0.000000
1/28/2011	2:25:19 AM	H2 MFC set to  0.000000
1/28/2011	2:25:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:25:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:25:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:25:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:25:19 AM	Tube furnace set to 0
1/28/2011	2:26:19 AM	H2 valve closed
1/28/2011	2:26:19 AM	BCl3 valve closed
1/28/2011	2:26:19 AM	PH3 valve closed
1/28/2011	2:26:19 AM	SiCl4 pre valve closed
1/28/2011	2:26:19 AM	SiCl4 post valve closed
1/28/2011	2:26:19 AM	Bubbler valve closed
1/28/2011	2:26:19 AM	Helium valve opened
1/28/2011	2:26:19 AM	Main Vac valve opened
1/28/2011	2:26:19 AM	Bypass valve opened
1/28/2011	2:26:19 AM	Helium MFC set to  100.000000
1/28/2011	2:26:19 AM	H2 MFC set to  0.000000
1/28/2011	2:26:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:26:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:26:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:26:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:26:19 AM	Tube furnace set to 0
1/28/2011	2:27:19 AM	Helium valve closed
1/28/2011	2:27:19 AM	H2 valve closed
1/28/2011	2:27:19 AM	BCl3 valve closed
1/28/2011	2:27:19 AM	PH3 valve closed
1/28/2011	2:27:19 AM	SiCl4 pre valve closed
1/28/2011	2:27:19 AM	SiCl4 post valve closed
1/28/2011	2:27:19 AM	Bubbler valve closed
1/28/2011	2:27:19 AM	Main Vac valve opened
1/28/2011	2:27:19 AM	Bypass valve opened
1/28/2011	2:27:19 AM	Helium MFC set to  0.000000
1/28/2011	2:27:19 AM	H2 MFC set to  0.000000
1/28/2011	2:27:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:27:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:27:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:27:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:27:20 AM	Tube furnace set to 0
1/28/2011	2:28:20 AM	H2 valve closed
1/28/2011	2:28:20 AM	BCl3 valve closed
1/28/2011	2:28:20 AM	PH3 valve closed
1/28/2011	2:28:20 AM	SiCl4 pre valve closed
1/28/2011	2:28:20 AM	SiCl4 post valve closed
1/28/2011	2:28:20 AM	Bubbler valve closed
1/28/2011	2:28:20 AM	Helium valve opened
1/28/2011	2:28:20 AM	Main Vac valve opened
1/28/2011	2:28:20 AM	Bypass valve opened
1/28/2011	2:28:20 AM	Helium MFC set to  100.000000
1/28/2011	2:28:20 AM	H2 MFC set to  0.000000
1/28/2011	2:28:20 AM	BCl3 MFC set to  0.000000
1/28/2011	2:28:20 AM	PHl3 MFC set to  0.000000
1/28/2011	2:28:20 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:28:20 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:28:20 AM	Tube furnace set to 0
1/28/2011	2:29:20 AM	Helium valve closed
1/28/2011	2:29:20 AM	H2 valve closed
1/28/2011	2:29:20 AM	BCl3 valve closed
1/28/2011	2:29:20 AM	PH3 valve closed
1/28/2011	2:29:20 AM	SiCl4 pre valve closed
1/28/2011	2:29:20 AM	SiCl4 post valve closed
1/28/2011	2:29:20 AM	Bubbler valve closed
1/28/2011	2:29:20 AM	Main Vac valve opened
1/28/2011	2:29:20 AM	Bypass valve opened
1/28/2011	2:29:20 AM	Helium MFC set to  0.000000
1/28/2011	2:29:20 AM	H2 MFC set to  0.000000
1/28/2011	2:29:20 AM	BCl3 MFC set to  0.000000
1/28/2011	2:29:20 AM	PHl3 MFC set to  0.000000
1/28/2011	2:29:20 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:29:20 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:29:20 AM	Tube furnace set to 0
1/28/2011	2:30:20 AM	H2 valve closed
1/28/2011	2:30:20 AM	BCl3 valve closed
1/28/2011	2:30:20 AM	PH3 valve closed
1/28/2011	2:30:20 AM	SiCl4 pre valve closed
1/28/2011	2:30:20 AM	SiCl4 post valve closed
1/28/2011	2:30:20 AM	Bubbler valve closed
1/28/2011	2:30:20 AM	Helium valve opened
1/28/2011	2:30:20 AM	Main Vac valve opened
1/28/2011	2:30:20 AM	Bypass valve opened
1/28/2011	2:30:20 AM	Helium MFC set to  100.000000
1/28/2011	2:30:20 AM	H2 MFC set to  0.000000
1/28/2011	2:30:20 AM	BCl3 MFC set to  0.000000
1/28/2011	2:30:20 AM	PHl3 MFC set to  0.000000
1/28/2011	2:30:20 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:30:20 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:30:20 AM	Tube furnace set to 0
1/28/2011	2:31:20 AM	Helium valve closed
1/28/2011	2:31:20 AM	H2 valve closed
1/28/2011	2:31:20 AM	BCl3 valve closed
1/28/2011	2:31:20 AM	PH3 valve closed
1/28/2011	2:31:20 AM	SiCl4 pre valve closed
1/28/2011	2:31:20 AM	SiCl4 post valve closed
1/28/2011	2:31:20 AM	Bubbler valve closed
1/28/2011	2:31:20 AM	Main Vac valve opened
1/28/2011	2:31:20 AM	Bypass valve opened
1/28/2011	2:31:20 AM	Helium MFC set to  0.000000
1/28/2011	2:31:20 AM	H2 MFC set to  0.000000
1/28/2011	2:31:20 AM	BCl3 MFC set to  0.000000
1/28/2011	2:31:20 AM	PHl3 MFC set to  0.000000
1/28/2011	2:31:20 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:31:20 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:31:20 AM	Tube furnace set to 0
1/28/2011	2:32:04 AM	Run aborted at 2:32 AM
1/28/2011	2:32:04 AM	Helium valve closed
1/28/2011	2:32:04 AM	H2 valve closed
1/28/2011	2:32:04 AM	BCl3 valve closed
1/28/2011	2:32:04 AM	PH3 valve closed
1/28/2011	2:32:04 AM	SiCl4 pre valve closed
1/28/2011	2:32:04 AM	SiCl4 post valve closed
1/28/2011	2:32:04 AM	Bypass valve closed
1/28/2011	2:32:04 AM	Main Vac valve closed
1/28/2011	2:32:04 AM	Bubbler valve closed
1/28/2011	2:32:04 AM	Helium MFC set to  0.000000
1/28/2011	2:32:04 AM	H2 MFC set to  0.000000
1/28/2011	2:32:04 AM	BCl3 MFC set to  0.000000
1/28/2011	2:32:04 AM	PHl3 MFC set to  0.000000
1/28/2011	2:32:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:32:04 AM	Tube furnace set to 0
1/28/2011	2:32:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	2:32:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:32:19 AM	Recipe started at 2:32 AM
1/28/2011	2:32:19 AM	Helium valve closed
1/28/2011	2:32:19 AM	H2 valve closed
1/28/2011	2:32:19 AM	BCl3 valve closed
1/28/2011	2:32:19 AM	PH3 valve closed
1/28/2011	2:32:19 AM	SiCl4 pre valve closed
1/28/2011	2:32:19 AM	SiCl4 post valve closed
1/28/2011	2:32:19 AM	Main Vac valve closed
1/28/2011	2:32:19 AM	Bubbler valve closed
1/28/2011	2:32:19 AM	Bypass valve opened
1/28/2011	2:32:19 AM	Helium MFC set to  0.000000
1/28/2011	2:32:19 AM	H2 MFC set to  0.000000
1/28/2011	2:32:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:32:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:32:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:32:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:32:19 AM	Tube furnace set to 0
1/28/2011	2:32:19 AM	Helium valve closed
1/28/2011	2:32:19 AM	H2 valve closed
1/28/2011	2:32:19 AM	BCl3 valve closed
1/28/2011	2:32:19 AM	PH3 valve closed
1/28/2011	2:32:19 AM	SiCl4 pre valve closed
1/28/2011	2:32:19 AM	SiCl4 post valve closed
1/28/2011	2:32:19 AM	Bubbler valve closed
1/28/2011	2:32:19 AM	Main Vac valve opened
1/28/2011	2:32:19 AM	Bypass valve opened
1/28/2011	2:32:19 AM	Helium MFC set to  0.000000
1/28/2011	2:32:19 AM	H2 MFC set to  0.000000
1/28/2011	2:32:19 AM	BCl3 MFC set to  0.000000
1/28/2011	2:32:19 AM	PHl3 MFC set to  0.000000
1/28/2011	2:32:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:32:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:32:20 AM	Tube furnace set to 0
1/28/2011	2:32:20 AM	Run finished at 2:32 AM
1/28/2011	2:32:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:35:43 AM	Helium MFC set to  100.000000
1/28/2011	2:35:45 AM	Helium valve opened
1/28/2011	2:36:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:36:11 AM	Recipe started at 2:36 AM
1/28/2011	2:36:11 AM	Helium valve closed
1/28/2011	2:36:11 AM	H2 valve closed
1/28/2011	2:36:11 AM	BCl3 valve closed
1/28/2011	2:36:11 AM	PH3 valve closed
1/28/2011	2:36:11 AM	SiCl4 pre valve closed
1/28/2011	2:36:11 AM	SiCl4 post valve closed
1/28/2011	2:36:11 AM	Main Vac valve closed
1/28/2011	2:36:11 AM	Bubbler valve closed
1/28/2011	2:36:11 AM	Bypass valve opened
1/28/2011	2:36:11 AM	Helium MFC set to  0.000000
1/28/2011	2:36:11 AM	H2 MFC set to  0.000000
1/28/2011	2:36:11 AM	BCl3 MFC set to  0.000000
1/28/2011	2:36:11 AM	PHl3 MFC set to  0.000000
1/28/2011	2:36:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:36:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:36:11 AM	Tube furnace set to 0
1/28/2011	2:36:12 AM	Helium valve closed
1/28/2011	2:36:12 AM	H2 valve closed
1/28/2011	2:36:12 AM	BCl3 valve closed
1/28/2011	2:36:12 AM	PH3 valve closed
1/28/2011	2:36:12 AM	SiCl4 pre valve closed
1/28/2011	2:36:12 AM	SiCl4 post valve closed
1/28/2011	2:36:12 AM	Bubbler valve closed
1/28/2011	2:36:12 AM	Main Vac valve opened
1/28/2011	2:36:12 AM	Bypass valve opened
1/28/2011	2:36:12 AM	Helium MFC set to  0.000000
1/28/2011	2:36:12 AM	H2 MFC set to  0.000000
1/28/2011	2:36:12 AM	BCl3 MFC set to  0.000000
1/28/2011	2:36:12 AM	PHl3 MFC set to  0.000000
1/28/2011	2:36:12 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:36:12 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:36:12 AM	Tube furnace set to 0
1/28/2011	2:36:12 AM	Run finished at 2:36 AM
1/28/2011	2:36:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:37:13 AM	Helium MFC set to  100.000000
1/28/2011	2:37:15 AM	Helium valve opened
1/28/2011	2:37:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:37:32 AM	Recipe started at 2:37 AM
1/28/2011	2:37:32 AM	Helium valve closed
1/28/2011	2:37:32 AM	H2 valve closed
1/28/2011	2:37:32 AM	BCl3 valve closed
1/28/2011	2:37:32 AM	PH3 valve closed
1/28/2011	2:37:32 AM	SiCl4 pre valve closed
1/28/2011	2:37:32 AM	SiCl4 post valve closed
1/28/2011	2:37:32 AM	Main Vac valve closed
1/28/2011	2:37:32 AM	Bubbler valve closed
1/28/2011	2:37:32 AM	Bypass valve opened
1/28/2011	2:37:32 AM	Helium MFC set to  0.000000
1/28/2011	2:37:32 AM	H2 MFC set to  0.000000
1/28/2011	2:37:32 AM	BCl3 MFC set to  0.000000
1/28/2011	2:37:32 AM	PHl3 MFC set to  0.000000
1/28/2011	2:37:32 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:37:32 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:37:32 AM	Tube furnace set to 0
1/28/2011	2:37:32 AM	Helium valve closed
1/28/2011	2:37:32 AM	H2 valve closed
1/28/2011	2:37:32 AM	BCl3 valve closed
1/28/2011	2:37:32 AM	PH3 valve closed
1/28/2011	2:37:32 AM	SiCl4 pre valve closed
1/28/2011	2:37:32 AM	SiCl4 post valve closed
1/28/2011	2:37:32 AM	Bubbler valve closed
1/28/2011	2:37:32 AM	Main Vac valve opened
1/28/2011	2:37:32 AM	Bypass valve opened
1/28/2011	2:37:32 AM	Helium MFC set to  0.000000
1/28/2011	2:37:32 AM	H2 MFC set to  0.000000
1/28/2011	2:37:32 AM	BCl3 MFC set to  0.000000
1/28/2011	2:37:32 AM	PHl3 MFC set to  0.000000
1/28/2011	2:37:32 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:37:32 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:37:32 AM	Tube furnace set to 0
1/28/2011	2:37:33 AM	Run finished at 2:37 AM
1/28/2011	2:37:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	2:38:18 AM	Recipe started at 2:38 AM
1/28/2011	2:38:18 AM	Helium valve closed
1/28/2011	2:38:18 AM	BCl3 valve closed
1/28/2011	2:38:18 AM	PH3 valve closed
1/28/2011	2:38:18 AM	SiCl4 pre valve closed
1/28/2011	2:38:18 AM	SiCl4 post valve closed
1/28/2011	2:38:18 AM	Main Vac valve closed
1/28/2011	2:38:18 AM	Bypass valve closed
1/28/2011	2:38:18 AM	Bubbler valve closed
1/28/2011	2:38:18 AM	H2 valve opened
1/28/2011	2:38:18 AM	Helium MFC set to  0.000000
1/28/2011	2:38:18 AM	H2 MFC set to  500.000000
1/28/2011	2:38:18 AM	BCl3 MFC set to  0.000000
1/28/2011	2:38:18 AM	PHl3 MFC set to  0.000000
1/28/2011	2:38:18 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:38:18 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:38:18 AM	Tube furnace set to 0
1/28/2011	2:39:35 AM	Helium valve closed
1/28/2011	2:39:35 AM	BCl3 valve closed
1/28/2011	2:39:35 AM	PH3 valve closed
1/28/2011	2:39:35 AM	SiCl4 pre valve closed
1/28/2011	2:39:35 AM	SiCl4 post valve closed
1/28/2011	2:39:35 AM	Main Vac valve closed
1/28/2011	2:39:35 AM	Bypass valve closed
1/28/2011	2:39:35 AM	H2 valve opened
1/28/2011	2:39:35 AM	Bubbler valve opened
1/28/2011	2:39:35 AM	Helium MFC set to  0.000000
1/28/2011	2:39:35 AM	H2 MFC set to  500.000000
1/28/2011	2:39:35 AM	BCl3 MFC set to  0.000000
1/28/2011	2:39:35 AM	PHl3 MFC set to  0.000000
1/28/2011	2:39:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	2:39:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:39:35 AM	Tube furnace set to 1000
1/28/2011	2:59:35 AM	Helium valve closed
1/28/2011	2:59:35 AM	PH3 valve closed
1/28/2011	2:59:35 AM	Main Vac valve closed
1/28/2011	2:59:35 AM	Bypass valve closed
1/28/2011	2:59:35 AM	H2 valve opened
1/28/2011	2:59:35 AM	BCl3 valve opened
1/28/2011	2:59:35 AM	SiCl4 pre valve opened
1/28/2011	2:59:35 AM	SiCl4 post valve opened
1/28/2011	2:59:35 AM	Bubbler valve opened
1/28/2011	2:59:35 AM	Helium MFC set to  0.000000
1/28/2011	2:59:35 AM	H2 MFC set to  500.000000
1/28/2011	2:59:35 AM	BCl3 MFC set to  2.000000
1/28/2011	2:59:35 AM	PHl3 MFC set to  0.000000
1/28/2011	2:59:35 AM	SiCl4 MFC set to  50.000000
1/28/2011	2:59:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:59:36 AM	Tube furnace set to 1000
1/28/2011	3:19:36 AM	H2 valve closed
1/28/2011	3:19:36 AM	BCl3 valve closed
1/28/2011	3:19:36 AM	PH3 valve closed
1/28/2011	3:19:36 AM	SiCl4 pre valve closed
1/28/2011	3:19:36 AM	SiCl4 post valve closed
1/28/2011	3:19:36 AM	Main Vac valve closed
1/28/2011	3:19:36 AM	Bypass valve closed
1/28/2011	3:19:36 AM	Helium valve opened
1/28/2011	3:19:36 AM	Bubbler valve opened
1/28/2011	3:19:36 AM	Helium MFC set to  500.000000
1/28/2011	3:19:36 AM	H2 MFC set to  0.000000
1/28/2011	3:19:36 AM	BCl3 MFC set to  0.000000
1/28/2011	3:19:36 AM	PHl3 MFC set to  0.000000
1/28/2011	3:19:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	3:19:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:19:36 AM	Tube furnace set to 0
1/28/2011	3:39:36 AM	Helium valve closed
1/28/2011	3:39:36 AM	H2 valve closed
1/28/2011	3:39:36 AM	BCl3 valve closed
1/28/2011	3:39:36 AM	PH3 valve closed
1/28/2011	3:39:36 AM	SiCl4 pre valve closed
1/28/2011	3:39:36 AM	SiCl4 post valve closed
1/28/2011	3:39:36 AM	Main Vac valve closed
1/28/2011	3:39:36 AM	Bypass valve closed
1/28/2011	3:39:36 AM	Bubbler valve closed
1/28/2011	3:39:36 AM	Helium MFC set to  0.000000
1/28/2011	3:39:36 AM	H2 MFC set to  0.000000
1/28/2011	3:39:36 AM	BCl3 MFC set to  0.000000
1/28/2011	3:39:36 AM	PHl3 MFC set to  0.000000
1/28/2011	3:39:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	3:39:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:39:36 AM	Tube furnace set to 0
1/28/2011	3:39:36 AM	Run finished at 3:39 AM
1/28/2011	4:18:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	4:18:07 AM	Recipe started at 4:18 AM
1/28/2011	4:18:07 AM	H2 valve closed
1/28/2011	4:18:07 AM	BCl3 valve closed
1/28/2011	4:18:07 AM	PH3 valve closed
1/28/2011	4:18:07 AM	SiCl4 pre valve closed
1/28/2011	4:18:07 AM	SiCl4 post valve closed
1/28/2011	4:18:07 AM	Main Vac valve closed
1/28/2011	4:18:07 AM	Bypass valve closed
1/28/2011	4:18:07 AM	Bubbler valve closed
1/28/2011	4:18:07 AM	Helium valve opened
1/28/2011	4:18:07 AM	Helium MFC set to  500.000000
1/28/2011	4:18:07 AM	H2 MFC set to  0.000000
1/28/2011	4:18:07 AM	BCl3 MFC set to  0.000000
1/28/2011	4:18:07 AM	PHl3 MFC set to  0.000000
1/28/2011	4:18:07 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:18:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:18:07 AM	Tube furnace set to 0
1/28/2011	4:18:13 AM	Helium valve closed
1/28/2011	4:18:13 AM	H2 valve closed
1/28/2011	4:18:13 AM	BCl3 valve closed
1/28/2011	4:18:13 AM	PH3 valve closed
1/28/2011	4:18:13 AM	SiCl4 pre valve closed
1/28/2011	4:18:13 AM	SiCl4 post valve closed
1/28/2011	4:18:13 AM	Main Vac valve closed
1/28/2011	4:18:13 AM	Bypass valve closed
1/28/2011	4:18:13 AM	Bubbler valve closed
1/28/2011	4:18:13 AM	Helium MFC set to  0.000000
1/28/2011	4:18:13 AM	H2 MFC set to  0.000000
1/28/2011	4:18:13 AM	BCl3 MFC set to  0.000000
1/28/2011	4:18:13 AM	PHl3 MFC set to  0.000000
1/28/2011	4:18:13 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:18:13 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:18:13 AM	Tube furnace set to 0
1/28/2011	4:18:13 AM	Run finished at 4:18 AM
1/28/2011	4:18:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	4:23:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:23:52 AM	Recipe started at 4:23 AM
1/28/2011	4:23:52 AM	Helium valve closed
1/28/2011	4:23:52 AM	H2 valve closed
1/28/2011	4:23:52 AM	BCl3 valve closed
1/28/2011	4:23:52 AM	PH3 valve closed
1/28/2011	4:23:52 AM	SiCl4 pre valve closed
1/28/2011	4:23:52 AM	SiCl4 post valve closed
1/28/2011	4:23:52 AM	Main Vac valve closed
1/28/2011	4:23:52 AM	Bubbler valve closed
1/28/2011	4:23:52 AM	Bypass valve opened
1/28/2011	4:23:52 AM	Helium MFC set to  0.000000
1/28/2011	4:23:52 AM	H2 MFC set to  0.000000
1/28/2011	4:23:52 AM	BCl3 MFC set to  0.000000
1/28/2011	4:23:52 AM	PHl3 MFC set to  0.000000
1/28/2011	4:23:52 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:23:52 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:23:52 AM	Tube furnace set to 0
1/28/2011	4:24:25 AM	Helium valve closed
1/28/2011	4:24:25 AM	H2 valve closed
1/28/2011	4:24:25 AM	BCl3 valve closed
1/28/2011	4:24:25 AM	PH3 valve closed
1/28/2011	4:24:25 AM	SiCl4 pre valve closed
1/28/2011	4:24:25 AM	SiCl4 post valve closed
1/28/2011	4:24:25 AM	Bubbler valve closed
1/28/2011	4:24:25 AM	Main Vac valve opened
1/28/2011	4:24:25 AM	Bypass valve opened
1/28/2011	4:24:25 AM	Helium MFC set to  0.000000
1/28/2011	4:24:25 AM	H2 MFC set to  0.000000
1/28/2011	4:24:25 AM	BCl3 MFC set to  0.000000
1/28/2011	4:24:25 AM	PHl3 MFC set to  0.000000
1/28/2011	4:24:25 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:24:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:24:25 AM	Tube furnace set to 0
1/28/2011	4:24:25 AM	Run finished at 4:24 AM
1/28/2011	4:24:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:26:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	4:27:09 AM	Recipe started at 4:27 AM
1/28/2011	4:27:09 AM	Helium valve closed
1/28/2011	4:27:09 AM	H2 valve closed
1/28/2011	4:27:09 AM	BCl3 valve closed
1/28/2011	4:27:09 AM	PH3 valve closed
1/28/2011	4:27:09 AM	SiCl4 pre valve closed
1/28/2011	4:27:09 AM	SiCl4 post valve closed
1/28/2011	4:27:09 AM	Main Vac valve closed
1/28/2011	4:27:09 AM	Bubbler valve closed
1/28/2011	4:27:09 AM	Bypass valve opened
1/28/2011	4:27:09 AM	Helium MFC set to  0.000000
1/28/2011	4:27:09 AM	H2 MFC set to  0.000000
1/28/2011	4:27:09 AM	BCl3 MFC set to  0.000000
1/28/2011	4:27:09 AM	PHl3 MFC set to  0.000000
1/28/2011	4:27:09 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:27:09 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:27:09 AM	Tube furnace set to 0
1/28/2011	4:27:09 AM	Helium valve closed
1/28/2011	4:27:09 AM	H2 valve closed
1/28/2011	4:27:09 AM	BCl3 valve closed
1/28/2011	4:27:09 AM	PH3 valve closed
1/28/2011	4:27:09 AM	SiCl4 pre valve closed
1/28/2011	4:27:09 AM	SiCl4 post valve closed
1/28/2011	4:27:09 AM	Bubbler valve closed
1/28/2011	4:27:09 AM	Main Vac valve opened
1/28/2011	4:27:09 AM	Bypass valve opened
1/28/2011	4:27:09 AM	Helium MFC set to  0.000000
1/28/2011	4:27:09 AM	H2 MFC set to  0.000000
1/28/2011	4:27:09 AM	BCl3 MFC set to  0.000000
1/28/2011	4:27:09 AM	PHl3 MFC set to  0.000000
1/28/2011	4:27:09 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:27:09 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:27:09 AM	Tube furnace set to 0
1/28/2011	4:28:09 AM	H2 valve closed
1/28/2011	4:28:09 AM	BCl3 valve closed
1/28/2011	4:28:09 AM	PH3 valve closed
1/28/2011	4:28:09 AM	SiCl4 pre valve closed
1/28/2011	4:28:09 AM	SiCl4 post valve closed
1/28/2011	4:28:09 AM	Bubbler valve closed
1/28/2011	4:28:09 AM	Helium valve opened
1/28/2011	4:28:09 AM	Main Vac valve opened
1/28/2011	4:28:10 AM	Bypass valve opened
1/28/2011	4:28:10 AM	Helium MFC set to  100.000000
1/28/2011	4:28:10 AM	H2 MFC set to  0.000000
1/28/2011	4:28:10 AM	BCl3 MFC set to  0.000000
1/28/2011	4:28:10 AM	PHl3 MFC set to  0.000000
1/28/2011	4:28:10 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:28:10 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:28:10 AM	Tube furnace set to 0
1/28/2011	4:29:10 AM	Helium valve closed
1/28/2011	4:29:10 AM	H2 valve closed
1/28/2011	4:29:10 AM	BCl3 valve closed
1/28/2011	4:29:10 AM	PH3 valve closed
1/28/2011	4:29:10 AM	SiCl4 pre valve closed
1/28/2011	4:29:10 AM	SiCl4 post valve closed
1/28/2011	4:29:10 AM	Bubbler valve closed
1/28/2011	4:29:10 AM	Main Vac valve opened
1/28/2011	4:29:10 AM	Bypass valve opened
1/28/2011	4:29:10 AM	Helium MFC set to  0.000000
1/28/2011	4:29:10 AM	H2 MFC set to  0.000000
1/28/2011	4:29:10 AM	BCl3 MFC set to  0.000000
1/28/2011	4:29:10 AM	PHl3 MFC set to  0.000000
1/28/2011	4:29:10 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:29:10 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:29:10 AM	Tube furnace set to 0
1/28/2011	4:30:10 AM	H2 valve closed
1/28/2011	4:30:10 AM	BCl3 valve closed
1/28/2011	4:30:10 AM	PH3 valve closed
1/28/2011	4:30:10 AM	SiCl4 pre valve closed
1/28/2011	4:30:10 AM	SiCl4 post valve closed
1/28/2011	4:30:10 AM	Bubbler valve closed
1/28/2011	4:30:10 AM	Helium valve opened
1/28/2011	4:30:10 AM	Main Vac valve opened
1/28/2011	4:30:10 AM	Bypass valve opened
1/28/2011	4:30:10 AM	Helium MFC set to  100.000000
1/28/2011	4:30:10 AM	H2 MFC set to  0.000000
1/28/2011	4:30:10 AM	BCl3 MFC set to  0.000000
1/28/2011	4:30:10 AM	PHl3 MFC set to  0.000000
1/28/2011	4:30:10 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:30:10 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:30:10 AM	Tube furnace set to 0
1/28/2011	4:31:10 AM	Helium valve closed
1/28/2011	4:31:10 AM	H2 valve closed
1/28/2011	4:31:10 AM	BCl3 valve closed
1/28/2011	4:31:10 AM	PH3 valve closed
1/28/2011	4:31:10 AM	SiCl4 pre valve closed
1/28/2011	4:31:10 AM	SiCl4 post valve closed
1/28/2011	4:31:10 AM	Bubbler valve closed
1/28/2011	4:31:10 AM	Main Vac valve opened
1/28/2011	4:31:10 AM	Bypass valve opened
1/28/2011	4:31:10 AM	Helium MFC set to  0.000000
1/28/2011	4:31:10 AM	H2 MFC set to  0.000000
1/28/2011	4:31:10 AM	BCl3 MFC set to  0.000000
1/28/2011	4:31:10 AM	PHl3 MFC set to  0.000000
1/28/2011	4:31:10 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:31:10 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:31:10 AM	Tube furnace set to 0
1/28/2011	4:32:10 AM	H2 valve closed
1/28/2011	4:32:10 AM	BCl3 valve closed
1/28/2011	4:32:10 AM	PH3 valve closed
1/28/2011	4:32:10 AM	SiCl4 pre valve closed
1/28/2011	4:32:10 AM	SiCl4 post valve closed
1/28/2011	4:32:10 AM	Bubbler valve closed
1/28/2011	4:32:10 AM	Helium valve opened
1/28/2011	4:32:10 AM	Main Vac valve opened
1/28/2011	4:32:10 AM	Bypass valve opened
1/28/2011	4:32:10 AM	Helium MFC set to  100.000000
1/28/2011	4:32:10 AM	H2 MFC set to  0.000000
1/28/2011	4:32:10 AM	BCl3 MFC set to  0.000000
1/28/2011	4:32:10 AM	PHl3 MFC set to  0.000000
1/28/2011	4:32:10 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:32:10 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:32:10 AM	Tube furnace set to 0
1/28/2011	4:33:11 AM	Helium valve closed
1/28/2011	4:33:11 AM	H2 valve closed
1/28/2011	4:33:11 AM	BCl3 valve closed
1/28/2011	4:33:11 AM	PH3 valve closed
1/28/2011	4:33:11 AM	SiCl4 pre valve closed
1/28/2011	4:33:11 AM	SiCl4 post valve closed
1/28/2011	4:33:11 AM	Bubbler valve closed
1/28/2011	4:33:11 AM	Main Vac valve opened
1/28/2011	4:33:11 AM	Bypass valve opened
1/28/2011	4:33:11 AM	Helium MFC set to  0.000000
1/28/2011	4:33:11 AM	H2 MFC set to  0.000000
1/28/2011	4:33:11 AM	BCl3 MFC set to  0.000000
1/28/2011	4:33:11 AM	PHl3 MFC set to  0.000000
1/28/2011	4:33:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:33:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:33:11 AM	Tube furnace set to 0
1/28/2011	4:34:11 AM	H2 valve closed
1/28/2011	4:34:11 AM	BCl3 valve closed
1/28/2011	4:34:11 AM	PH3 valve closed
1/28/2011	4:34:11 AM	SiCl4 pre valve closed
1/28/2011	4:34:11 AM	SiCl4 post valve closed
1/28/2011	4:34:11 AM	Bubbler valve closed
1/28/2011	4:34:11 AM	Helium valve opened
1/28/2011	4:34:11 AM	Main Vac valve opened
1/28/2011	4:34:11 AM	Bypass valve opened
1/28/2011	4:34:11 AM	Helium MFC set to  100.000000
1/28/2011	4:34:11 AM	H2 MFC set to  0.000000
1/28/2011	4:34:11 AM	BCl3 MFC set to  0.000000
1/28/2011	4:34:11 AM	PHl3 MFC set to  0.000000
1/28/2011	4:34:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:34:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:34:11 AM	Tube furnace set to 0
1/28/2011	4:35:11 AM	Helium valve closed
1/28/2011	4:35:11 AM	H2 valve closed
1/28/2011	4:35:11 AM	BCl3 valve closed
1/28/2011	4:35:11 AM	PH3 valve closed
1/28/2011	4:35:11 AM	SiCl4 pre valve closed
1/28/2011	4:35:11 AM	SiCl4 post valve closed
1/28/2011	4:35:11 AM	Bubbler valve closed
1/28/2011	4:35:11 AM	Main Vac valve opened
1/28/2011	4:35:11 AM	Bypass valve opened
1/28/2011	4:35:11 AM	Helium MFC set to  0.000000
1/28/2011	4:35:11 AM	H2 MFC set to  0.000000
1/28/2011	4:35:11 AM	BCl3 MFC set to  0.000000
1/28/2011	4:35:11 AM	PHl3 MFC set to  0.000000
1/28/2011	4:35:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:35:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:35:11 AM	Tube furnace set to 0
1/28/2011	4:36:11 AM	H2 valve closed
1/28/2011	4:36:11 AM	BCl3 valve closed
1/28/2011	4:36:11 AM	PH3 valve closed
1/28/2011	4:36:11 AM	SiCl4 pre valve closed
1/28/2011	4:36:11 AM	SiCl4 post valve closed
1/28/2011	4:36:11 AM	Bubbler valve closed
1/28/2011	4:36:11 AM	Helium valve opened
1/28/2011	4:36:11 AM	Main Vac valve opened
1/28/2011	4:36:11 AM	Bypass valve opened
1/28/2011	4:36:11 AM	Helium MFC set to  100.000000
1/28/2011	4:36:11 AM	H2 MFC set to  0.000000
1/28/2011	4:36:11 AM	BCl3 MFC set to  0.000000
1/28/2011	4:36:11 AM	PHl3 MFC set to  0.000000
1/28/2011	4:36:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:36:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:36:11 AM	Tube furnace set to 0
1/28/2011	4:37:11 AM	Helium valve closed
1/28/2011	4:37:11 AM	H2 valve closed
1/28/2011	4:37:11 AM	BCl3 valve closed
1/28/2011	4:37:11 AM	PH3 valve closed
1/28/2011	4:37:11 AM	SiCl4 pre valve closed
1/28/2011	4:37:11 AM	SiCl4 post valve closed
1/28/2011	4:37:11 AM	Bubbler valve closed
1/28/2011	4:37:11 AM	Main Vac valve opened
1/28/2011	4:37:11 AM	Bypass valve opened
1/28/2011	4:37:11 AM	Helium MFC set to  0.000000
1/28/2011	4:37:11 AM	H2 MFC set to  0.000000
1/28/2011	4:37:11 AM	BCl3 MFC set to  0.000000
1/28/2011	4:37:11 AM	PHl3 MFC set to  0.000000
1/28/2011	4:37:11 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:37:11 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:37:11 AM	Tube furnace set to 0
1/28/2011	4:38:12 AM	H2 valve closed
1/28/2011	4:38:12 AM	BCl3 valve closed
1/28/2011	4:38:12 AM	PH3 valve closed
1/28/2011	4:38:12 AM	SiCl4 pre valve closed
1/28/2011	4:38:12 AM	SiCl4 post valve closed
1/28/2011	4:38:12 AM	Bubbler valve closed
1/28/2011	4:38:12 AM	Helium valve opened
1/28/2011	4:38:12 AM	Main Vac valve opened
1/28/2011	4:38:12 AM	Bypass valve opened
1/28/2011	4:38:12 AM	Helium MFC set to  100.000000
1/28/2011	4:38:12 AM	H2 MFC set to  0.000000
1/28/2011	4:38:12 AM	BCl3 MFC set to  0.000000
1/28/2011	4:38:12 AM	PHl3 MFC set to  0.000000
1/28/2011	4:38:12 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:38:12 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:38:12 AM	Tube furnace set to 0
1/28/2011	4:38:43 AM	Run aborted at 4:38 AM
1/28/2011	4:38:43 AM	Helium valve closed
1/28/2011	4:38:43 AM	H2 valve closed
1/28/2011	4:38:43 AM	BCl3 valve closed
1/28/2011	4:38:43 AM	PH3 valve closed
1/28/2011	4:38:43 AM	SiCl4 pre valve closed
1/28/2011	4:38:43 AM	SiCl4 post valve closed
1/28/2011	4:38:43 AM	Bypass valve closed
1/28/2011	4:38:43 AM	Main Vac valve closed
1/28/2011	4:38:43 AM	Bubbler valve closed
1/28/2011	4:38:43 AM	Helium MFC set to  0.000000
1/28/2011	4:38:43 AM	H2 MFC set to  0.000000
1/28/2011	4:38:43 AM	BCl3 MFC set to  0.000000
1/28/2011	4:38:43 AM	PHl3 MFC set to  0.000000
1/28/2011	4:38:43 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:38:43 AM	Tube furnace set to 0
1/28/2011	4:38:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	4:38:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:38:47 AM	Recipe started at 4:38 AM
1/28/2011	4:38:47 AM	Helium valve closed
1/28/2011	4:38:47 AM	H2 valve closed
1/28/2011	4:38:47 AM	BCl3 valve closed
1/28/2011	4:38:47 AM	PH3 valve closed
1/28/2011	4:38:47 AM	SiCl4 pre valve closed
1/28/2011	4:38:47 AM	SiCl4 post valve closed
1/28/2011	4:38:47 AM	Main Vac valve closed
1/28/2011	4:38:47 AM	Bubbler valve closed
1/28/2011	4:38:47 AM	Bypass valve opened
1/28/2011	4:38:47 AM	Helium MFC set to  0.000000
1/28/2011	4:38:47 AM	H2 MFC set to  0.000000
1/28/2011	4:38:47 AM	BCl3 MFC set to  0.000000
1/28/2011	4:38:47 AM	PHl3 MFC set to  0.000000
1/28/2011	4:38:47 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:38:47 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:38:47 AM	Tube furnace set to 0
1/28/2011	4:38:47 AM	Helium valve closed
1/28/2011	4:38:47 AM	H2 valve closed
1/28/2011	4:38:47 AM	BCl3 valve closed
1/28/2011	4:38:47 AM	PH3 valve closed
1/28/2011	4:38:47 AM	SiCl4 pre valve closed
1/28/2011	4:38:47 AM	SiCl4 post valve closed
1/28/2011	4:38:47 AM	Bubbler valve closed
1/28/2011	4:38:47 AM	Main Vac valve opened
1/28/2011	4:38:47 AM	Bypass valve opened
1/28/2011	4:38:47 AM	Helium MFC set to  0.000000
1/28/2011	4:38:47 AM	H2 MFC set to  0.000000
1/28/2011	4:38:47 AM	BCl3 MFC set to  0.000000
1/28/2011	4:38:47 AM	PHl3 MFC set to  0.000000
1/28/2011	4:38:47 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:38:47 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:38:47 AM	Tube furnace set to 0
1/28/2011	4:38:48 AM	Run finished at 4:38 AM
1/28/2011	4:38:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:39:37 AM	Helium MFC set to  100.000000
1/28/2011	4:39:37 AM	Helium valve opened
1/28/2011	4:40:26 AM	Helium valve closed
1/28/2011	4:40:28 AM	Helium MFC set to  0.000000
1/28/2011	4:41:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	4:41:12 AM	Recipe started at 4:41 AM
1/28/2011	4:41:12 AM	Helium valve closed
1/28/2011	4:41:12 AM	H2 valve closed
1/28/2011	4:41:12 AM	BCl3 valve closed
1/28/2011	4:41:12 AM	PH3 valve closed
1/28/2011	4:41:12 AM	SiCl4 pre valve closed
1/28/2011	4:41:12 AM	SiCl4 post valve closed
1/28/2011	4:41:12 AM	Main Vac valve closed
1/28/2011	4:41:12 AM	Bypass valve closed
1/28/2011	4:41:12 AM	Bubbler valve closed
1/28/2011	4:41:12 AM	Helium MFC set to  0.000000
1/28/2011	4:41:12 AM	H2 MFC set to  0.000000
1/28/2011	4:41:12 AM	BCl3 MFC set to  0.000000
1/28/2011	4:41:12 AM	PHl3 MFC set to  0.000000
1/28/2011	4:41:12 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:41:12 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:41:12 AM	Tube furnace set to 0
1/28/2011	4:41:12 AM	Run finished at 4:41 AM
1/28/2011	4:41:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	4:41:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:41:21 AM	Recipe started at 4:41 AM
1/28/2011	4:41:21 AM	Helium valve closed
1/28/2011	4:41:21 AM	H2 valve closed
1/28/2011	4:41:21 AM	BCl3 valve closed
1/28/2011	4:41:21 AM	PH3 valve closed
1/28/2011	4:41:21 AM	SiCl4 pre valve closed
1/28/2011	4:41:21 AM	SiCl4 post valve closed
1/28/2011	4:41:21 AM	Main Vac valve closed
1/28/2011	4:41:21 AM	Bubbler valve closed
1/28/2011	4:41:21 AM	Bypass valve opened
1/28/2011	4:41:21 AM	Helium MFC set to  0.000000
1/28/2011	4:41:21 AM	H2 MFC set to  0.000000
1/28/2011	4:41:21 AM	BCl3 MFC set to  0.000000
1/28/2011	4:41:21 AM	PHl3 MFC set to  0.000000
1/28/2011	4:41:21 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:41:21 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:41:22 AM	Tube furnace set to 0
1/28/2011	4:41:22 AM	Helium valve closed
1/28/2011	4:41:22 AM	H2 valve closed
1/28/2011	4:41:22 AM	BCl3 valve closed
1/28/2011	4:41:22 AM	PH3 valve closed
1/28/2011	4:41:22 AM	SiCl4 pre valve closed
1/28/2011	4:41:22 AM	SiCl4 post valve closed
1/28/2011	4:41:22 AM	Bubbler valve closed
1/28/2011	4:41:22 AM	Main Vac valve opened
1/28/2011	4:41:22 AM	Bypass valve opened
1/28/2011	4:41:22 AM	Helium MFC set to  0.000000
1/28/2011	4:41:22 AM	H2 MFC set to  0.000000
1/28/2011	4:41:22 AM	BCl3 MFC set to  0.000000
1/28/2011	4:41:22 AM	PHl3 MFC set to  0.000000
1/28/2011	4:41:22 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:41:22 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:41:22 AM	Tube furnace set to 0
1/28/2011	4:41:22 AM	Run finished at 4:41 AM
1/28/2011	4:41:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:41:31 AM	Helium MFC set to  100.000000
1/28/2011	4:41:32 AM	Helium valve opened
1/28/2011	4:41:56 AM	Helium valve closed
1/28/2011	4:41:59 AM	Helium MFC set to  0.000000
1/28/2011	4:42:06 AM	Helium valve opened
1/28/2011	4:42:07 AM	Helium valve closed
1/28/2011	4:42:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	4:42:45 AM	Recipe started at 4:42 AM
1/28/2011	4:42:45 AM	Helium valve closed
1/28/2011	4:42:45 AM	H2 valve closed
1/28/2011	4:42:45 AM	BCl3 valve closed
1/28/2011	4:42:45 AM	PH3 valve closed
1/28/2011	4:42:45 AM	SiCl4 pre valve closed
1/28/2011	4:42:45 AM	SiCl4 post valve closed
1/28/2011	4:42:45 AM	Main Vac valve closed
1/28/2011	4:42:45 AM	Bypass valve closed
1/28/2011	4:42:45 AM	Bubbler valve closed
1/28/2011	4:42:45 AM	Helium MFC set to  0.000000
1/28/2011	4:42:45 AM	H2 MFC set to  0.000000
1/28/2011	4:42:45 AM	BCl3 MFC set to  0.000000
1/28/2011	4:42:45 AM	PHl3 MFC set to  0.000000
1/28/2011	4:42:45 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:42:45 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:42:46 AM	Tube furnace set to 0
1/28/2011	4:42:46 AM	Run finished at 4:42 AM
1/28/2011	4:42:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	4:42:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:42:55 AM	Recipe started at 4:42 AM
1/28/2011	4:42:55 AM	Helium valve closed
1/28/2011	4:42:55 AM	H2 valve closed
1/28/2011	4:42:55 AM	BCl3 valve closed
1/28/2011	4:42:55 AM	PH3 valve closed
1/28/2011	4:42:55 AM	SiCl4 pre valve closed
1/28/2011	4:42:55 AM	SiCl4 post valve closed
1/28/2011	4:42:55 AM	Main Vac valve closed
1/28/2011	4:42:55 AM	Bubbler valve closed
1/28/2011	4:42:55 AM	Bypass valve opened
1/28/2011	4:42:55 AM	Helium MFC set to  0.000000
1/28/2011	4:42:55 AM	H2 MFC set to  0.000000
1/28/2011	4:42:55 AM	BCl3 MFC set to  0.000000
1/28/2011	4:42:55 AM	PHl3 MFC set to  0.000000
1/28/2011	4:42:55 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:42:55 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:42:55 AM	Tube furnace set to 0
1/28/2011	4:42:55 AM	Helium valve closed
1/28/2011	4:42:55 AM	H2 valve closed
1/28/2011	4:42:55 AM	BCl3 valve closed
1/28/2011	4:42:55 AM	PH3 valve closed
1/28/2011	4:42:55 AM	SiCl4 pre valve closed
1/28/2011	4:42:55 AM	SiCl4 post valve closed
1/28/2011	4:42:55 AM	Bubbler valve closed
1/28/2011	4:42:55 AM	Main Vac valve opened
1/28/2011	4:42:55 AM	Bypass valve opened
1/28/2011	4:42:55 AM	Helium MFC set to  0.000000
1/28/2011	4:42:55 AM	H2 MFC set to  0.000000
1/28/2011	4:42:55 AM	BCl3 MFC set to  0.000000
1/28/2011	4:42:55 AM	PHl3 MFC set to  0.000000
1/28/2011	4:42:55 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:42:55 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:42:55 AM	Tube furnace set to 0
1/28/2011	4:42:56 AM	Run finished at 4:42 AM
1/28/2011	4:42:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	4:43:12 AM	Helium MFC set to  100.000000
1/28/2011	4:43:14 AM	Helium valve opened
1/28/2011	4:46:17 AM	Helium MFC set to  0.000000
1/28/2011	4:46:17 AM	Helium valve closed
1/28/2011	4:48:07 AM	Helium MFC set to  100.000000
1/28/2011	4:48:08 AM	Helium valve opened
1/28/2011	4:48:28 AM	Helium MFC set to  0.000000
1/28/2011	4:48:28 AM	Helium valve closed
1/28/2011	4:49:12 AM	Recipe started at 4:49 AM
1/28/2011	4:49:12 AM	Helium valve closed
1/28/2011	4:49:12 AM	BCl3 valve closed
1/28/2011	4:49:12 AM	PH3 valve closed
1/28/2011	4:49:12 AM	SiCl4 pre valve closed
1/28/2011	4:49:12 AM	SiCl4 post valve closed
1/28/2011	4:49:12 AM	Main Vac valve closed
1/28/2011	4:49:12 AM	Bypass valve closed
1/28/2011	4:49:12 AM	Bubbler valve closed
1/28/2011	4:49:12 AM	H2 valve opened
1/28/2011	4:49:12 AM	Helium MFC set to  0.000000
1/28/2011	4:49:12 AM	H2 MFC set to  500.000000
1/28/2011	4:49:12 AM	BCl3 MFC set to  0.000000
1/28/2011	4:49:12 AM	PHl3 MFC set to  0.000000
1/28/2011	4:49:12 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:49:12 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:49:12 AM	Tube furnace set to 0
1/28/2011	4:50:29 AM	Helium valve closed
1/28/2011	4:50:29 AM	BCl3 valve closed
1/28/2011	4:50:29 AM	PH3 valve closed
1/28/2011	4:50:29 AM	SiCl4 pre valve closed
1/28/2011	4:50:29 AM	SiCl4 post valve closed
1/28/2011	4:50:29 AM	Main Vac valve closed
1/28/2011	4:50:29 AM	Bypass valve closed
1/28/2011	4:50:29 AM	H2 valve opened
1/28/2011	4:50:29 AM	Bubbler valve opened
1/28/2011	4:50:29 AM	Helium MFC set to  0.000000
1/28/2011	4:50:29 AM	H2 MFC set to  500.000000
1/28/2011	4:50:29 AM	BCl3 MFC set to  0.000000
1/28/2011	4:50:29 AM	PHl3 MFC set to  0.000000
1/28/2011	4:50:29 AM	SiCl4 MFC set to  0.000000
1/28/2011	4:50:29 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:50:29 AM	Tube furnace set to 1000
1/28/2011	5:10:29 AM	Helium valve closed
1/28/2011	5:10:29 AM	PH3 valve closed
1/28/2011	5:10:29 AM	Main Vac valve closed
1/28/2011	5:10:29 AM	Bypass valve closed
1/28/2011	5:10:29 AM	H2 valve opened
1/28/2011	5:10:29 AM	BCl3 valve opened
1/28/2011	5:10:29 AM	SiCl4 pre valve opened
1/28/2011	5:10:29 AM	SiCl4 post valve opened
1/28/2011	5:10:29 AM	Bubbler valve opened
1/28/2011	5:10:29 AM	Helium MFC set to  0.000000
1/28/2011	5:10:29 AM	H2 MFC set to  500.000000
1/28/2011	5:10:29 AM	BCl3 MFC set to  2.000000
1/28/2011	5:10:29 AM	PHl3 MFC set to  0.000000
1/28/2011	5:10:29 AM	SiCl4 MFC set to  50.000000
1/28/2011	5:10:29 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:10:29 AM	Tube furnace set to 1000
1/28/2011	5:33:29 AM	H2 valve closed
1/28/2011	5:33:29 AM	BCl3 valve closed
1/28/2011	5:33:29 AM	PH3 valve closed
1/28/2011	5:33:29 AM	SiCl4 pre valve closed
1/28/2011	5:33:29 AM	SiCl4 post valve closed
1/28/2011	5:33:29 AM	Main Vac valve closed
1/28/2011	5:33:29 AM	Bypass valve closed
1/28/2011	5:33:29 AM	Helium valve opened
1/28/2011	5:33:29 AM	Bubbler valve opened
1/28/2011	5:33:29 AM	Helium MFC set to  500.000000
1/28/2011	5:33:29 AM	H2 MFC set to  0.000000
1/28/2011	5:33:29 AM	BCl3 MFC set to  0.000000
1/28/2011	5:33:30 AM	PHl3 MFC set to  0.000000
1/28/2011	5:33:30 AM	SiCl4 MFC set to  0.000000
1/28/2011	5:33:30 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:33:30 AM	Tube furnace set to 0
1/28/2011	5:53:30 AM	Helium valve closed
1/28/2011	5:53:30 AM	H2 valve closed
1/28/2011	5:53:30 AM	BCl3 valve closed
1/28/2011	5:53:30 AM	PH3 valve closed
1/28/2011	5:53:30 AM	SiCl4 pre valve closed
1/28/2011	5:53:30 AM	SiCl4 post valve closed
1/28/2011	5:53:30 AM	Main Vac valve closed
1/28/2011	5:53:30 AM	Bypass valve closed
1/28/2011	5:53:30 AM	Bubbler valve closed
1/28/2011	5:53:30 AM	Helium MFC set to  0.000000
1/28/2011	5:53:30 AM	H2 MFC set to  0.000000
1/28/2011	5:53:30 AM	BCl3 MFC set to  0.000000
1/28/2011	5:53:30 AM	PHl3 MFC set to  0.000000
1/28/2011	5:53:30 AM	SiCl4 MFC set to  0.000000
1/28/2011	5:53:30 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:53:30 AM	Tube furnace set to 0
1/28/2011	5:53:30 AM	Run finished at 5:53 AM
1/28/2011	6:26:43 AM	Helium MFC set to  50.000000
1/28/2011	6:26:45 AM	Helium valve opened
1/28/2011	6:26:53 AM	Helium valve closed
1/28/2011	6:26:56 AM	Helium MFC set to  0.000000
1/28/2011	6:27:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	6:27:07 AM	Recipe started at 6:27 AM
1/28/2011	6:27:07 AM	H2 valve closed
1/28/2011	6:27:07 AM	BCl3 valve closed
1/28/2011	6:27:07 AM	PH3 valve closed
1/28/2011	6:27:07 AM	SiCl4 pre valve closed
1/28/2011	6:27:07 AM	SiCl4 post valve closed
1/28/2011	6:27:07 AM	Main Vac valve closed
1/28/2011	6:27:07 AM	Bypass valve closed
1/28/2011	6:27:07 AM	Bubbler valve closed
1/28/2011	6:27:07 AM	Helium valve opened
1/28/2011	6:27:07 AM	Helium MFC set to  500.000000
1/28/2011	6:27:07 AM	H2 MFC set to  0.000000
1/28/2011	6:27:07 AM	BCl3 MFC set to  0.000000
1/28/2011	6:27:07 AM	PHl3 MFC set to  0.000000
1/28/2011	6:27:07 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:27:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:27:07 AM	Tube furnace set to 0
1/28/2011	6:27:09 AM	Helium valve closed
1/28/2011	6:27:09 AM	H2 valve closed
1/28/2011	6:27:09 AM	BCl3 valve closed
1/28/2011	6:27:09 AM	PH3 valve closed
1/28/2011	6:27:09 AM	SiCl4 pre valve closed
1/28/2011	6:27:09 AM	SiCl4 post valve closed
1/28/2011	6:27:09 AM	Main Vac valve closed
1/28/2011	6:27:09 AM	Bypass valve closed
1/28/2011	6:27:09 AM	Bubbler valve closed
1/28/2011	6:27:09 AM	Helium MFC set to  0.000000
1/28/2011	6:27:09 AM	H2 MFC set to  0.000000
1/28/2011	6:27:09 AM	BCl3 MFC set to  0.000000
1/28/2011	6:27:09 AM	PHl3 MFC set to  0.000000
1/28/2011	6:27:09 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:27:09 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:27:09 AM	Tube furnace set to 0
1/28/2011	6:27:09 AM	Run finished at 6:27 AM
1/28/2011	6:27:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	6:33:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:34:00 AM	Recipe started at 6:33 AM
1/28/2011	6:34:00 AM	Helium valve closed
1/28/2011	6:34:00 AM	H2 valve closed
1/28/2011	6:34:00 AM	BCl3 valve closed
1/28/2011	6:34:00 AM	PH3 valve closed
1/28/2011	6:34:00 AM	SiCl4 pre valve closed
1/28/2011	6:34:00 AM	SiCl4 post valve closed
1/28/2011	6:34:00 AM	Main Vac valve closed
1/28/2011	6:34:00 AM	Bubbler valve closed
1/28/2011	6:34:00 AM	Bypass valve opened
1/28/2011	6:34:00 AM	Helium MFC set to  0.000000
1/28/2011	6:34:00 AM	H2 MFC set to  0.000000
1/28/2011	6:34:00 AM	BCl3 MFC set to  0.000000
1/28/2011	6:34:00 AM	PHl3 MFC set to  0.000000
1/28/2011	6:34:00 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:34:00 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:34:00 AM	Tube furnace set to 0
1/28/2011	6:34:33 AM	Helium valve closed
1/28/2011	6:34:33 AM	H2 valve closed
1/28/2011	6:34:33 AM	BCl3 valve closed
1/28/2011	6:34:33 AM	PH3 valve closed
1/28/2011	6:34:33 AM	SiCl4 pre valve closed
1/28/2011	6:34:33 AM	SiCl4 post valve closed
1/28/2011	6:34:33 AM	Bubbler valve closed
1/28/2011	6:34:33 AM	Main Vac valve opened
1/28/2011	6:34:33 AM	Bypass valve opened
1/28/2011	6:34:33 AM	Helium MFC set to  0.000000
1/28/2011	6:34:33 AM	H2 MFC set to  0.000000
1/28/2011	6:34:33 AM	BCl3 MFC set to  0.000000
1/28/2011	6:34:33 AM	PHl3 MFC set to  0.000000
1/28/2011	6:34:33 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:34:33 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:34:33 AM	Tube furnace set to 0
1/28/2011	6:34:34 AM	Run finished at 6:34 AM
1/28/2011	6:34:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:37:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	6:37:34 AM	Recipe started at 6:37 AM
1/28/2011	6:37:34 AM	Helium valve closed
1/28/2011	6:37:34 AM	H2 valve closed
1/28/2011	6:37:34 AM	BCl3 valve closed
1/28/2011	6:37:34 AM	PH3 valve closed
1/28/2011	6:37:34 AM	SiCl4 pre valve closed
1/28/2011	6:37:34 AM	SiCl4 post valve closed
1/28/2011	6:37:34 AM	Main Vac valve closed
1/28/2011	6:37:34 AM	Bubbler valve closed
1/28/2011	6:37:34 AM	Bypass valve opened
1/28/2011	6:37:34 AM	Helium MFC set to  0.000000
1/28/2011	6:37:34 AM	H2 MFC set to  0.000000
1/28/2011	6:37:34 AM	BCl3 MFC set to  0.000000
1/28/2011	6:37:34 AM	PHl3 MFC set to  0.000000
1/28/2011	6:37:34 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:37:34 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:37:34 AM	Tube furnace set to 0
1/28/2011	6:37:34 AM	Helium valve closed
1/28/2011	6:37:34 AM	H2 valve closed
1/28/2011	6:37:34 AM	BCl3 valve closed
1/28/2011	6:37:34 AM	PH3 valve closed
1/28/2011	6:37:34 AM	SiCl4 pre valve closed
1/28/2011	6:37:34 AM	SiCl4 post valve closed
1/28/2011	6:37:34 AM	Bubbler valve closed
1/28/2011	6:37:34 AM	Main Vac valve opened
1/28/2011	6:37:34 AM	Bypass valve opened
1/28/2011	6:37:34 AM	Helium MFC set to  0.000000
1/28/2011	6:37:34 AM	H2 MFC set to  0.000000
1/28/2011	6:37:34 AM	BCl3 MFC set to  0.000000
1/28/2011	6:37:34 AM	PHl3 MFC set to  0.000000
1/28/2011	6:37:34 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:37:34 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:37:35 AM	Tube furnace set to 0
1/28/2011	6:38:35 AM	H2 valve closed
1/28/2011	6:38:35 AM	BCl3 valve closed
1/28/2011	6:38:35 AM	PH3 valve closed
1/28/2011	6:38:35 AM	SiCl4 pre valve closed
1/28/2011	6:38:35 AM	SiCl4 post valve closed
1/28/2011	6:38:35 AM	Bubbler valve closed
1/28/2011	6:38:35 AM	Helium valve opened
1/28/2011	6:38:35 AM	Main Vac valve opened
1/28/2011	6:38:35 AM	Bypass valve opened
1/28/2011	6:38:35 AM	Helium MFC set to  100.000000
1/28/2011	6:38:35 AM	H2 MFC set to  0.000000
1/28/2011	6:38:35 AM	BCl3 MFC set to  0.000000
1/28/2011	6:38:35 AM	PHl3 MFC set to  0.000000
1/28/2011	6:38:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:38:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:38:35 AM	Tube furnace set to 0
1/28/2011	6:39:35 AM	Helium valve closed
1/28/2011	6:39:35 AM	H2 valve closed
1/28/2011	6:39:35 AM	BCl3 valve closed
1/28/2011	6:39:35 AM	PH3 valve closed
1/28/2011	6:39:35 AM	SiCl4 pre valve closed
1/28/2011	6:39:35 AM	SiCl4 post valve closed
1/28/2011	6:39:35 AM	Bubbler valve closed
1/28/2011	6:39:35 AM	Main Vac valve opened
1/28/2011	6:39:35 AM	Bypass valve opened
1/28/2011	6:39:35 AM	Helium MFC set to  0.000000
1/28/2011	6:39:35 AM	H2 MFC set to  0.000000
1/28/2011	6:39:35 AM	BCl3 MFC set to  0.000000
1/28/2011	6:39:35 AM	PHl3 MFC set to  0.000000
1/28/2011	6:39:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:39:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:39:35 AM	Tube furnace set to 0
1/28/2011	6:40:35 AM	H2 valve closed
1/28/2011	6:40:35 AM	BCl3 valve closed
1/28/2011	6:40:35 AM	PH3 valve closed
1/28/2011	6:40:35 AM	SiCl4 pre valve closed
1/28/2011	6:40:35 AM	SiCl4 post valve closed
1/28/2011	6:40:35 AM	Bubbler valve closed
1/28/2011	6:40:35 AM	Helium valve opened
1/28/2011	6:40:35 AM	Main Vac valve opened
1/28/2011	6:40:35 AM	Bypass valve opened
1/28/2011	6:40:35 AM	Helium MFC set to  100.000000
1/28/2011	6:40:35 AM	H2 MFC set to  0.000000
1/28/2011	6:40:35 AM	BCl3 MFC set to  0.000000
1/28/2011	6:40:35 AM	PHl3 MFC set to  0.000000
1/28/2011	6:40:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:40:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:40:35 AM	Tube furnace set to 0
1/28/2011	6:41:35 AM	Helium valve closed
1/28/2011	6:41:35 AM	H2 valve closed
1/28/2011	6:41:35 AM	BCl3 valve closed
1/28/2011	6:41:35 AM	PH3 valve closed
1/28/2011	6:41:35 AM	SiCl4 pre valve closed
1/28/2011	6:41:35 AM	SiCl4 post valve closed
1/28/2011	6:41:35 AM	Bubbler valve closed
1/28/2011	6:41:35 AM	Main Vac valve opened
1/28/2011	6:41:35 AM	Bypass valve opened
1/28/2011	6:41:35 AM	Helium MFC set to  0.000000
1/28/2011	6:41:35 AM	H2 MFC set to  0.000000
1/28/2011	6:41:35 AM	BCl3 MFC set to  0.000000
1/28/2011	6:41:35 AM	PHl3 MFC set to  0.000000
1/28/2011	6:41:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:41:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:41:35 AM	Tube furnace set to 0
1/28/2011	6:42:35 AM	H2 valve closed
1/28/2011	6:42:35 AM	BCl3 valve closed
1/28/2011	6:42:35 AM	PH3 valve closed
1/28/2011	6:42:35 AM	SiCl4 pre valve closed
1/28/2011	6:42:35 AM	SiCl4 post valve closed
1/28/2011	6:42:35 AM	Bubbler valve closed
1/28/2011	6:42:35 AM	Helium valve opened
1/28/2011	6:42:35 AM	Main Vac valve opened
1/28/2011	6:42:35 AM	Bypass valve opened
1/28/2011	6:42:35 AM	Helium MFC set to  100.000000
1/28/2011	6:42:35 AM	H2 MFC set to  0.000000
1/28/2011	6:42:35 AM	BCl3 MFC set to  0.000000
1/28/2011	6:42:35 AM	PHl3 MFC set to  0.000000
1/28/2011	6:42:35 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:42:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:42:36 AM	Tube furnace set to 0
1/28/2011	6:43:36 AM	Helium valve closed
1/28/2011	6:43:36 AM	H2 valve closed
1/28/2011	6:43:36 AM	BCl3 valve closed
1/28/2011	6:43:36 AM	PH3 valve closed
1/28/2011	6:43:36 AM	SiCl4 pre valve closed
1/28/2011	6:43:36 AM	SiCl4 post valve closed
1/28/2011	6:43:36 AM	Bubbler valve closed
1/28/2011	6:43:36 AM	Main Vac valve opened
1/28/2011	6:43:36 AM	Bypass valve opened
1/28/2011	6:43:36 AM	Helium MFC set to  0.000000
1/28/2011	6:43:36 AM	H2 MFC set to  0.000000
1/28/2011	6:43:36 AM	BCl3 MFC set to  0.000000
1/28/2011	6:43:36 AM	PHl3 MFC set to  0.000000
1/28/2011	6:43:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:43:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:43:36 AM	Tube furnace set to 0
1/28/2011	6:44:36 AM	H2 valve closed
1/28/2011	6:44:36 AM	BCl3 valve closed
1/28/2011	6:44:36 AM	PH3 valve closed
1/28/2011	6:44:36 AM	SiCl4 pre valve closed
1/28/2011	6:44:36 AM	SiCl4 post valve closed
1/28/2011	6:44:36 AM	Bubbler valve closed
1/28/2011	6:44:36 AM	Helium valve opened
1/28/2011	6:44:36 AM	Main Vac valve opened
1/28/2011	6:44:36 AM	Bypass valve opened
1/28/2011	6:44:36 AM	Helium MFC set to  100.000000
1/28/2011	6:44:36 AM	H2 MFC set to  0.000000
1/28/2011	6:44:36 AM	BCl3 MFC set to  0.000000
1/28/2011	6:44:36 AM	PHl3 MFC set to  0.000000
1/28/2011	6:44:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:44:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:44:36 AM	Tube furnace set to 0
1/28/2011	6:45:36 AM	Helium valve closed
1/28/2011	6:45:36 AM	H2 valve closed
1/28/2011	6:45:36 AM	BCl3 valve closed
1/28/2011	6:45:36 AM	PH3 valve closed
1/28/2011	6:45:36 AM	SiCl4 pre valve closed
1/28/2011	6:45:36 AM	SiCl4 post valve closed
1/28/2011	6:45:36 AM	Bubbler valve closed
1/28/2011	6:45:36 AM	Main Vac valve opened
1/28/2011	6:45:36 AM	Bypass valve opened
1/28/2011	6:45:36 AM	Helium MFC set to  0.000000
1/28/2011	6:45:36 AM	H2 MFC set to  0.000000
1/28/2011	6:45:36 AM	BCl3 MFC set to  0.000000
1/28/2011	6:45:36 AM	PHl3 MFC set to  0.000000
1/28/2011	6:45:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:45:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:45:36 AM	Tube furnace set to 0
1/28/2011	6:46:36 AM	H2 valve closed
1/28/2011	6:46:36 AM	BCl3 valve closed
1/28/2011	6:46:36 AM	PH3 valve closed
1/28/2011	6:46:36 AM	SiCl4 pre valve closed
1/28/2011	6:46:36 AM	SiCl4 post valve closed
1/28/2011	6:46:36 AM	Bubbler valve closed
1/28/2011	6:46:36 AM	Helium valve opened
1/28/2011	6:46:36 AM	Main Vac valve opened
1/28/2011	6:46:36 AM	Bypass valve opened
1/28/2011	6:46:36 AM	Helium MFC set to  100.000000
1/28/2011	6:46:36 AM	H2 MFC set to  0.000000
1/28/2011	6:46:36 AM	BCl3 MFC set to  0.000000
1/28/2011	6:46:36 AM	PHl3 MFC set to  0.000000
1/28/2011	6:46:36 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:46:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:46:36 AM	Tube furnace set to 0
1/28/2011	6:47:36 AM	Helium valve closed
1/28/2011	6:47:36 AM	H2 valve closed
1/28/2011	6:47:36 AM	BCl3 valve closed
1/28/2011	6:47:36 AM	PH3 valve closed
1/28/2011	6:47:36 AM	SiCl4 pre valve closed
1/28/2011	6:47:36 AM	SiCl4 post valve closed
1/28/2011	6:47:36 AM	Bubbler valve closed
1/28/2011	6:47:36 AM	Main Vac valve opened
1/28/2011	6:47:36 AM	Bypass valve opened
1/28/2011	6:47:36 AM	Helium MFC set to  0.000000
1/28/2011	6:47:37 AM	H2 MFC set to  0.000000
1/28/2011	6:47:37 AM	BCl3 MFC set to  0.000000
1/28/2011	6:47:37 AM	PHl3 MFC set to  0.000000
1/28/2011	6:47:37 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:47:37 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:47:37 AM	Tube furnace set to 0
1/28/2011	6:48:37 AM	H2 valve closed
1/28/2011	6:48:37 AM	BCl3 valve closed
1/28/2011	6:48:37 AM	PH3 valve closed
1/28/2011	6:48:37 AM	SiCl4 pre valve closed
1/28/2011	6:48:37 AM	SiCl4 post valve closed
1/28/2011	6:48:37 AM	Bubbler valve closed
1/28/2011	6:48:37 AM	Helium valve opened
1/28/2011	6:48:37 AM	Main Vac valve opened
1/28/2011	6:48:37 AM	Bypass valve opened
1/28/2011	6:48:37 AM	Helium MFC set to  100.000000
1/28/2011	6:48:37 AM	H2 MFC set to  0.000000
1/28/2011	6:48:37 AM	BCl3 MFC set to  0.000000
1/28/2011	6:48:37 AM	PHl3 MFC set to  0.000000
1/28/2011	6:48:37 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:48:37 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:48:37 AM	Tube furnace set to 0
1/28/2011	6:49:37 AM	Helium valve closed
1/28/2011	6:49:37 AM	H2 valve closed
1/28/2011	6:49:37 AM	BCl3 valve closed
1/28/2011	6:49:37 AM	PH3 valve closed
1/28/2011	6:49:37 AM	SiCl4 pre valve closed
1/28/2011	6:49:37 AM	SiCl4 post valve closed
1/28/2011	6:49:37 AM	Bubbler valve closed
1/28/2011	6:49:37 AM	Main Vac valve opened
1/28/2011	6:49:37 AM	Bypass valve opened
1/28/2011	6:49:37 AM	Helium MFC set to  0.000000
1/28/2011	6:49:37 AM	H2 MFC set to  0.000000
1/28/2011	6:49:37 AM	BCl3 MFC set to  0.000000
1/28/2011	6:49:37 AM	PHl3 MFC set to  0.000000
1/28/2011	6:49:37 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:49:37 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:49:37 AM	Tube furnace set to 0
1/28/2011	6:50:37 AM	H2 valve closed
1/28/2011	6:50:37 AM	BCl3 valve closed
1/28/2011	6:50:37 AM	PH3 valve closed
1/28/2011	6:50:37 AM	SiCl4 pre valve closed
1/28/2011	6:50:37 AM	SiCl4 post valve closed
1/28/2011	6:50:37 AM	Bubbler valve closed
1/28/2011	6:50:37 AM	Helium valve opened
1/28/2011	6:50:37 AM	Main Vac valve opened
1/28/2011	6:50:37 AM	Bypass valve opened
1/28/2011	6:50:37 AM	Helium MFC set to  100.000000
1/28/2011	6:50:37 AM	H2 MFC set to  0.000000
1/28/2011	6:50:37 AM	BCl3 MFC set to  0.000000
1/28/2011	6:50:37 AM	PHl3 MFC set to  0.000000
1/28/2011	6:50:37 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:50:37 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:50:37 AM	Tube furnace set to 0
1/28/2011	6:51:37 AM	Helium valve closed
1/28/2011	6:51:37 AM	H2 valve closed
1/28/2011	6:51:37 AM	BCl3 valve closed
1/28/2011	6:51:37 AM	PH3 valve closed
1/28/2011	6:51:37 AM	SiCl4 pre valve closed
1/28/2011	6:51:37 AM	SiCl4 post valve closed
1/28/2011	6:51:37 AM	Bubbler valve closed
1/28/2011	6:51:37 AM	Main Vac valve opened
1/28/2011	6:51:37 AM	Bypass valve opened
1/28/2011	6:51:37 AM	Helium MFC set to  0.000000
1/28/2011	6:51:37 AM	H2 MFC set to  0.000000
1/28/2011	6:51:37 AM	BCl3 MFC set to  0.000000
1/28/2011	6:51:37 AM	PHl3 MFC set to  0.000000
1/28/2011	6:51:37 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:51:37 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:51:38 AM	Tube furnace set to 0
1/28/2011	6:52:22 AM	Run aborted at 6:52 AM
1/28/2011	6:52:22 AM	Helium valve closed
1/28/2011	6:52:22 AM	H2 valve closed
1/28/2011	6:52:22 AM	BCl3 valve closed
1/28/2011	6:52:22 AM	PH3 valve closed
1/28/2011	6:52:22 AM	SiCl4 pre valve closed
1/28/2011	6:52:22 AM	SiCl4 post valve closed
1/28/2011	6:52:22 AM	Bypass valve closed
1/28/2011	6:52:22 AM	Main Vac valve closed
1/28/2011	6:52:22 AM	Bubbler valve closed
1/28/2011	6:52:22 AM	Helium MFC set to  0.000000
1/28/2011	6:52:22 AM	H2 MFC set to  0.000000
1/28/2011	6:52:22 AM	BCl3 MFC set to  0.000000
1/28/2011	6:52:22 AM	PHl3 MFC set to  0.000000
1/28/2011	6:52:22 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:52:22 AM	Tube furnace set to 0
1/28/2011	6:52:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	6:52:37 AM	Helium MFC set to  100.000000
1/28/2011	6:52:40 AM	Helium valve opened
1/28/2011	6:52:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:52:47 AM	Recipe started at 6:52 AM
1/28/2011	6:52:47 AM	Helium valve closed
1/28/2011	6:52:47 AM	H2 valve closed
1/28/2011	6:52:47 AM	BCl3 valve closed
1/28/2011	6:52:47 AM	PH3 valve closed
1/28/2011	6:52:47 AM	SiCl4 pre valve closed
1/28/2011	6:52:47 AM	SiCl4 post valve closed
1/28/2011	6:52:47 AM	Main Vac valve closed
1/28/2011	6:52:47 AM	Bubbler valve closed
1/28/2011	6:52:47 AM	Bypass valve opened
1/28/2011	6:52:47 AM	Helium MFC set to  0.000000
1/28/2011	6:52:47 AM	H2 MFC set to  0.000000
1/28/2011	6:52:47 AM	BCl3 MFC set to  0.000000
1/28/2011	6:52:47 AM	PHl3 MFC set to  0.000000
1/28/2011	6:52:47 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:52:47 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:52:47 AM	Tube furnace set to 0
1/28/2011	6:52:48 AM	Helium valve closed
1/28/2011	6:52:48 AM	H2 valve closed
1/28/2011	6:52:48 AM	BCl3 valve closed
1/28/2011	6:52:48 AM	PH3 valve closed
1/28/2011	6:52:48 AM	SiCl4 pre valve closed
1/28/2011	6:52:48 AM	SiCl4 post valve closed
1/28/2011	6:52:48 AM	Bubbler valve closed
1/28/2011	6:52:48 AM	Main Vac valve opened
1/28/2011	6:52:48 AM	Bypass valve opened
1/28/2011	6:52:48 AM	Helium MFC set to  0.000000
1/28/2011	6:52:48 AM	H2 MFC set to  0.000000
1/28/2011	6:52:48 AM	BCl3 MFC set to  0.000000
1/28/2011	6:52:48 AM	PHl3 MFC set to  0.000000
1/28/2011	6:52:48 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:52:48 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:52:48 AM	Tube furnace set to 0
1/28/2011	6:52:48 AM	Run finished at 6:52 AM
1/28/2011	6:52:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:52:58 AM	Helium MFC set to  100.000000
1/28/2011	6:53:00 AM	Helium valve opened
1/28/2011	6:54:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:54:44 AM	Recipe started at 6:54 AM
1/28/2011	6:54:44 AM	Helium valve closed
1/28/2011	6:54:44 AM	H2 valve closed
1/28/2011	6:54:44 AM	BCl3 valve closed
1/28/2011	6:54:44 AM	PH3 valve closed
1/28/2011	6:54:44 AM	SiCl4 pre valve closed
1/28/2011	6:54:44 AM	SiCl4 post valve closed
1/28/2011	6:54:44 AM	Main Vac valve closed
1/28/2011	6:54:44 AM	Bubbler valve closed
1/28/2011	6:54:44 AM	Bypass valve opened
1/28/2011	6:54:44 AM	Helium MFC set to  0.000000
1/28/2011	6:54:44 AM	H2 MFC set to  0.000000
1/28/2011	6:54:44 AM	BCl3 MFC set to  0.000000
1/28/2011	6:54:44 AM	PHl3 MFC set to  0.000000
1/28/2011	6:54:44 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:54:44 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:54:44 AM	Tube furnace set to 0
1/28/2011	6:54:44 AM	Helium valve closed
1/28/2011	6:54:44 AM	H2 valve closed
1/28/2011	6:54:44 AM	BCl3 valve closed
1/28/2011	6:54:44 AM	PH3 valve closed
1/28/2011	6:54:44 AM	SiCl4 pre valve closed
1/28/2011	6:54:44 AM	SiCl4 post valve closed
1/28/2011	6:54:44 AM	Bubbler valve closed
1/28/2011	6:54:44 AM	Main Vac valve opened
1/28/2011	6:54:44 AM	Bypass valve opened
1/28/2011	6:54:44 AM	Helium MFC set to  0.000000
1/28/2011	6:54:44 AM	H2 MFC set to  0.000000
1/28/2011	6:54:44 AM	BCl3 MFC set to  0.000000
1/28/2011	6:54:44 AM	PHl3 MFC set to  0.000000
1/28/2011	6:54:44 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:54:44 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:54:45 AM	Tube furnace set to 0
1/28/2011	6:54:45 AM	Run finished at 6:54 AM
1/28/2011	6:54:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	6:55:28 AM	Recipe started at 6:55 AM
1/28/2011	6:55:28 AM	Helium valve closed
1/28/2011	6:55:28 AM	BCl3 valve closed
1/28/2011	6:55:28 AM	PH3 valve closed
1/28/2011	6:55:28 AM	SiCl4 pre valve closed
1/28/2011	6:55:28 AM	SiCl4 post valve closed
1/28/2011	6:55:28 AM	Main Vac valve closed
1/28/2011	6:55:28 AM	Bypass valve closed
1/28/2011	6:55:28 AM	Bubbler valve closed
1/28/2011	6:55:28 AM	H2 valve opened
1/28/2011	6:55:28 AM	Helium MFC set to  0.000000
1/28/2011	6:55:28 AM	H2 MFC set to  500.000000
1/28/2011	6:55:28 AM	BCl3 MFC set to  0.000000
1/28/2011	6:55:28 AM	PHl3 MFC set to  0.000000
1/28/2011	6:55:28 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:55:28 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:55:28 AM	Tube furnace set to 0
1/28/2011	6:56:43 AM	Helium valve closed
1/28/2011	6:56:43 AM	BCl3 valve closed
1/28/2011	6:56:43 AM	PH3 valve closed
1/28/2011	6:56:43 AM	SiCl4 pre valve closed
1/28/2011	6:56:43 AM	SiCl4 post valve closed
1/28/2011	6:56:43 AM	Main Vac valve closed
1/28/2011	6:56:43 AM	Bypass valve closed
1/28/2011	6:56:43 AM	H2 valve opened
1/28/2011	6:56:43 AM	Bubbler valve opened
1/28/2011	6:56:43 AM	Helium MFC set to  0.000000
1/28/2011	6:56:43 AM	H2 MFC set to  500.000000
1/28/2011	6:56:43 AM	BCl3 MFC set to  0.000000
1/28/2011	6:56:43 AM	PHl3 MFC set to  0.000000
1/28/2011	6:56:43 AM	SiCl4 MFC set to  0.000000
1/28/2011	6:56:43 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:56:43 AM	Tube furnace set to 1000
1/28/2011	7:16:43 AM	Helium valve closed
1/28/2011	7:16:43 AM	PH3 valve closed
1/28/2011	7:16:43 AM	Main Vac valve closed
1/28/2011	7:16:43 AM	Bypass valve closed
1/28/2011	7:16:43 AM	H2 valve opened
1/28/2011	7:16:43 AM	BCl3 valve opened
1/28/2011	7:16:43 AM	SiCl4 pre valve opened
1/28/2011	7:16:43 AM	SiCl4 post valve opened
1/28/2011	7:16:43 AM	Bubbler valve opened
1/28/2011	7:16:43 AM	Helium MFC set to  0.000000
1/28/2011	7:16:43 AM	H2 MFC set to  500.000000
1/28/2011	7:16:43 AM	BCl3 MFC set to  2.500000
1/28/2011	7:16:43 AM	PHl3 MFC set to  0.000000
1/28/2011	7:16:43 AM	SiCl4 MFC set to  50.000000
1/28/2011	7:16:43 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	7:16:44 AM	Tube furnace set to 1000
1/28/2011	7:41:44 AM	H2 valve closed
1/28/2011	7:41:44 AM	BCl3 valve closed
1/28/2011	7:41:44 AM	PH3 valve closed
1/28/2011	7:41:44 AM	SiCl4 pre valve closed
1/28/2011	7:41:44 AM	SiCl4 post valve closed
1/28/2011	7:41:44 AM	Main Vac valve closed
1/28/2011	7:41:44 AM	Bypass valve closed
1/28/2011	7:41:44 AM	Helium valve opened
1/28/2011	7:41:44 AM	Bubbler valve opened
1/28/2011	7:41:44 AM	Helium MFC set to  500.000000
1/28/2011	7:41:44 AM	H2 MFC set to  0.000000
1/28/2011	7:41:44 AM	BCl3 MFC set to  0.000000
1/28/2011	7:41:44 AM	PHl3 MFC set to  0.000000
1/28/2011	7:41:44 AM	SiCl4 MFC set to  0.000000
1/28/2011	7:41:44 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	7:41:44 AM	Tube furnace set to 0
1/28/2011	8:01:44 AM	Helium valve closed
1/28/2011	8:01:44 AM	H2 valve closed
1/28/2011	8:01:44 AM	BCl3 valve closed
1/28/2011	8:01:44 AM	PH3 valve closed
1/28/2011	8:01:44 AM	SiCl4 pre valve closed
1/28/2011	8:01:44 AM	SiCl4 post valve closed
1/28/2011	8:01:44 AM	Main Vac valve closed
1/28/2011	8:01:44 AM	Bypass valve closed
1/28/2011	8:01:44 AM	Bubbler valve closed
1/28/2011	8:01:44 AM	Helium MFC set to  0.000000
1/28/2011	8:01:44 AM	H2 MFC set to  0.000000
1/28/2011	8:01:44 AM	BCl3 MFC set to  0.000000
1/28/2011	8:01:44 AM	PHl3 MFC set to  0.000000
1/28/2011	8:01:44 AM	SiCl4 MFC set to  0.000000
1/28/2011	8:01:44 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	8:01:44 AM	Tube furnace set to 0
1/28/2011	8:01:44 AM	Run finished at 8:01 AM
1/28/2011	9:13:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	9:13:45 AM	Recipe started at 9:13 AM
1/28/2011	9:13:45 AM	H2 valve closed
1/28/2011	9:13:45 AM	BCl3 valve closed
1/28/2011	9:13:45 AM	PH3 valve closed
1/28/2011	9:13:45 AM	SiCl4 pre valve closed
1/28/2011	9:13:45 AM	SiCl4 post valve closed
1/28/2011	9:13:45 AM	Main Vac valve closed
1/28/2011	9:13:45 AM	Bypass valve closed
1/28/2011	9:13:45 AM	Bubbler valve closed
1/28/2011	9:13:45 AM	Helium valve opened
1/28/2011	9:13:45 AM	Helium MFC set to  500.000000
1/28/2011	9:13:45 AM	H2 MFC set to  0.000000
1/28/2011	9:13:45 AM	BCl3 MFC set to  0.000000
1/28/2011	9:13:45 AM	PHl3 MFC set to  0.000000
1/28/2011	9:13:45 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:13:45 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:13:45 AM	Tube furnace set to 0
1/28/2011	9:13:49 AM	Helium valve closed
1/28/2011	9:13:49 AM	H2 valve closed
1/28/2011	9:13:49 AM	BCl3 valve closed
1/28/2011	9:13:49 AM	PH3 valve closed
1/28/2011	9:13:49 AM	SiCl4 pre valve closed
1/28/2011	9:13:49 AM	SiCl4 post valve closed
1/28/2011	9:13:49 AM	Main Vac valve closed
1/28/2011	9:13:49 AM	Bypass valve closed
1/28/2011	9:13:49 AM	Bubbler valve closed
1/28/2011	9:13:49 AM	Helium MFC set to  0.000000
1/28/2011	9:13:49 AM	H2 MFC set to  0.000000
1/28/2011	9:13:49 AM	BCl3 MFC set to  0.000000
1/28/2011	9:13:49 AM	PHl3 MFC set to  0.000000
1/28/2011	9:13:49 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:13:49 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:13:49 AM	Tube furnace set to 0
1/28/2011	9:13:49 AM	Run finished at 9:13 AM
1/28/2011	9:13:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	9:21:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	9:21:59 AM	Recipe started at 9:21 AM
1/28/2011	9:21:59 AM	Helium valve closed
1/28/2011	9:21:59 AM	H2 valve closed
1/28/2011	9:21:59 AM	BCl3 valve closed
1/28/2011	9:21:59 AM	PH3 valve closed
1/28/2011	9:21:59 AM	SiCl4 pre valve closed
1/28/2011	9:21:59 AM	SiCl4 post valve closed
1/28/2011	9:21:59 AM	Main Vac valve closed
1/28/2011	9:21:59 AM	Bubbler valve closed
1/28/2011	9:21:59 AM	Bypass valve opened
1/28/2011	9:21:59 AM	Helium MFC set to  0.000000
1/28/2011	9:21:59 AM	H2 MFC set to  0.000000
1/28/2011	9:21:59 AM	BCl3 MFC set to  0.000000
1/28/2011	9:21:59 AM	PHl3 MFC set to  0.000000
1/28/2011	9:21:59 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:21:59 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:21:59 AM	Tube furnace set to 0
1/28/2011	9:22:32 AM	Helium valve closed
1/28/2011	9:22:32 AM	H2 valve closed
1/28/2011	9:22:32 AM	BCl3 valve closed
1/28/2011	9:22:32 AM	PH3 valve closed
1/28/2011	9:22:33 AM	SiCl4 pre valve closed
1/28/2011	9:22:33 AM	SiCl4 post valve closed
1/28/2011	9:22:33 AM	Bubbler valve closed
1/28/2011	9:22:33 AM	Main Vac valve opened
1/28/2011	9:22:33 AM	Bypass valve opened
1/28/2011	9:22:33 AM	Helium MFC set to  0.000000
1/28/2011	9:22:33 AM	H2 MFC set to  0.000000
1/28/2011	9:22:33 AM	BCl3 MFC set to  0.000000
1/28/2011	9:22:33 AM	PHl3 MFC set to  0.000000
1/28/2011	9:22:33 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:22:33 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:22:33 AM	Tube furnace set to 0
1/28/2011	9:22:33 AM	Run finished at 9:22 AM
1/28/2011	9:22:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	9:24:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	9:25:00 AM	Recipe started at 9:24 AM
1/28/2011	9:25:00 AM	Helium valve closed
1/28/2011	9:25:00 AM	H2 valve closed
1/28/2011	9:25:00 AM	BCl3 valve closed
1/28/2011	9:25:00 AM	PH3 valve closed
1/28/2011	9:25:00 AM	SiCl4 pre valve closed
1/28/2011	9:25:00 AM	SiCl4 post valve closed
1/28/2011	9:25:00 AM	Main Vac valve closed
1/28/2011	9:25:00 AM	Bubbler valve closed
1/28/2011	9:25:00 AM	Bypass valve opened
1/28/2011	9:25:00 AM	Helium MFC set to  0.000000
1/28/2011	9:25:00 AM	H2 MFC set to  0.000000
1/28/2011	9:25:00 AM	BCl3 MFC set to  0.000000
1/28/2011	9:25:00 AM	PHl3 MFC set to  0.000000
1/28/2011	9:25:00 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:25:00 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:25:00 AM	Tube furnace set to 0
1/28/2011	9:25:01 AM	Helium valve closed
1/28/2011	9:25:01 AM	H2 valve closed
1/28/2011	9:25:01 AM	BCl3 valve closed
1/28/2011	9:25:01 AM	PH3 valve closed
1/28/2011	9:25:01 AM	SiCl4 pre valve closed
1/28/2011	9:25:01 AM	SiCl4 post valve closed
1/28/2011	9:25:01 AM	Bubbler valve closed
1/28/2011	9:25:01 AM	Main Vac valve opened
1/28/2011	9:25:01 AM	Bypass valve opened
1/28/2011	9:25:01 AM	Helium MFC set to  0.000000
1/28/2011	9:25:01 AM	H2 MFC set to  0.000000
1/28/2011	9:25:01 AM	BCl3 MFC set to  0.000000
1/28/2011	9:25:01 AM	PHl3 MFC set to  0.000000
1/28/2011	9:25:01 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:25:01 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:25:01 AM	Tube furnace set to 0
1/28/2011	9:26:01 AM	H2 valve closed
1/28/2011	9:26:01 AM	BCl3 valve closed
1/28/2011	9:26:01 AM	PH3 valve closed
1/28/2011	9:26:01 AM	SiCl4 pre valve closed
1/28/2011	9:26:01 AM	SiCl4 post valve closed
1/28/2011	9:26:01 AM	Bubbler valve closed
1/28/2011	9:26:01 AM	Helium valve opened
1/28/2011	9:26:01 AM	Main Vac valve opened
1/28/2011	9:26:01 AM	Bypass valve opened
1/28/2011	9:26:01 AM	Helium MFC set to  100.000000
1/28/2011	9:26:01 AM	H2 MFC set to  0.000000
1/28/2011	9:26:01 AM	BCl3 MFC set to  0.000000
1/28/2011	9:26:01 AM	PHl3 MFC set to  0.000000
1/28/2011	9:26:01 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:26:01 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:26:01 AM	Tube furnace set to 0
1/28/2011	9:27:01 AM	Helium valve closed
1/28/2011	9:27:01 AM	H2 valve closed
1/28/2011	9:27:01 AM	BCl3 valve closed
1/28/2011	9:27:01 AM	PH3 valve closed
1/28/2011	9:27:01 AM	SiCl4 pre valve closed
1/28/2011	9:27:01 AM	SiCl4 post valve closed
1/28/2011	9:27:01 AM	Bubbler valve closed
1/28/2011	9:27:01 AM	Main Vac valve opened
1/28/2011	9:27:01 AM	Bypass valve opened
1/28/2011	9:27:01 AM	Helium MFC set to  0.000000
1/28/2011	9:27:01 AM	H2 MFC set to  0.000000
1/28/2011	9:27:01 AM	BCl3 MFC set to  0.000000
1/28/2011	9:27:01 AM	PHl3 MFC set to  0.000000
1/28/2011	9:27:01 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:27:01 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:27:01 AM	Tube furnace set to 0
1/28/2011	9:28:01 AM	H2 valve closed
1/28/2011	9:28:01 AM	BCl3 valve closed
1/28/2011	9:28:01 AM	PH3 valve closed
1/28/2011	9:28:01 AM	SiCl4 pre valve closed
1/28/2011	9:28:01 AM	SiCl4 post valve closed
1/28/2011	9:28:01 AM	Bubbler valve closed
1/28/2011	9:28:01 AM	Helium valve opened
1/28/2011	9:28:01 AM	Main Vac valve opened
1/28/2011	9:28:01 AM	Bypass valve opened
1/28/2011	9:28:01 AM	Helium MFC set to  100.000000
1/28/2011	9:28:01 AM	H2 MFC set to  0.000000
1/28/2011	9:28:01 AM	BCl3 MFC set to  0.000000
1/28/2011	9:28:01 AM	PHl3 MFC set to  0.000000
1/28/2011	9:28:01 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:28:01 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:28:01 AM	Tube furnace set to 0
1/28/2011	9:29:01 AM	Helium valve closed
1/28/2011	9:29:01 AM	H2 valve closed
1/28/2011	9:29:01 AM	BCl3 valve closed
1/28/2011	9:29:01 AM	PH3 valve closed
1/28/2011	9:29:01 AM	SiCl4 pre valve closed
1/28/2011	9:29:01 AM	SiCl4 post valve closed
1/28/2011	9:29:01 AM	Bubbler valve closed
1/28/2011	9:29:01 AM	Main Vac valve opened
1/28/2011	9:29:01 AM	Bypass valve opened
1/28/2011	9:29:01 AM	Helium MFC set to  0.000000
1/28/2011	9:29:01 AM	H2 MFC set to  0.000000
1/28/2011	9:29:01 AM	BCl3 MFC set to  0.000000
1/28/2011	9:29:01 AM	PHl3 MFC set to  0.000000
1/28/2011	9:29:01 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:29:01 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:29:02 AM	Tube furnace set to 0
1/28/2011	9:30:02 AM	H2 valve closed
1/28/2011	9:30:02 AM	BCl3 valve closed
1/28/2011	9:30:02 AM	PH3 valve closed
1/28/2011	9:30:02 AM	SiCl4 pre valve closed
1/28/2011	9:30:02 AM	SiCl4 post valve closed
1/28/2011	9:30:02 AM	Bubbler valve closed
1/28/2011	9:30:02 AM	Helium valve opened
1/28/2011	9:30:02 AM	Main Vac valve opened
1/28/2011	9:30:02 AM	Bypass valve opened
1/28/2011	9:30:02 AM	Helium MFC set to  100.000000
1/28/2011	9:30:02 AM	H2 MFC set to  0.000000
1/28/2011	9:30:02 AM	BCl3 MFC set to  0.000000
1/28/2011	9:30:02 AM	PHl3 MFC set to  0.000000
1/28/2011	9:30:02 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:30:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:30:02 AM	Tube furnace set to 0
1/28/2011	9:31:02 AM	Helium valve closed
1/28/2011	9:31:02 AM	H2 valve closed
1/28/2011	9:31:02 AM	BCl3 valve closed
1/28/2011	9:31:02 AM	PH3 valve closed
1/28/2011	9:31:02 AM	SiCl4 pre valve closed
1/28/2011	9:31:02 AM	SiCl4 post valve closed
1/28/2011	9:31:02 AM	Bubbler valve closed
1/28/2011	9:31:02 AM	Main Vac valve opened
1/28/2011	9:31:02 AM	Bypass valve opened
1/28/2011	9:31:02 AM	Helium MFC set to  0.000000
1/28/2011	9:31:02 AM	H2 MFC set to  0.000000
1/28/2011	9:31:02 AM	BCl3 MFC set to  0.000000
1/28/2011	9:31:02 AM	PHl3 MFC set to  0.000000
1/28/2011	9:31:02 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:31:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:31:02 AM	Tube furnace set to 0
1/28/2011	9:32:02 AM	H2 valve closed
1/28/2011	9:32:02 AM	BCl3 valve closed
1/28/2011	9:32:02 AM	PH3 valve closed
1/28/2011	9:32:02 AM	SiCl4 pre valve closed
1/28/2011	9:32:02 AM	SiCl4 post valve closed
1/28/2011	9:32:02 AM	Bubbler valve closed
1/28/2011	9:32:02 AM	Helium valve opened
1/28/2011	9:32:02 AM	Main Vac valve opened
1/28/2011	9:32:02 AM	Bypass valve opened
1/28/2011	9:32:02 AM	Helium MFC set to  100.000000
1/28/2011	9:32:02 AM	H2 MFC set to  0.000000
1/28/2011	9:32:02 AM	BCl3 MFC set to  0.000000
1/28/2011	9:32:02 AM	PHl3 MFC set to  0.000000
1/28/2011	9:32:02 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:32:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:32:02 AM	Tube furnace set to 0
1/28/2011	9:33:02 AM	Helium valve closed
1/28/2011	9:33:02 AM	H2 valve closed
1/28/2011	9:33:02 AM	BCl3 valve closed
1/28/2011	9:33:02 AM	PH3 valve closed
1/28/2011	9:33:02 AM	SiCl4 pre valve closed
1/28/2011	9:33:02 AM	SiCl4 post valve closed
1/28/2011	9:33:02 AM	Bubbler valve closed
1/28/2011	9:33:02 AM	Main Vac valve opened
1/28/2011	9:33:02 AM	Bypass valve opened
1/28/2011	9:33:02 AM	Helium MFC set to  0.000000
1/28/2011	9:33:02 AM	H2 MFC set to  0.000000
1/28/2011	9:33:02 AM	BCl3 MFC set to  0.000000
1/28/2011	9:33:02 AM	PHl3 MFC set to  0.000000
1/28/2011	9:33:02 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:33:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:33:02 AM	Tube furnace set to 0
1/28/2011	9:34:02 AM	H2 valve closed
1/28/2011	9:34:02 AM	BCl3 valve closed
1/28/2011	9:34:02 AM	PH3 valve closed
1/28/2011	9:34:02 AM	SiCl4 pre valve closed
1/28/2011	9:34:02 AM	SiCl4 post valve closed
1/28/2011	9:34:02 AM	Bubbler valve closed
1/28/2011	9:34:02 AM	Helium valve opened
1/28/2011	9:34:02 AM	Main Vac valve opened
1/28/2011	9:34:02 AM	Bypass valve opened
1/28/2011	9:34:02 AM	Helium MFC set to  100.000000
1/28/2011	9:34:02 AM	H2 MFC set to  0.000000
1/28/2011	9:34:02 AM	BCl3 MFC set to  0.000000
1/28/2011	9:34:02 AM	PHl3 MFC set to  0.000000
1/28/2011	9:34:02 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:34:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:34:03 AM	Tube furnace set to 0
1/28/2011	9:35:03 AM	Helium valve closed
1/28/2011	9:35:03 AM	H2 valve closed
1/28/2011	9:35:03 AM	BCl3 valve closed
1/28/2011	9:35:03 AM	PH3 valve closed
1/28/2011	9:35:03 AM	SiCl4 pre valve closed
1/28/2011	9:35:03 AM	SiCl4 post valve closed
1/28/2011	9:35:03 AM	Bubbler valve closed
1/28/2011	9:35:03 AM	Main Vac valve opened
1/28/2011	9:35:03 AM	Bypass valve opened
1/28/2011	9:35:03 AM	Helium MFC set to  0.000000
1/28/2011	9:35:03 AM	H2 MFC set to  0.000000
1/28/2011	9:35:03 AM	BCl3 MFC set to  0.000000
1/28/2011	9:35:03 AM	PHl3 MFC set to  0.000000
1/28/2011	9:35:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:35:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:35:03 AM	Tube furnace set to 0
1/28/2011	9:36:03 AM	H2 valve closed
1/28/2011	9:36:03 AM	BCl3 valve closed
1/28/2011	9:36:03 AM	PH3 valve closed
1/28/2011	9:36:03 AM	SiCl4 pre valve closed
1/28/2011	9:36:03 AM	SiCl4 post valve closed
1/28/2011	9:36:03 AM	Bubbler valve closed
1/28/2011	9:36:03 AM	Helium valve opened
1/28/2011	9:36:03 AM	Main Vac valve opened
1/28/2011	9:36:03 AM	Bypass valve opened
1/28/2011	9:36:03 AM	Helium MFC set to  100.000000
1/28/2011	9:36:03 AM	H2 MFC set to  0.000000
1/28/2011	9:36:03 AM	BCl3 MFC set to  0.000000
1/28/2011	9:36:03 AM	PHl3 MFC set to  0.000000
1/28/2011	9:36:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:36:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:36:03 AM	Tube furnace set to 0
1/28/2011	9:37:03 AM	Helium valve closed
1/28/2011	9:37:03 AM	H2 valve closed
1/28/2011	9:37:03 AM	BCl3 valve closed
1/28/2011	9:37:03 AM	PH3 valve closed
1/28/2011	9:37:03 AM	SiCl4 pre valve closed
1/28/2011	9:37:03 AM	SiCl4 post valve closed
1/28/2011	9:37:03 AM	Bubbler valve closed
1/28/2011	9:37:03 AM	Main Vac valve opened
1/28/2011	9:37:03 AM	Bypass valve opened
1/28/2011	9:37:03 AM	Helium MFC set to  0.000000
1/28/2011	9:37:03 AM	H2 MFC set to  0.000000
1/28/2011	9:37:03 AM	BCl3 MFC set to  0.000000
1/28/2011	9:37:03 AM	PHl3 MFC set to  0.000000
1/28/2011	9:37:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:37:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:37:03 AM	Tube furnace set to 0
1/28/2011	9:38:03 AM	H2 valve closed
1/28/2011	9:38:03 AM	BCl3 valve closed
1/28/2011	9:38:03 AM	PH3 valve closed
1/28/2011	9:38:03 AM	SiCl4 pre valve closed
1/28/2011	9:38:03 AM	SiCl4 post valve closed
1/28/2011	9:38:03 AM	Bubbler valve closed
1/28/2011	9:38:03 AM	Helium valve opened
1/28/2011	9:38:03 AM	Main Vac valve opened
1/28/2011	9:38:03 AM	Bypass valve opened
1/28/2011	9:38:03 AM	Helium MFC set to  100.000000
1/28/2011	9:38:03 AM	H2 MFC set to  0.000000
1/28/2011	9:38:03 AM	BCl3 MFC set to  0.000000
1/28/2011	9:38:03 AM	PHl3 MFC set to  0.000000
1/28/2011	9:38:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:38:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:38:03 AM	Tube furnace set to 0
1/28/2011	9:39:03 AM	Helium valve closed
1/28/2011	9:39:03 AM	H2 valve closed
1/28/2011	9:39:03 AM	BCl3 valve closed
1/28/2011	9:39:03 AM	PH3 valve closed
1/28/2011	9:39:03 AM	SiCl4 pre valve closed
1/28/2011	9:39:03 AM	SiCl4 post valve closed
1/28/2011	9:39:03 AM	Bubbler valve closed
1/28/2011	9:39:03 AM	Main Vac valve opened
1/28/2011	9:39:03 AM	Bypass valve opened
1/28/2011	9:39:03 AM	Helium MFC set to  0.000000
1/28/2011	9:39:03 AM	H2 MFC set to  0.000000
1/28/2011	9:39:03 AM	BCl3 MFC set to  0.000000
1/28/2011	9:39:03 AM	PHl3 MFC set to  0.000000
1/28/2011	9:39:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:39:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:39:04 AM	Tube furnace set to 0
1/28/2011	9:40:04 AM	H2 valve closed
1/28/2011	9:40:04 AM	BCl3 valve closed
1/28/2011	9:40:04 AM	PH3 valve closed
1/28/2011	9:40:04 AM	SiCl4 pre valve closed
1/28/2011	9:40:04 AM	SiCl4 post valve closed
1/28/2011	9:40:04 AM	Bubbler valve closed
1/28/2011	9:40:04 AM	Helium valve opened
1/28/2011	9:40:04 AM	Main Vac valve opened
1/28/2011	9:40:04 AM	Bypass valve opened
1/28/2011	9:40:04 AM	Helium MFC set to  100.000000
1/28/2011	9:40:04 AM	H2 MFC set to  0.000000
1/28/2011	9:40:04 AM	BCl3 MFC set to  0.000000
1/28/2011	9:40:04 AM	PHl3 MFC set to  0.000000
1/28/2011	9:40:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:40:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:40:04 AM	Tube furnace set to 0
1/28/2011	9:41:04 AM	Helium valve closed
1/28/2011	9:41:04 AM	H2 valve closed
1/28/2011	9:41:04 AM	BCl3 valve closed
1/28/2011	9:41:04 AM	PH3 valve closed
1/28/2011	9:41:04 AM	SiCl4 pre valve closed
1/28/2011	9:41:04 AM	SiCl4 post valve closed
1/28/2011	9:41:04 AM	Bubbler valve closed
1/28/2011	9:41:04 AM	Main Vac valve opened
1/28/2011	9:41:04 AM	Bypass valve opened
1/28/2011	9:41:04 AM	Helium MFC set to  0.000000
1/28/2011	9:41:04 AM	H2 MFC set to  0.000000
1/28/2011	9:41:04 AM	BCl3 MFC set to  0.000000
1/28/2011	9:41:04 AM	PHl3 MFC set to  0.000000
1/28/2011	9:41:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:41:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:41:04 AM	Tube furnace set to 0
1/28/2011	9:42:04 AM	H2 valve closed
1/28/2011	9:42:04 AM	BCl3 valve closed
1/28/2011	9:42:04 AM	PH3 valve closed
1/28/2011	9:42:04 AM	SiCl4 pre valve closed
1/28/2011	9:42:04 AM	SiCl4 post valve closed
1/28/2011	9:42:04 AM	Bubbler valve closed
1/28/2011	9:42:04 AM	Helium valve opened
1/28/2011	9:42:04 AM	Main Vac valve opened
1/28/2011	9:42:04 AM	Bypass valve opened
1/28/2011	9:42:04 AM	Helium MFC set to  100.000000
1/28/2011	9:42:04 AM	H2 MFC set to  0.000000
1/28/2011	9:42:04 AM	BCl3 MFC set to  0.000000
1/28/2011	9:42:04 AM	PHl3 MFC set to  0.000000
1/28/2011	9:42:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:42:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:42:04 AM	Tube furnace set to 0
1/28/2011	9:43:04 AM	Helium valve closed
1/28/2011	9:43:04 AM	H2 valve closed
1/28/2011	9:43:04 AM	BCl3 valve closed
1/28/2011	9:43:04 AM	PH3 valve closed
1/28/2011	9:43:04 AM	SiCl4 pre valve closed
1/28/2011	9:43:04 AM	SiCl4 post valve closed
1/28/2011	9:43:04 AM	Bubbler valve closed
1/28/2011	9:43:04 AM	Main Vac valve opened
1/28/2011	9:43:04 AM	Bypass valve opened
1/28/2011	9:43:04 AM	Helium MFC set to  0.000000
1/28/2011	9:43:04 AM	H2 MFC set to  0.000000
1/28/2011	9:43:04 AM	BCl3 MFC set to  0.000000
1/28/2011	9:43:04 AM	PHl3 MFC set to  0.000000
1/28/2011	9:43:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:43:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:43:04 AM	Tube furnace set to 0
1/28/2011	9:44:04 AM	H2 valve closed
1/28/2011	9:44:04 AM	BCl3 valve closed
1/28/2011	9:44:04 AM	PH3 valve closed
1/28/2011	9:44:04 AM	SiCl4 pre valve closed
1/28/2011	9:44:04 AM	SiCl4 post valve closed
1/28/2011	9:44:04 AM	Bubbler valve closed
1/28/2011	9:44:04 AM	Helium valve opened
1/28/2011	9:44:04 AM	Main Vac valve opened
1/28/2011	9:44:04 AM	Bypass valve opened
1/28/2011	9:44:04 AM	Helium MFC set to  100.000000
1/28/2011	9:44:04 AM	H2 MFC set to  0.000000
1/28/2011	9:44:04 AM	BCl3 MFC set to  0.000000
1/28/2011	9:44:04 AM	PHl3 MFC set to  0.000000
1/28/2011	9:44:04 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:44:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:44:05 AM	Tube furnace set to 0
1/28/2011	9:45:05 AM	Helium valve closed
1/28/2011	9:45:05 AM	H2 valve closed
1/28/2011	9:45:05 AM	BCl3 valve closed
1/28/2011	9:45:05 AM	PH3 valve closed
1/28/2011	9:45:05 AM	SiCl4 pre valve closed
1/28/2011	9:45:05 AM	SiCl4 post valve closed
1/28/2011	9:45:05 AM	Bubbler valve closed
1/28/2011	9:45:05 AM	Main Vac valve opened
1/28/2011	9:45:05 AM	Bypass valve opened
1/28/2011	9:45:05 AM	Helium MFC set to  0.000000
1/28/2011	9:45:05 AM	H2 MFC set to  0.000000
1/28/2011	9:45:05 AM	BCl3 MFC set to  0.000000
1/28/2011	9:45:05 AM	PHl3 MFC set to  0.000000
1/28/2011	9:45:05 AM	SiCl4 MFC set to  0.000000
1/28/2011	9:45:05 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	9:45:05 AM	Tube furnace set to 0
1/28/2011	9:45:06 AM	Run finished at 9:45 AM
1/28/2011	9:45:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	10:53:56 AM	Helium MFC set to  100.000000
1/28/2011	10:54:00 AM	Helium valve opened
1/28/2011	10:54:32 AM	Helium MFC set to  0.000000
1/28/2011	10:54:33 AM	Helium valve closed
1/28/2011	10:55:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	10:55:19 AM	Recipe started at 10:55 AM
1/28/2011	10:55:19 AM	Helium valve closed
1/28/2011	10:55:19 AM	H2 valve closed
1/28/2011	10:55:19 AM	BCl3 valve closed
1/28/2011	10:55:19 AM	PH3 valve closed
1/28/2011	10:55:19 AM	SiCl4 pre valve closed
1/28/2011	10:55:19 AM	SiCl4 post valve closed
1/28/2011	10:55:19 AM	Main Vac valve closed
1/28/2011	10:55:19 AM	Bypass valve closed
1/28/2011	10:55:19 AM	Bubbler valve closed
1/28/2011	10:55:19 AM	Helium MFC set to  0.000000
1/28/2011	10:55:19 AM	H2 MFC set to  0.000000
1/28/2011	10:55:19 AM	BCl3 MFC set to  0.000000
1/28/2011	10:55:19 AM	PHl3 MFC set to  0.000000
1/28/2011	10:55:19 AM	SiCl4 MFC set to  0.000000
1/28/2011	10:55:19 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:55:20 AM	Tube furnace set to 0
1/28/2011	10:55:20 AM	Run finished at 10:55 AM
1/28/2011	10:55:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	10:55:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:55:39 AM	Recipe started at 10:55 AM
1/28/2011	10:55:39 AM	Helium valve closed
1/28/2011	10:55:39 AM	H2 valve closed
1/28/2011	10:55:39 AM	BCl3 valve closed
1/28/2011	10:55:39 AM	PH3 valve closed
1/28/2011	10:55:39 AM	SiCl4 pre valve closed
1/28/2011	10:55:39 AM	SiCl4 post valve closed
1/28/2011	10:55:39 AM	Main Vac valve closed
1/28/2011	10:55:39 AM	Bubbler valve closed
1/28/2011	10:55:39 AM	Bypass valve opened
1/28/2011	10:55:39 AM	Helium MFC set to  0.000000
1/28/2011	10:55:39 AM	H2 MFC set to  0.000000
1/28/2011	10:55:39 AM	BCl3 MFC set to  0.000000
1/28/2011	10:55:39 AM	PHl3 MFC set to  0.000000
1/28/2011	10:55:39 AM	SiCl4 MFC set to  0.000000
1/28/2011	10:55:39 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:55:39 AM	Tube furnace set to 0
1/28/2011	10:55:39 AM	Helium valve closed
1/28/2011	10:55:39 AM	H2 valve closed
1/28/2011	10:55:39 AM	BCl3 valve closed
1/28/2011	10:55:39 AM	PH3 valve closed
1/28/2011	10:55:39 AM	SiCl4 pre valve closed
1/28/2011	10:55:39 AM	SiCl4 post valve closed
1/28/2011	10:55:39 AM	Bubbler valve closed
1/28/2011	10:55:39 AM	Main Vac valve opened
1/28/2011	10:55:39 AM	Bypass valve opened
1/28/2011	10:55:39 AM	Helium MFC set to  0.000000
1/28/2011	10:55:39 AM	H2 MFC set to  0.000000
1/28/2011	10:55:39 AM	BCl3 MFC set to  0.000000
1/28/2011	10:55:39 AM	PHl3 MFC set to  0.000000
1/28/2011	10:55:39 AM	SiCl4 MFC set to  0.000000
1/28/2011	10:55:39 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:55:39 AM	Tube furnace set to 0
1/28/2011	10:55:40 AM	Run finished at 10:55 AM
1/28/2011	10:55:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:55:48 AM	Helium MFC set to  100.000000
1/28/2011	10:55:50 AM	Helium valve opened
1/28/2011	10:56:17 AM	Helium MFC set to  0.000000
1/28/2011	10:56:17 AM	Helium valve closed
1/28/2011	10:57:03 AM	Recipe started at 10:57 AM
1/28/2011	10:57:03 AM	Helium valve closed
1/28/2011	10:57:03 AM	BCl3 valve closed
1/28/2011	10:57:03 AM	PH3 valve closed
1/28/2011	10:57:03 AM	SiCl4 pre valve closed
1/28/2011	10:57:03 AM	SiCl4 post valve closed
1/28/2011	10:57:03 AM	Main Vac valve closed
1/28/2011	10:57:03 AM	Bypass valve closed
1/28/2011	10:57:03 AM	Bubbler valve closed
1/28/2011	10:57:03 AM	H2 valve opened
1/28/2011	10:57:03 AM	Helium MFC set to  0.000000
1/28/2011	10:57:03 AM	H2 MFC set to  500.000000
1/28/2011	10:57:03 AM	BCl3 MFC set to  0.000000
1/28/2011	10:57:03 AM	PHl3 MFC set to  0.000000
1/28/2011	10:57:03 AM	SiCl4 MFC set to  0.000000
1/28/2011	10:57:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:57:03 AM	Tube furnace set to 0
1/28/2011	10:58:25 AM	Helium valve closed
1/28/2011	10:58:25 AM	BCl3 valve closed
1/28/2011	10:58:25 AM	PH3 valve closed
1/28/2011	10:58:25 AM	SiCl4 pre valve closed
1/28/2011	10:58:25 AM	SiCl4 post valve closed
1/28/2011	10:58:25 AM	Main Vac valve closed
1/28/2011	10:58:25 AM	Bypass valve closed
1/28/2011	10:58:25 AM	H2 valve opened
1/28/2011	10:58:25 AM	Bubbler valve opened
1/28/2011	10:58:25 AM	Helium MFC set to  0.000000
1/28/2011	10:58:25 AM	H2 MFC set to  500.000000
1/28/2011	10:58:25 AM	BCl3 MFC set to  0.000000
1/28/2011	10:58:25 AM	PHl3 MFC set to  0.000000
1/28/2011	10:58:25 AM	SiCl4 MFC set to  0.000000
1/28/2011	10:58:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:58:25 AM	Tube furnace set to 1000
1/28/2011	11:18:25 AM	Helium valve closed
1/28/2011	11:18:25 AM	PH3 valve closed
1/28/2011	11:18:25 AM	Main Vac valve closed
1/28/2011	11:18:25 AM	Bypass valve closed
1/28/2011	11:18:25 AM	H2 valve opened
1/28/2011	11:18:25 AM	BCl3 valve opened
1/28/2011	11:18:25 AM	SiCl4 pre valve opened
1/28/2011	11:18:25 AM	SiCl4 post valve opened
1/28/2011	11:18:25 AM	Bubbler valve opened
1/28/2011	11:18:25 AM	Helium MFC set to  0.000000
1/28/2011	11:18:25 AM	H2 MFC set to  500.000000
1/28/2011	11:18:25 AM	BCl3 MFC set to  2.500000
1/28/2011	11:18:25 AM	PHl3 MFC set to  0.000000
1/28/2011	11:18:25 AM	SiCl4 MFC set to  50.000000
1/28/2011	11:18:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:18:25 AM	Tube furnace set to 1000
1/28/2011	11:43:25 AM	H2 valve closed
1/28/2011	11:43:25 AM	BCl3 valve closed
1/28/2011	11:43:25 AM	PH3 valve closed
1/28/2011	11:43:25 AM	SiCl4 pre valve closed
1/28/2011	11:43:25 AM	SiCl4 post valve closed
1/28/2011	11:43:25 AM	Main Vac valve closed
1/28/2011	11:43:25 AM	Bypass valve closed
1/28/2011	11:43:25 AM	Helium valve opened
1/28/2011	11:43:25 AM	Bubbler valve opened
1/28/2011	11:43:25 AM	Helium MFC set to  500.000000
1/28/2011	11:43:25 AM	H2 MFC set to  0.000000
1/28/2011	11:43:25 AM	BCl3 MFC set to  0.000000
1/28/2011	11:43:25 AM	PHl3 MFC set to  0.000000
1/28/2011	11:43:25 AM	SiCl4 MFC set to  0.000000
1/28/2011	11:43:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:43:25 AM	Tube furnace set to 0
1/28/2011	12:03:25 PM	Helium valve closed
1/28/2011	12:03:25 PM	H2 valve closed
1/28/2011	12:03:25 PM	BCl3 valve closed
1/28/2011	12:03:25 PM	PH3 valve closed
1/28/2011	12:03:25 PM	SiCl4 pre valve closed
1/28/2011	12:03:25 PM	SiCl4 post valve closed
1/28/2011	12:03:25 PM	Main Vac valve closed
1/28/2011	12:03:25 PM	Bypass valve closed
1/28/2011	12:03:25 PM	Bubbler valve closed
1/28/2011	12:03:25 PM	Helium MFC set to  0.000000
1/28/2011	12:03:25 PM	H2 MFC set to  0.000000
1/28/2011	12:03:25 PM	BCl3 MFC set to  0.000000
1/28/2011	12:03:25 PM	PHl3 MFC set to  0.000000
1/28/2011	12:03:25 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:03:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:03:26 PM	Tube furnace set to 0
1/28/2011	12:03:26 PM	Run finished at 12:03 PM
1/28/2011	12:45:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	12:45:00 PM	Recipe started at 12:45 PM
1/28/2011	12:45:00 PM	H2 valve closed
1/28/2011	12:45:00 PM	BCl3 valve closed
1/28/2011	12:45:00 PM	PH3 valve closed
1/28/2011	12:45:00 PM	SiCl4 pre valve closed
1/28/2011	12:45:00 PM	SiCl4 post valve closed
1/28/2011	12:45:00 PM	Main Vac valve closed
1/28/2011	12:45:00 PM	Bypass valve closed
1/28/2011	12:45:00 PM	Bubbler valve closed
1/28/2011	12:45:00 PM	Helium valve opened
1/28/2011	12:45:00 PM	Helium MFC set to  500.000000
1/28/2011	12:45:00 PM	H2 MFC set to  0.000000
1/28/2011	12:45:00 PM	BCl3 MFC set to  0.000000
1/28/2011	12:45:00 PM	PHl3 MFC set to  0.000000
1/28/2011	12:45:00 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:45:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:45:01 PM	Tube furnace set to 0
1/28/2011	12:45:04 PM	Helium valve closed
1/28/2011	12:45:04 PM	H2 valve closed
1/28/2011	12:45:04 PM	BCl3 valve closed
1/28/2011	12:45:04 PM	PH3 valve closed
1/28/2011	12:45:04 PM	SiCl4 pre valve closed
1/28/2011	12:45:04 PM	SiCl4 post valve closed
1/28/2011	12:45:04 PM	Main Vac valve closed
1/28/2011	12:45:04 PM	Bypass valve closed
1/28/2011	12:45:04 PM	Bubbler valve closed
1/28/2011	12:45:04 PM	Helium MFC set to  0.000000
1/28/2011	12:45:04 PM	H2 MFC set to  0.000000
1/28/2011	12:45:04 PM	BCl3 MFC set to  0.000000
1/28/2011	12:45:04 PM	PHl3 MFC set to  0.000000
1/28/2011	12:45:04 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:45:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:45:04 PM	Tube furnace set to 0
1/28/2011	12:45:04 PM	Run finished at 12:45 PM
1/28/2011	12:45:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	12:54:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	12:54:57 PM	Recipe started at 12:54 PM
1/28/2011	12:54:57 PM	Helium valve closed
1/28/2011	12:54:57 PM	H2 valve closed
1/28/2011	12:54:57 PM	BCl3 valve closed
1/28/2011	12:54:57 PM	PH3 valve closed
1/28/2011	12:54:57 PM	SiCl4 pre valve closed
1/28/2011	12:54:57 PM	SiCl4 post valve closed
1/28/2011	12:54:57 PM	Main Vac valve closed
1/28/2011	12:54:57 PM	Bubbler valve closed
1/28/2011	12:54:57 PM	Bypass valve opened
1/28/2011	12:54:57 PM	Helium MFC set to  0.000000
1/28/2011	12:54:57 PM	H2 MFC set to  0.000000
1/28/2011	12:54:57 PM	BCl3 MFC set to  0.000000
1/28/2011	12:54:57 PM	PHl3 MFC set to  0.000000
1/28/2011	12:54:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:54:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:54:58 PM	Tube furnace set to 0
1/28/2011	12:55:32 PM	Helium valve closed
1/28/2011	12:55:32 PM	H2 valve closed
1/28/2011	12:55:32 PM	BCl3 valve closed
1/28/2011	12:55:32 PM	PH3 valve closed
1/28/2011	12:55:32 PM	SiCl4 pre valve closed
1/28/2011	12:55:32 PM	SiCl4 post valve closed
1/28/2011	12:55:32 PM	Bubbler valve closed
1/28/2011	12:55:32 PM	Main Vac valve opened
1/28/2011	12:55:32 PM	Bypass valve opened
1/28/2011	12:55:32 PM	Helium MFC set to  0.000000
1/28/2011	12:55:32 PM	H2 MFC set to  0.000000
1/28/2011	12:55:32 PM	BCl3 MFC set to  0.000000
1/28/2011	12:55:32 PM	PHl3 MFC set to  0.000000
1/28/2011	12:55:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:55:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:55:32 PM	Tube furnace set to 0
1/28/2011	12:55:32 PM	Run finished at 12:55 PM
1/28/2011	12:55:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	12:58:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	12:58:17 PM	Recipe started at 12:58 PM
1/28/2011	12:58:18 PM	Helium valve closed
1/28/2011	12:58:18 PM	H2 valve closed
1/28/2011	12:58:18 PM	BCl3 valve closed
1/28/2011	12:58:18 PM	PH3 valve closed
1/28/2011	12:58:18 PM	SiCl4 pre valve closed
1/28/2011	12:58:18 PM	SiCl4 post valve closed
1/28/2011	12:58:18 PM	Main Vac valve closed
1/28/2011	12:58:18 PM	Bubbler valve closed
1/28/2011	12:58:18 PM	Bypass valve opened
1/28/2011	12:58:18 PM	Helium MFC set to  0.000000
1/28/2011	12:58:18 PM	H2 MFC set to  0.000000
1/28/2011	12:58:18 PM	BCl3 MFC set to  0.000000
1/28/2011	12:58:18 PM	PHl3 MFC set to  0.000000
1/28/2011	12:58:18 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:58:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:58:18 PM	Tube furnace set to 0
1/28/2011	12:58:18 PM	Helium valve closed
1/28/2011	12:58:18 PM	H2 valve closed
1/28/2011	12:58:18 PM	BCl3 valve closed
1/28/2011	12:58:18 PM	PH3 valve closed
1/28/2011	12:58:18 PM	SiCl4 pre valve closed
1/28/2011	12:58:18 PM	SiCl4 post valve closed
1/28/2011	12:58:18 PM	Bubbler valve closed
1/28/2011	12:58:18 PM	Main Vac valve opened
1/28/2011	12:58:18 PM	Bypass valve opened
1/28/2011	12:58:18 PM	Helium MFC set to  0.000000
1/28/2011	12:58:18 PM	H2 MFC set to  0.000000
1/28/2011	12:58:18 PM	BCl3 MFC set to  0.000000
1/28/2011	12:58:18 PM	PHl3 MFC set to  0.000000
1/28/2011	12:58:18 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:58:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:58:18 PM	Tube furnace set to 0
1/28/2011	12:59:18 PM	H2 valve closed
1/28/2011	12:59:18 PM	BCl3 valve closed
1/28/2011	12:59:18 PM	PH3 valve closed
1/28/2011	12:59:18 PM	SiCl4 pre valve closed
1/28/2011	12:59:18 PM	SiCl4 post valve closed
1/28/2011	12:59:18 PM	Bubbler valve closed
1/28/2011	12:59:18 PM	Helium valve opened
1/28/2011	12:59:18 PM	Main Vac valve opened
1/28/2011	12:59:18 PM	Bypass valve opened
1/28/2011	12:59:18 PM	Helium MFC set to  100.000000
1/28/2011	12:59:18 PM	H2 MFC set to  0.000000
1/28/2011	12:59:18 PM	BCl3 MFC set to  0.000000
1/28/2011	12:59:18 PM	PHl3 MFC set to  0.000000
1/28/2011	12:59:18 PM	SiCl4 MFC set to  0.000000
1/28/2011	12:59:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	12:59:18 PM	Tube furnace set to 0
1/28/2011	1:00:18 PM	Helium valve closed
1/28/2011	1:00:18 PM	H2 valve closed
1/28/2011	1:00:18 PM	BCl3 valve closed
1/28/2011	1:00:18 PM	PH3 valve closed
1/28/2011	1:00:18 PM	SiCl4 pre valve closed
1/28/2011	1:00:18 PM	SiCl4 post valve closed
1/28/2011	1:00:18 PM	Bubbler valve closed
1/28/2011	1:00:18 PM	Main Vac valve opened
1/28/2011	1:00:18 PM	Bypass valve opened
1/28/2011	1:00:18 PM	Helium MFC set to  0.000000
1/28/2011	1:00:18 PM	H2 MFC set to  0.000000
1/28/2011	1:00:18 PM	BCl3 MFC set to  0.000000
1/28/2011	1:00:18 PM	PHl3 MFC set to  0.000000
1/28/2011	1:00:18 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:00:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:00:19 PM	Tube furnace set to 0
1/28/2011	1:01:19 PM	H2 valve closed
1/28/2011	1:01:19 PM	BCl3 valve closed
1/28/2011	1:01:19 PM	PH3 valve closed
1/28/2011	1:01:19 PM	SiCl4 pre valve closed
1/28/2011	1:01:19 PM	SiCl4 post valve closed
1/28/2011	1:01:19 PM	Bubbler valve closed
1/28/2011	1:01:19 PM	Helium valve opened
1/28/2011	1:01:19 PM	Main Vac valve opened
1/28/2011	1:01:19 PM	Bypass valve opened
1/28/2011	1:01:19 PM	Helium MFC set to  100.000000
1/28/2011	1:01:19 PM	H2 MFC set to  0.000000
1/28/2011	1:01:19 PM	BCl3 MFC set to  0.000000
1/28/2011	1:01:19 PM	PHl3 MFC set to  0.000000
1/28/2011	1:01:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:01:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:01:19 PM	Tube furnace set to 0
1/28/2011	1:02:19 PM	Helium valve closed
1/28/2011	1:02:19 PM	H2 valve closed
1/28/2011	1:02:19 PM	BCl3 valve closed
1/28/2011	1:02:19 PM	PH3 valve closed
1/28/2011	1:02:19 PM	SiCl4 pre valve closed
1/28/2011	1:02:19 PM	SiCl4 post valve closed
1/28/2011	1:02:19 PM	Bubbler valve closed
1/28/2011	1:02:19 PM	Main Vac valve opened
1/28/2011	1:02:19 PM	Bypass valve opened
1/28/2011	1:02:19 PM	Helium MFC set to  0.000000
1/28/2011	1:02:19 PM	H2 MFC set to  0.000000
1/28/2011	1:02:19 PM	BCl3 MFC set to  0.000000
1/28/2011	1:02:19 PM	PHl3 MFC set to  0.000000
1/28/2011	1:02:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:02:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:02:19 PM	Tube furnace set to 0
1/28/2011	1:03:19 PM	H2 valve closed
1/28/2011	1:03:19 PM	BCl3 valve closed
1/28/2011	1:03:19 PM	PH3 valve closed
1/28/2011	1:03:19 PM	SiCl4 pre valve closed
1/28/2011	1:03:19 PM	SiCl4 post valve closed
1/28/2011	1:03:19 PM	Bubbler valve closed
1/28/2011	1:03:19 PM	Helium valve opened
1/28/2011	1:03:19 PM	Main Vac valve opened
1/28/2011	1:03:19 PM	Bypass valve opened
1/28/2011	1:03:19 PM	Helium MFC set to  100.000000
1/28/2011	1:03:19 PM	H2 MFC set to  0.000000
1/28/2011	1:03:19 PM	BCl3 MFC set to  0.000000
1/28/2011	1:03:19 PM	PHl3 MFC set to  0.000000
1/28/2011	1:03:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:03:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:03:19 PM	Tube furnace set to 0
1/28/2011	1:04:19 PM	Helium valve closed
1/28/2011	1:04:19 PM	H2 valve closed
1/28/2011	1:04:19 PM	BCl3 valve closed
1/28/2011	1:04:19 PM	PH3 valve closed
1/28/2011	1:04:19 PM	SiCl4 pre valve closed
1/28/2011	1:04:19 PM	SiCl4 post valve closed
1/28/2011	1:04:19 PM	Bubbler valve closed
1/28/2011	1:04:19 PM	Main Vac valve opened
1/28/2011	1:04:19 PM	Bypass valve opened
1/28/2011	1:04:19 PM	Helium MFC set to  0.000000
1/28/2011	1:04:19 PM	H2 MFC set to  0.000000
1/28/2011	1:04:19 PM	BCl3 MFC set to  0.000000
1/28/2011	1:04:19 PM	PHl3 MFC set to  0.000000
1/28/2011	1:04:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:04:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:04:19 PM	Tube furnace set to 0
1/28/2011	1:05:19 PM	H2 valve closed
1/28/2011	1:05:19 PM	BCl3 valve closed
1/28/2011	1:05:19 PM	PH3 valve closed
1/28/2011	1:05:19 PM	SiCl4 pre valve closed
1/28/2011	1:05:19 PM	SiCl4 post valve closed
1/28/2011	1:05:19 PM	Bubbler valve closed
1/28/2011	1:05:19 PM	Helium valve opened
1/28/2011	1:05:19 PM	Main Vac valve opened
1/28/2011	1:05:19 PM	Bypass valve opened
1/28/2011	1:05:19 PM	Helium MFC set to  100.000000
1/28/2011	1:05:19 PM	H2 MFC set to  0.000000
1/28/2011	1:05:19 PM	BCl3 MFC set to  0.000000
1/28/2011	1:05:19 PM	PHl3 MFC set to  0.000000
1/28/2011	1:05:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:05:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:05:20 PM	Tube furnace set to 0
1/28/2011	1:06:20 PM	Helium valve closed
1/28/2011	1:06:20 PM	H2 valve closed
1/28/2011	1:06:20 PM	BCl3 valve closed
1/28/2011	1:06:20 PM	PH3 valve closed
1/28/2011	1:06:20 PM	SiCl4 pre valve closed
1/28/2011	1:06:20 PM	SiCl4 post valve closed
1/28/2011	1:06:20 PM	Bubbler valve closed
1/28/2011	1:06:20 PM	Main Vac valve opened
1/28/2011	1:06:20 PM	Bypass valve opened
1/28/2011	1:06:20 PM	Helium MFC set to  0.000000
1/28/2011	1:06:20 PM	H2 MFC set to  0.000000
1/28/2011	1:06:20 PM	BCl3 MFC set to  0.000000
1/28/2011	1:06:20 PM	PHl3 MFC set to  0.000000
1/28/2011	1:06:20 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:06:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:06:20 PM	Tube furnace set to 0
1/28/2011	1:07:20 PM	H2 valve closed
1/28/2011	1:07:20 PM	BCl3 valve closed
1/28/2011	1:07:20 PM	PH3 valve closed
1/28/2011	1:07:20 PM	SiCl4 pre valve closed
1/28/2011	1:07:20 PM	SiCl4 post valve closed
1/28/2011	1:07:20 PM	Bubbler valve closed
1/28/2011	1:07:20 PM	Helium valve opened
1/28/2011	1:07:20 PM	Main Vac valve opened
1/28/2011	1:07:20 PM	Bypass valve opened
1/28/2011	1:07:20 PM	Helium MFC set to  100.000000
1/28/2011	1:07:20 PM	H2 MFC set to  0.000000
1/28/2011	1:07:20 PM	BCl3 MFC set to  0.000000
1/28/2011	1:07:20 PM	PHl3 MFC set to  0.000000
1/28/2011	1:07:20 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:07:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:07:20 PM	Tube furnace set to 0
1/28/2011	1:08:20 PM	Helium valve closed
1/28/2011	1:08:20 PM	H2 valve closed
1/28/2011	1:08:20 PM	BCl3 valve closed
1/28/2011	1:08:20 PM	PH3 valve closed
1/28/2011	1:08:20 PM	SiCl4 pre valve closed
1/28/2011	1:08:20 PM	SiCl4 post valve closed
1/28/2011	1:08:20 PM	Bubbler valve closed
1/28/2011	1:08:20 PM	Main Vac valve opened
1/28/2011	1:08:20 PM	Bypass valve opened
1/28/2011	1:08:20 PM	Helium MFC set to  0.000000
1/28/2011	1:08:20 PM	H2 MFC set to  0.000000
1/28/2011	1:08:20 PM	BCl3 MFC set to  0.000000
1/28/2011	1:08:20 PM	PHl3 MFC set to  0.000000
1/28/2011	1:08:20 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:08:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:08:20 PM	Tube furnace set to 0
1/28/2011	1:09:20 PM	H2 valve closed
1/28/2011	1:09:20 PM	BCl3 valve closed
1/28/2011	1:09:20 PM	PH3 valve closed
1/28/2011	1:09:20 PM	SiCl4 pre valve closed
1/28/2011	1:09:20 PM	SiCl4 post valve closed
1/28/2011	1:09:20 PM	Bubbler valve closed
1/28/2011	1:09:20 PM	Helium valve opened
1/28/2011	1:09:20 PM	Main Vac valve opened
1/28/2011	1:09:20 PM	Bypass valve opened
1/28/2011	1:09:20 PM	Helium MFC set to  100.000000
1/28/2011	1:09:20 PM	H2 MFC set to  0.000000
1/28/2011	1:09:20 PM	BCl3 MFC set to  0.000000
1/28/2011	1:09:20 PM	PHl3 MFC set to  0.000000
1/28/2011	1:09:20 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:09:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:09:20 PM	Tube furnace set to 0
1/28/2011	1:10:20 PM	Helium valve closed
1/28/2011	1:10:20 PM	H2 valve closed
1/28/2011	1:10:20 PM	BCl3 valve closed
1/28/2011	1:10:20 PM	PH3 valve closed
1/28/2011	1:10:20 PM	SiCl4 pre valve closed
1/28/2011	1:10:20 PM	SiCl4 post valve closed
1/28/2011	1:10:20 PM	Bubbler valve closed
1/28/2011	1:10:20 PM	Main Vac valve opened
1/28/2011	1:10:20 PM	Bypass valve opened
1/28/2011	1:10:20 PM	Helium MFC set to  0.000000
1/28/2011	1:10:20 PM	H2 MFC set to  0.000000
1/28/2011	1:10:20 PM	BCl3 MFC set to  0.000000
1/28/2011	1:10:20 PM	PHl3 MFC set to  0.000000
1/28/2011	1:10:20 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:10:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:10:21 PM	Tube furnace set to 0
1/28/2011	1:11:21 PM	H2 valve closed
1/28/2011	1:11:21 PM	BCl3 valve closed
1/28/2011	1:11:21 PM	PH3 valve closed
1/28/2011	1:11:21 PM	SiCl4 pre valve closed
1/28/2011	1:11:21 PM	SiCl4 post valve closed
1/28/2011	1:11:21 PM	Bubbler valve closed
1/28/2011	1:11:21 PM	Helium valve opened
1/28/2011	1:11:21 PM	Main Vac valve opened
1/28/2011	1:11:21 PM	Bypass valve opened
1/28/2011	1:11:21 PM	Helium MFC set to  100.000000
1/28/2011	1:11:21 PM	H2 MFC set to  0.000000
1/28/2011	1:11:21 PM	BCl3 MFC set to  0.000000
1/28/2011	1:11:21 PM	PHl3 MFC set to  0.000000
1/28/2011	1:11:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:11:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:11:21 PM	Tube furnace set to 0
1/28/2011	1:12:21 PM	Helium valve closed
1/28/2011	1:12:21 PM	H2 valve closed
1/28/2011	1:12:21 PM	BCl3 valve closed
1/28/2011	1:12:21 PM	PH3 valve closed
1/28/2011	1:12:21 PM	SiCl4 pre valve closed
1/28/2011	1:12:21 PM	SiCl4 post valve closed
1/28/2011	1:12:21 PM	Bubbler valve closed
1/28/2011	1:12:21 PM	Main Vac valve opened
1/28/2011	1:12:21 PM	Bypass valve opened
1/28/2011	1:12:21 PM	Helium MFC set to  0.000000
1/28/2011	1:12:21 PM	H2 MFC set to  0.000000
1/28/2011	1:12:21 PM	BCl3 MFC set to  0.000000
1/28/2011	1:12:21 PM	PHl3 MFC set to  0.000000
1/28/2011	1:12:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:12:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:12:21 PM	Tube furnace set to 0
1/28/2011	1:13:21 PM	H2 valve closed
1/28/2011	1:13:21 PM	BCl3 valve closed
1/28/2011	1:13:21 PM	PH3 valve closed
1/28/2011	1:13:21 PM	SiCl4 pre valve closed
1/28/2011	1:13:21 PM	SiCl4 post valve closed
1/28/2011	1:13:21 PM	Bubbler valve closed
1/28/2011	1:13:21 PM	Helium valve opened
1/28/2011	1:13:21 PM	Main Vac valve opened
1/28/2011	1:13:21 PM	Bypass valve opened
1/28/2011	1:13:21 PM	Helium MFC set to  100.000000
1/28/2011	1:13:21 PM	H2 MFC set to  0.000000
1/28/2011	1:13:21 PM	BCl3 MFC set to  0.000000
1/28/2011	1:13:21 PM	PHl3 MFC set to  0.000000
1/28/2011	1:13:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:13:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:13:21 PM	Tube furnace set to 0
1/28/2011	1:14:21 PM	Helium valve closed
1/28/2011	1:14:21 PM	H2 valve closed
1/28/2011	1:14:21 PM	BCl3 valve closed
1/28/2011	1:14:21 PM	PH3 valve closed
1/28/2011	1:14:21 PM	SiCl4 pre valve closed
1/28/2011	1:14:21 PM	SiCl4 post valve closed
1/28/2011	1:14:21 PM	Bubbler valve closed
1/28/2011	1:14:21 PM	Main Vac valve opened
1/28/2011	1:14:21 PM	Bypass valve opened
1/28/2011	1:14:21 PM	Helium MFC set to  0.000000
1/28/2011	1:14:21 PM	H2 MFC set to  0.000000
1/28/2011	1:14:21 PM	BCl3 MFC set to  0.000000
1/28/2011	1:14:21 PM	PHl3 MFC set to  0.000000
1/28/2011	1:14:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:14:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:14:21 PM	Tube furnace set to 0
1/28/2011	1:15:21 PM	H2 valve closed
1/28/2011	1:15:21 PM	BCl3 valve closed
1/28/2011	1:15:21 PM	PH3 valve closed
1/28/2011	1:15:21 PM	SiCl4 pre valve closed
1/28/2011	1:15:21 PM	SiCl4 post valve closed
1/28/2011	1:15:21 PM	Bubbler valve closed
1/28/2011	1:15:21 PM	Helium valve opened
1/28/2011	1:15:21 PM	Main Vac valve opened
1/28/2011	1:15:21 PM	Bypass valve opened
1/28/2011	1:15:21 PM	Helium MFC set to  100.000000
1/28/2011	1:15:21 PM	H2 MFC set to  0.000000
1/28/2011	1:15:21 PM	BCl3 MFC set to  0.000000
1/28/2011	1:15:21 PM	PHl3 MFC set to  0.000000
1/28/2011	1:15:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:15:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:15:22 PM	Tube furnace set to 0
1/28/2011	1:16:22 PM	Helium valve closed
1/28/2011	1:16:22 PM	H2 valve closed
1/28/2011	1:16:22 PM	BCl3 valve closed
1/28/2011	1:16:22 PM	PH3 valve closed
1/28/2011	1:16:22 PM	SiCl4 pre valve closed
1/28/2011	1:16:22 PM	SiCl4 post valve closed
1/28/2011	1:16:22 PM	Bubbler valve closed
1/28/2011	1:16:22 PM	Main Vac valve opened
1/28/2011	1:16:22 PM	Bypass valve opened
1/28/2011	1:16:22 PM	Helium MFC set to  0.000000
1/28/2011	1:16:22 PM	H2 MFC set to  0.000000
1/28/2011	1:16:22 PM	BCl3 MFC set to  0.000000
1/28/2011	1:16:22 PM	PHl3 MFC set to  0.000000
1/28/2011	1:16:22 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:16:22 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:16:22 PM	Tube furnace set to 0
1/28/2011	1:17:22 PM	H2 valve closed
1/28/2011	1:17:22 PM	BCl3 valve closed
1/28/2011	1:17:22 PM	PH3 valve closed
1/28/2011	1:17:22 PM	SiCl4 pre valve closed
1/28/2011	1:17:22 PM	SiCl4 post valve closed
1/28/2011	1:17:22 PM	Bubbler valve closed
1/28/2011	1:17:22 PM	Helium valve opened
1/28/2011	1:17:22 PM	Main Vac valve opened
1/28/2011	1:17:22 PM	Bypass valve opened
1/28/2011	1:17:22 PM	Helium MFC set to  100.000000
1/28/2011	1:17:22 PM	H2 MFC set to  0.000000
1/28/2011	1:17:22 PM	BCl3 MFC set to  0.000000
1/28/2011	1:17:22 PM	PHl3 MFC set to  0.000000
1/28/2011	1:17:22 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:17:22 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:17:22 PM	Tube furnace set to 0
1/28/2011	1:18:22 PM	Helium valve closed
1/28/2011	1:18:22 PM	H2 valve closed
1/28/2011	1:18:22 PM	BCl3 valve closed
1/28/2011	1:18:22 PM	PH3 valve closed
1/28/2011	1:18:22 PM	SiCl4 pre valve closed
1/28/2011	1:18:22 PM	SiCl4 post valve closed
1/28/2011	1:18:22 PM	Bubbler valve closed
1/28/2011	1:18:22 PM	Main Vac valve opened
1/28/2011	1:18:22 PM	Bypass valve opened
1/28/2011	1:18:22 PM	Helium MFC set to  0.000000
1/28/2011	1:18:22 PM	H2 MFC set to  0.000000
1/28/2011	1:18:22 PM	BCl3 MFC set to  0.000000
1/28/2011	1:18:22 PM	PHl3 MFC set to  0.000000
1/28/2011	1:18:22 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:18:22 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:18:22 PM	Tube furnace set to 0
1/28/2011	1:18:23 PM	Run finished at 1:18 PM
1/28/2011	1:18:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	1:36:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	1:36:04 PM	Recipe started at 1:36 PM
1/28/2011	1:36:04 PM	Helium valve closed
1/28/2011	1:36:04 PM	H2 valve closed
1/28/2011	1:36:04 PM	BCl3 valve closed
1/28/2011	1:36:04 PM	PH3 valve closed
1/28/2011	1:36:04 PM	SiCl4 pre valve closed
1/28/2011	1:36:04 PM	SiCl4 post valve closed
1/28/2011	1:36:04 PM	Main Vac valve closed
1/28/2011	1:36:04 PM	Bypass valve closed
1/28/2011	1:36:04 PM	Bubbler valve closed
1/28/2011	1:36:04 PM	Helium MFC set to  0.000000
1/28/2011	1:36:04 PM	H2 MFC set to  0.000000
1/28/2011	1:36:04 PM	BCl3 MFC set to  0.000000
1/28/2011	1:36:04 PM	PHl3 MFC set to  0.000000
1/28/2011	1:36:04 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:36:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:36:04 PM	Tube furnace set to 0
1/28/2011	1:36:04 PM	Run finished at 1:36 PM
1/28/2011	1:36:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	1:36:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	1:36:49 PM	Recipe started at 1:36 PM
1/28/2011	1:36:49 PM	Helium valve closed
1/28/2011	1:36:49 PM	H2 valve closed
1/28/2011	1:36:49 PM	BCl3 valve closed
1/28/2011	1:36:49 PM	PH3 valve closed
1/28/2011	1:36:49 PM	SiCl4 pre valve closed
1/28/2011	1:36:49 PM	SiCl4 post valve closed
1/28/2011	1:36:49 PM	Main Vac valve closed
1/28/2011	1:36:49 PM	Bubbler valve closed
1/28/2011	1:36:49 PM	Bypass valve opened
1/28/2011	1:36:49 PM	Helium MFC set to  0.000000
1/28/2011	1:36:49 PM	H2 MFC set to  0.000000
1/28/2011	1:36:49 PM	BCl3 MFC set to  0.000000
1/28/2011	1:36:49 PM	PHl3 MFC set to  0.000000
1/28/2011	1:36:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:36:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:36:50 PM	Tube furnace set to 0
1/28/2011	1:36:50 PM	Helium valve closed
1/28/2011	1:36:50 PM	H2 valve closed
1/28/2011	1:36:50 PM	BCl3 valve closed
1/28/2011	1:36:50 PM	PH3 valve closed
1/28/2011	1:36:50 PM	SiCl4 pre valve closed
1/28/2011	1:36:50 PM	SiCl4 post valve closed
1/28/2011	1:36:50 PM	Bubbler valve closed
1/28/2011	1:36:50 PM	Main Vac valve opened
1/28/2011	1:36:50 PM	Bypass valve opened
1/28/2011	1:36:50 PM	Helium MFC set to  0.000000
1/28/2011	1:36:50 PM	H2 MFC set to  0.000000
1/28/2011	1:36:50 PM	BCl3 MFC set to  0.000000
1/28/2011	1:36:50 PM	PHl3 MFC set to  0.000000
1/28/2011	1:36:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:36:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:36:50 PM	Tube furnace set to 0
1/28/2011	1:37:50 PM	H2 valve closed
1/28/2011	1:37:50 PM	BCl3 valve closed
1/28/2011	1:37:50 PM	PH3 valve closed
1/28/2011	1:37:50 PM	SiCl4 pre valve closed
1/28/2011	1:37:50 PM	SiCl4 post valve closed
1/28/2011	1:37:50 PM	Bubbler valve closed
1/28/2011	1:37:50 PM	Helium valve opened
1/28/2011	1:37:50 PM	Main Vac valve opened
1/28/2011	1:37:50 PM	Bypass valve opened
1/28/2011	1:37:50 PM	Helium MFC set to  100.000000
1/28/2011	1:37:50 PM	H2 MFC set to  0.000000
1/28/2011	1:37:50 PM	BCl3 MFC set to  0.000000
1/28/2011	1:37:50 PM	PHl3 MFC set to  0.000000
1/28/2011	1:37:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:37:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:37:50 PM	Tube furnace set to 0
1/28/2011	1:38:50 PM	Helium valve closed
1/28/2011	1:38:50 PM	H2 valve closed
1/28/2011	1:38:50 PM	BCl3 valve closed
1/28/2011	1:38:50 PM	PH3 valve closed
1/28/2011	1:38:50 PM	SiCl4 pre valve closed
1/28/2011	1:38:50 PM	SiCl4 post valve closed
1/28/2011	1:38:50 PM	Bubbler valve closed
1/28/2011	1:38:50 PM	Main Vac valve opened
1/28/2011	1:38:50 PM	Bypass valve opened
1/28/2011	1:38:50 PM	Helium MFC set to  0.000000
1/28/2011	1:38:50 PM	H2 MFC set to  0.000000
1/28/2011	1:38:50 PM	BCl3 MFC set to  0.000000
1/28/2011	1:38:50 PM	PHl3 MFC set to  0.000000
1/28/2011	1:38:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:38:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:38:50 PM	Tube furnace set to 0
1/28/2011	1:39:50 PM	H2 valve closed
1/28/2011	1:39:50 PM	BCl3 valve closed
1/28/2011	1:39:50 PM	PH3 valve closed
1/28/2011	1:39:50 PM	SiCl4 pre valve closed
1/28/2011	1:39:50 PM	SiCl4 post valve closed
1/28/2011	1:39:51 PM	Bubbler valve closed
1/28/2011	1:39:51 PM	Helium valve opened
1/28/2011	1:39:51 PM	Main Vac valve opened
1/28/2011	1:39:51 PM	Bypass valve opened
1/28/2011	1:39:51 PM	Helium MFC set to  100.000000
1/28/2011	1:39:51 PM	H2 MFC set to  0.000000
1/28/2011	1:39:51 PM	BCl3 MFC set to  0.000000
1/28/2011	1:39:51 PM	PHl3 MFC set to  0.000000
1/28/2011	1:39:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:39:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:39:51 PM	Tube furnace set to 0
1/28/2011	1:40:51 PM	Helium valve closed
1/28/2011	1:40:51 PM	H2 valve closed
1/28/2011	1:40:51 PM	BCl3 valve closed
1/28/2011	1:40:51 PM	PH3 valve closed
1/28/2011	1:40:51 PM	SiCl4 pre valve closed
1/28/2011	1:40:51 PM	SiCl4 post valve closed
1/28/2011	1:40:51 PM	Bubbler valve closed
1/28/2011	1:40:51 PM	Main Vac valve opened
1/28/2011	1:40:51 PM	Bypass valve opened
1/28/2011	1:40:51 PM	Helium MFC set to  0.000000
1/28/2011	1:40:51 PM	H2 MFC set to  0.000000
1/28/2011	1:40:51 PM	BCl3 MFC set to  0.000000
1/28/2011	1:40:51 PM	PHl3 MFC set to  0.000000
1/28/2011	1:40:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:40:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:40:51 PM	Tube furnace set to 0
1/28/2011	1:41:51 PM	H2 valve closed
1/28/2011	1:41:51 PM	BCl3 valve closed
1/28/2011	1:41:51 PM	PH3 valve closed
1/28/2011	1:41:51 PM	SiCl4 pre valve closed
1/28/2011	1:41:51 PM	SiCl4 post valve closed
1/28/2011	1:41:51 PM	Bubbler valve closed
1/28/2011	1:41:51 PM	Helium valve opened
1/28/2011	1:41:51 PM	Main Vac valve opened
1/28/2011	1:41:51 PM	Bypass valve opened
1/28/2011	1:41:51 PM	Helium MFC set to  100.000000
1/28/2011	1:41:51 PM	H2 MFC set to  0.000000
1/28/2011	1:41:51 PM	BCl3 MFC set to  0.000000
1/28/2011	1:41:51 PM	PHl3 MFC set to  0.000000
1/28/2011	1:41:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:41:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:41:51 PM	Tube furnace set to 0
1/28/2011	1:42:51 PM	Helium valve closed
1/28/2011	1:42:51 PM	H2 valve closed
1/28/2011	1:42:51 PM	BCl3 valve closed
1/28/2011	1:42:51 PM	PH3 valve closed
1/28/2011	1:42:51 PM	SiCl4 pre valve closed
1/28/2011	1:42:51 PM	SiCl4 post valve closed
1/28/2011	1:42:51 PM	Bubbler valve closed
1/28/2011	1:42:51 PM	Main Vac valve opened
1/28/2011	1:42:51 PM	Bypass valve opened
1/28/2011	1:42:51 PM	Helium MFC set to  0.000000
1/28/2011	1:42:51 PM	H2 MFC set to  0.000000
1/28/2011	1:42:51 PM	BCl3 MFC set to  0.000000
1/28/2011	1:42:51 PM	PHl3 MFC set to  0.000000
1/28/2011	1:42:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:42:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:42:51 PM	Tube furnace set to 0
1/28/2011	1:43:44 PM	Run aborted at 1:43 PM
1/28/2011	1:43:44 PM	Helium valve closed
1/28/2011	1:43:44 PM	H2 valve closed
1/28/2011	1:43:44 PM	BCl3 valve closed
1/28/2011	1:43:44 PM	PH3 valve closed
1/28/2011	1:43:44 PM	SiCl4 pre valve closed
1/28/2011	1:43:44 PM	SiCl4 post valve closed
1/28/2011	1:43:44 PM	Bypass valve closed
1/28/2011	1:43:44 PM	Main Vac valve closed
1/28/2011	1:43:44 PM	Bubbler valve closed
1/28/2011	1:43:44 PM	Helium MFC set to  0.000000
1/28/2011	1:43:44 PM	H2 MFC set to  0.000000
1/28/2011	1:43:44 PM	BCl3 MFC set to  0.000000
1/28/2011	1:43:44 PM	PHl3 MFC set to  0.000000
1/28/2011	1:43:44 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:43:44 PM	Tube furnace set to 0
1/28/2011	1:43:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	1:44:43 PM	Recipe started at 1:44 PM
1/28/2011	1:44:43 PM	Helium valve closed
1/28/2011	1:44:43 PM	BCl3 valve closed
1/28/2011	1:44:43 PM	PH3 valve closed
1/28/2011	1:44:43 PM	SiCl4 pre valve closed
1/28/2011	1:44:43 PM	SiCl4 post valve closed
1/28/2011	1:44:43 PM	Main Vac valve closed
1/28/2011	1:44:43 PM	Bypass valve closed
1/28/2011	1:44:43 PM	Bubbler valve closed
1/28/2011	1:44:43 PM	H2 valve opened
1/28/2011	1:44:43 PM	Helium MFC set to  0.000000
1/28/2011	1:44:43 PM	H2 MFC set to  500.000000
1/28/2011	1:44:43 PM	BCl3 MFC set to  0.000000
1/28/2011	1:44:43 PM	PHl3 MFC set to  0.000000
1/28/2011	1:44:43 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:44:43 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:44:43 PM	Tube furnace set to 0
1/28/2011	1:45:57 PM	Helium valve closed
1/28/2011	1:45:57 PM	BCl3 valve closed
1/28/2011	1:45:57 PM	PH3 valve closed
1/28/2011	1:45:57 PM	SiCl4 pre valve closed
1/28/2011	1:45:57 PM	SiCl4 post valve closed
1/28/2011	1:45:57 PM	Main Vac valve closed
1/28/2011	1:45:57 PM	Bypass valve closed
1/28/2011	1:45:57 PM	H2 valve opened
1/28/2011	1:45:57 PM	Bubbler valve opened
1/28/2011	1:45:57 PM	Helium MFC set to  0.000000
1/28/2011	1:45:57 PM	H2 MFC set to  500.000000
1/28/2011	1:45:57 PM	BCl3 MFC set to  0.000000
1/28/2011	1:45:57 PM	PHl3 MFC set to  0.000000
1/28/2011	1:45:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	1:45:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	1:45:57 PM	Tube furnace set to 1000
1/28/2011	2:05:57 PM	Helium valve closed
1/28/2011	2:05:57 PM	PH3 valve closed
1/28/2011	2:05:57 PM	Main Vac valve closed
1/28/2011	2:05:57 PM	Bypass valve closed
1/28/2011	2:05:57 PM	H2 valve opened
1/28/2011	2:05:57 PM	BCl3 valve opened
1/28/2011	2:05:57 PM	SiCl4 pre valve opened
1/28/2011	2:05:57 PM	SiCl4 post valve opened
1/28/2011	2:05:57 PM	Bubbler valve opened
1/28/2011	2:05:57 PM	Helium MFC set to  0.000000
1/28/2011	2:05:57 PM	H2 MFC set to  500.000000
1/28/2011	2:05:57 PM	BCl3 MFC set to  3.000000
1/28/2011	2:05:57 PM	PHl3 MFC set to  0.000000
1/28/2011	2:05:57 PM	SiCl4 MFC set to  50.000000
1/28/2011	2:05:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:05:58 PM	Tube furnace set to 1000
1/28/2011	2:30:58 PM	H2 valve closed
1/28/2011	2:30:58 PM	BCl3 valve closed
1/28/2011	2:30:58 PM	PH3 valve closed
1/28/2011	2:30:58 PM	SiCl4 pre valve closed
1/28/2011	2:30:58 PM	SiCl4 post valve closed
1/28/2011	2:30:58 PM	Main Vac valve closed
1/28/2011	2:30:58 PM	Bypass valve closed
1/28/2011	2:30:58 PM	Helium valve opened
1/28/2011	2:30:58 PM	Bubbler valve opened
1/28/2011	2:30:58 PM	Helium MFC set to  500.000000
1/28/2011	2:30:58 PM	H2 MFC set to  0.000000
1/28/2011	2:30:58 PM	BCl3 MFC set to  0.000000
1/28/2011	2:30:58 PM	PHl3 MFC set to  0.000000
1/28/2011	2:30:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	2:30:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:30:58 PM	Tube furnace set to 0
1/28/2011	2:50:58 PM	Helium valve closed
1/28/2011	2:50:58 PM	H2 valve closed
1/28/2011	2:50:58 PM	BCl3 valve closed
1/28/2011	2:50:58 PM	PH3 valve closed
1/28/2011	2:50:58 PM	SiCl4 pre valve closed
1/28/2011	2:50:58 PM	SiCl4 post valve closed
1/28/2011	2:50:58 PM	Main Vac valve closed
1/28/2011	2:50:58 PM	Bypass valve closed
1/28/2011	2:50:58 PM	Bubbler valve closed
1/28/2011	2:50:58 PM	Helium MFC set to  0.000000
1/28/2011	2:50:58 PM	H2 MFC set to  0.000000
1/28/2011	2:50:58 PM	BCl3 MFC set to  0.000000
1/28/2011	2:50:58 PM	PHl3 MFC set to  0.000000
1/28/2011	2:50:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	2:50:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	2:50:58 PM	Tube furnace set to 0
1/28/2011	2:50:58 PM	Run finished at 2:50 PM
1/28/2011	3:06:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	3:06:52 PM	Recipe started at 3:06 PM
1/28/2011	3:06:52 PM	H2 valve closed
1/28/2011	3:06:52 PM	BCl3 valve closed
1/28/2011	3:06:52 PM	PH3 valve closed
1/28/2011	3:06:52 PM	SiCl4 pre valve closed
1/28/2011	3:06:52 PM	SiCl4 post valve closed
1/28/2011	3:06:52 PM	Main Vac valve closed
1/28/2011	3:06:52 PM	Bypass valve closed
1/28/2011	3:06:52 PM	Bubbler valve closed
1/28/2011	3:06:52 PM	Helium valve opened
1/28/2011	3:06:52 PM	Helium MFC set to  500.000000
1/28/2011	3:06:52 PM	H2 MFC set to  0.000000
1/28/2011	3:06:52 PM	BCl3 MFC set to  0.000000
1/28/2011	3:06:52 PM	PHl3 MFC set to  0.000000
1/28/2011	3:06:52 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:06:52 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:06:52 PM	Tube furnace set to 0
1/28/2011	3:06:56 PM	Helium valve closed
1/28/2011	3:06:56 PM	H2 valve closed
1/28/2011	3:06:56 PM	BCl3 valve closed
1/28/2011	3:06:56 PM	PH3 valve closed
1/28/2011	3:06:56 PM	SiCl4 pre valve closed
1/28/2011	3:06:56 PM	SiCl4 post valve closed
1/28/2011	3:06:56 PM	Main Vac valve closed
1/28/2011	3:06:56 PM	Bypass valve closed
1/28/2011	3:06:56 PM	Bubbler valve closed
1/28/2011	3:06:56 PM	Helium MFC set to  0.000000
1/28/2011	3:06:56 PM	H2 MFC set to  0.000000
1/28/2011	3:06:56 PM	BCl3 MFC set to  0.000000
1/28/2011	3:06:56 PM	PHl3 MFC set to  0.000000
1/28/2011	3:06:56 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:06:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:06:56 PM	Tube furnace set to 0
1/28/2011	3:06:57 PM	Run finished at 3:06 PM
1/28/2011	3:06:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	3:12:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	3:12:30 PM	Recipe started at 3:12 PM
1/28/2011	3:12:30 PM	Helium valve closed
1/28/2011	3:12:30 PM	H2 valve closed
1/28/2011	3:12:30 PM	BCl3 valve closed
1/28/2011	3:12:30 PM	PH3 valve closed
1/28/2011	3:12:30 PM	SiCl4 pre valve closed
1/28/2011	3:12:30 PM	SiCl4 post valve closed
1/28/2011	3:12:30 PM	Main Vac valve closed
1/28/2011	3:12:30 PM	Bubbler valve closed
1/28/2011	3:12:30 PM	Bypass valve opened
1/28/2011	3:12:30 PM	Helium MFC set to  0.000000
1/28/2011	3:12:30 PM	H2 MFC set to  0.000000
1/28/2011	3:12:30 PM	BCl3 MFC set to  0.000000
1/28/2011	3:12:30 PM	PHl3 MFC set to  0.000000
1/28/2011	3:12:30 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:12:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:12:30 PM	Tube furnace set to 0
1/28/2011	3:13:03 PM	Helium valve closed
1/28/2011	3:13:03 PM	H2 valve closed
1/28/2011	3:13:03 PM	BCl3 valve closed
1/28/2011	3:13:03 PM	PH3 valve closed
1/28/2011	3:13:03 PM	SiCl4 pre valve closed
1/28/2011	3:13:03 PM	SiCl4 post valve closed
1/28/2011	3:13:03 PM	Bubbler valve closed
1/28/2011	3:13:03 PM	Main Vac valve opened
1/28/2011	3:13:03 PM	Bypass valve opened
1/28/2011	3:13:04 PM	Helium MFC set to  0.000000
1/28/2011	3:13:04 PM	H2 MFC set to  0.000000
1/28/2011	3:13:04 PM	BCl3 MFC set to  0.000000
1/28/2011	3:13:04 PM	PHl3 MFC set to  0.000000
1/28/2011	3:13:04 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:13:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:13:04 PM	Tube furnace set to 0
1/28/2011	3:13:04 PM	Run finished at 3:13 PM
1/28/2011	3:13:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	3:25:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	3:25:47 PM	Recipe started at 3:25 PM
1/28/2011	3:25:47 PM	Helium valve closed
1/28/2011	3:25:47 PM	H2 valve closed
1/28/2011	3:25:47 PM	BCl3 valve closed
1/28/2011	3:25:47 PM	PH3 valve closed
1/28/2011	3:25:47 PM	SiCl4 pre valve closed
1/28/2011	3:25:47 PM	SiCl4 post valve closed
1/28/2011	3:25:47 PM	Main Vac valve closed
1/28/2011	3:25:47 PM	Bubbler valve closed
1/28/2011	3:25:47 PM	Bypass valve opened
1/28/2011	3:25:47 PM	Helium MFC set to  0.000000
1/28/2011	3:25:47 PM	H2 MFC set to  0.000000
1/28/2011	3:25:47 PM	BCl3 MFC set to  0.000000
1/28/2011	3:25:47 PM	PHl3 MFC set to  0.000000
1/28/2011	3:25:47 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:25:47 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:25:47 PM	Tube furnace set to 0
1/28/2011	3:25:48 PM	Helium valve closed
1/28/2011	3:25:48 PM	H2 valve closed
1/28/2011	3:25:48 PM	BCl3 valve closed
1/28/2011	3:25:48 PM	PH3 valve closed
1/28/2011	3:25:48 PM	SiCl4 pre valve closed
1/28/2011	3:25:48 PM	SiCl4 post valve closed
1/28/2011	3:25:48 PM	Bubbler valve closed
1/28/2011	3:25:48 PM	Main Vac valve opened
1/28/2011	3:25:48 PM	Bypass valve opened
1/28/2011	3:25:48 PM	Helium MFC set to  0.000000
1/28/2011	3:25:48 PM	H2 MFC set to  0.000000
1/28/2011	3:25:48 PM	BCl3 MFC set to  0.000000
1/28/2011	3:25:48 PM	PHl3 MFC set to  0.000000
1/28/2011	3:25:48 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:25:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:25:48 PM	Tube furnace set to 0
1/28/2011	3:26:48 PM	H2 valve closed
1/28/2011	3:26:48 PM	BCl3 valve closed
1/28/2011	3:26:48 PM	PH3 valve closed
1/28/2011	3:26:48 PM	SiCl4 pre valve closed
1/28/2011	3:26:48 PM	SiCl4 post valve closed
1/28/2011	3:26:48 PM	Bubbler valve closed
1/28/2011	3:26:48 PM	Helium valve opened
1/28/2011	3:26:48 PM	Main Vac valve opened
1/28/2011	3:26:48 PM	Bypass valve opened
1/28/2011	3:26:48 PM	Helium MFC set to  100.000000
1/28/2011	3:26:48 PM	H2 MFC set to  0.000000
1/28/2011	3:26:48 PM	BCl3 MFC set to  0.000000
1/28/2011	3:26:48 PM	PHl3 MFC set to  0.000000
1/28/2011	3:26:48 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:26:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:26:48 PM	Tube furnace set to 0
1/28/2011	3:27:48 PM	Helium valve closed
1/28/2011	3:27:48 PM	H2 valve closed
1/28/2011	3:27:48 PM	BCl3 valve closed
1/28/2011	3:27:48 PM	PH3 valve closed
1/28/2011	3:27:48 PM	SiCl4 pre valve closed
1/28/2011	3:27:48 PM	SiCl4 post valve closed
1/28/2011	3:27:48 PM	Bubbler valve closed
1/28/2011	3:27:48 PM	Main Vac valve opened
1/28/2011	3:27:48 PM	Bypass valve opened
1/28/2011	3:27:48 PM	Helium MFC set to  0.000000
1/28/2011	3:27:48 PM	H2 MFC set to  0.000000
1/28/2011	3:27:48 PM	BCl3 MFC set to  0.000000
1/28/2011	3:27:48 PM	PHl3 MFC set to  0.000000
1/28/2011	3:27:48 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:27:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:27:48 PM	Tube furnace set to 0
1/28/2011	3:28:48 PM	H2 valve closed
1/28/2011	3:28:48 PM	BCl3 valve closed
1/28/2011	3:28:48 PM	PH3 valve closed
1/28/2011	3:28:48 PM	SiCl4 pre valve closed
1/28/2011	3:28:48 PM	SiCl4 post valve closed
1/28/2011	3:28:48 PM	Bubbler valve closed
1/28/2011	3:28:48 PM	Helium valve opened
1/28/2011	3:28:48 PM	Main Vac valve opened
1/28/2011	3:28:48 PM	Bypass valve opened
1/28/2011	3:28:48 PM	Helium MFC set to  100.000000
1/28/2011	3:28:48 PM	H2 MFC set to  0.000000
1/28/2011	3:28:48 PM	BCl3 MFC set to  0.000000
1/28/2011	3:28:48 PM	PHl3 MFC set to  0.000000
1/28/2011	3:28:48 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:28:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:28:48 PM	Tube furnace set to 0
1/28/2011	3:29:48 PM	Helium valve closed
1/28/2011	3:29:48 PM	H2 valve closed
1/28/2011	3:29:48 PM	BCl3 valve closed
1/28/2011	3:29:48 PM	PH3 valve closed
1/28/2011	3:29:48 PM	SiCl4 pre valve closed
1/28/2011	3:29:48 PM	SiCl4 post valve closed
1/28/2011	3:29:48 PM	Bubbler valve closed
1/28/2011	3:29:48 PM	Main Vac valve opened
1/28/2011	3:29:48 PM	Bypass valve opened
1/28/2011	3:29:48 PM	Helium MFC set to  0.000000
1/28/2011	3:29:48 PM	H2 MFC set to  0.000000
1/28/2011	3:29:48 PM	BCl3 MFC set to  0.000000
1/28/2011	3:29:48 PM	PHl3 MFC set to  0.000000
1/28/2011	3:29:48 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:29:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:29:48 PM	Tube furnace set to 0
1/28/2011	3:30:49 PM	H2 valve closed
1/28/2011	3:30:49 PM	BCl3 valve closed
1/28/2011	3:30:49 PM	PH3 valve closed
1/28/2011	3:30:49 PM	SiCl4 pre valve closed
1/28/2011	3:30:49 PM	SiCl4 post valve closed
1/28/2011	3:30:49 PM	Bubbler valve closed
1/28/2011	3:30:49 PM	Helium valve opened
1/28/2011	3:30:49 PM	Main Vac valve opened
1/28/2011	3:30:49 PM	Bypass valve opened
1/28/2011	3:30:49 PM	Helium MFC set to  100.000000
1/28/2011	3:30:49 PM	H2 MFC set to  0.000000
1/28/2011	3:30:49 PM	BCl3 MFC set to  0.000000
1/28/2011	3:30:49 PM	PHl3 MFC set to  0.000000
1/28/2011	3:30:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:30:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:30:49 PM	Tube furnace set to 0
1/28/2011	3:31:49 PM	Helium valve closed
1/28/2011	3:31:49 PM	H2 valve closed
1/28/2011	3:31:49 PM	BCl3 valve closed
1/28/2011	3:31:49 PM	PH3 valve closed
1/28/2011	3:31:49 PM	SiCl4 pre valve closed
1/28/2011	3:31:49 PM	SiCl4 post valve closed
1/28/2011	3:31:49 PM	Bubbler valve closed
1/28/2011	3:31:49 PM	Main Vac valve opened
1/28/2011	3:31:49 PM	Bypass valve opened
1/28/2011	3:31:49 PM	Helium MFC set to  0.000000
1/28/2011	3:31:49 PM	H2 MFC set to  0.000000
1/28/2011	3:31:49 PM	BCl3 MFC set to  0.000000
1/28/2011	3:31:49 PM	PHl3 MFC set to  0.000000
1/28/2011	3:31:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:31:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:31:49 PM	Tube furnace set to 0
1/28/2011	3:32:49 PM	H2 valve closed
1/28/2011	3:32:49 PM	BCl3 valve closed
1/28/2011	3:32:49 PM	PH3 valve closed
1/28/2011	3:32:49 PM	SiCl4 pre valve closed
1/28/2011	3:32:49 PM	SiCl4 post valve closed
1/28/2011	3:32:49 PM	Bubbler valve closed
1/28/2011	3:32:49 PM	Helium valve opened
1/28/2011	3:32:49 PM	Main Vac valve opened
1/28/2011	3:32:49 PM	Bypass valve opened
1/28/2011	3:32:49 PM	Helium MFC set to  100.000000
1/28/2011	3:32:49 PM	H2 MFC set to  0.000000
1/28/2011	3:32:49 PM	BCl3 MFC set to  0.000000
1/28/2011	3:32:49 PM	PHl3 MFC set to  0.000000
1/28/2011	3:32:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:32:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:32:49 PM	Tube furnace set to 0
1/28/2011	3:33:49 PM	Helium valve closed
1/28/2011	3:33:49 PM	H2 valve closed
1/28/2011	3:33:49 PM	BCl3 valve closed
1/28/2011	3:33:49 PM	PH3 valve closed
1/28/2011	3:33:49 PM	SiCl4 pre valve closed
1/28/2011	3:33:49 PM	SiCl4 post valve closed
1/28/2011	3:33:49 PM	Bubbler valve closed
1/28/2011	3:33:49 PM	Main Vac valve opened
1/28/2011	3:33:49 PM	Bypass valve opened
1/28/2011	3:33:49 PM	Helium MFC set to  0.000000
1/28/2011	3:33:49 PM	H2 MFC set to  0.000000
1/28/2011	3:33:49 PM	BCl3 MFC set to  0.000000
1/28/2011	3:33:49 PM	PHl3 MFC set to  0.000000
1/28/2011	3:33:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:33:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:33:49 PM	Tube furnace set to 0
1/28/2011	3:34:49 PM	H2 valve closed
1/28/2011	3:34:49 PM	BCl3 valve closed
1/28/2011	3:34:49 PM	PH3 valve closed
1/28/2011	3:34:49 PM	SiCl4 pre valve closed
1/28/2011	3:34:49 PM	SiCl4 post valve closed
1/28/2011	3:34:49 PM	Bubbler valve closed
1/28/2011	3:34:49 PM	Helium valve opened
1/28/2011	3:34:49 PM	Main Vac valve opened
1/28/2011	3:34:49 PM	Bypass valve opened
1/28/2011	3:34:49 PM	Helium MFC set to  100.000000
1/28/2011	3:34:49 PM	H2 MFC set to  0.000000
1/28/2011	3:34:49 PM	BCl3 MFC set to  0.000000
1/28/2011	3:34:49 PM	PHl3 MFC set to  0.000000
1/28/2011	3:34:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:34:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:34:50 PM	Tube furnace set to 0
1/28/2011	3:35:50 PM	Helium valve closed
1/28/2011	3:35:50 PM	H2 valve closed
1/28/2011	3:35:50 PM	BCl3 valve closed
1/28/2011	3:35:50 PM	PH3 valve closed
1/28/2011	3:35:50 PM	SiCl4 pre valve closed
1/28/2011	3:35:50 PM	SiCl4 post valve closed
1/28/2011	3:35:50 PM	Bubbler valve closed
1/28/2011	3:35:50 PM	Main Vac valve opened
1/28/2011	3:35:50 PM	Bypass valve opened
1/28/2011	3:35:50 PM	Helium MFC set to  0.000000
1/28/2011	3:35:50 PM	H2 MFC set to  0.000000
1/28/2011	3:35:50 PM	BCl3 MFC set to  0.000000
1/28/2011	3:35:50 PM	PHl3 MFC set to  0.000000
1/28/2011	3:35:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:35:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:35:50 PM	Tube furnace set to 0
1/28/2011	3:36:50 PM	H2 valve closed
1/28/2011	3:36:50 PM	BCl3 valve closed
1/28/2011	3:36:50 PM	PH3 valve closed
1/28/2011	3:36:50 PM	SiCl4 pre valve closed
1/28/2011	3:36:50 PM	SiCl4 post valve closed
1/28/2011	3:36:50 PM	Bubbler valve closed
1/28/2011	3:36:50 PM	Helium valve opened
1/28/2011	3:36:50 PM	Main Vac valve opened
1/28/2011	3:36:50 PM	Bypass valve opened
1/28/2011	3:36:50 PM	Helium MFC set to  100.000000
1/28/2011	3:36:50 PM	H2 MFC set to  0.000000
1/28/2011	3:36:50 PM	BCl3 MFC set to  0.000000
1/28/2011	3:36:50 PM	PHl3 MFC set to  0.000000
1/28/2011	3:36:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:36:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:36:50 PM	Tube furnace set to 0
1/28/2011	3:37:50 PM	Helium valve closed
1/28/2011	3:37:50 PM	H2 valve closed
1/28/2011	3:37:50 PM	BCl3 valve closed
1/28/2011	3:37:50 PM	PH3 valve closed
1/28/2011	3:37:50 PM	SiCl4 pre valve closed
1/28/2011	3:37:50 PM	SiCl4 post valve closed
1/28/2011	3:37:50 PM	Bubbler valve closed
1/28/2011	3:37:50 PM	Main Vac valve opened
1/28/2011	3:37:50 PM	Bypass valve opened
1/28/2011	3:37:50 PM	Helium MFC set to  0.000000
1/28/2011	3:37:50 PM	H2 MFC set to  0.000000
1/28/2011	3:37:50 PM	BCl3 MFC set to  0.000000
1/28/2011	3:37:50 PM	PHl3 MFC set to  0.000000
1/28/2011	3:37:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:37:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:37:50 PM	Tube furnace set to 0
1/28/2011	3:38:50 PM	H2 valve closed
1/28/2011	3:38:50 PM	BCl3 valve closed
1/28/2011	3:38:50 PM	PH3 valve closed
1/28/2011	3:38:50 PM	SiCl4 pre valve closed
1/28/2011	3:38:50 PM	SiCl4 post valve closed
1/28/2011	3:38:50 PM	Bubbler valve closed
1/28/2011	3:38:50 PM	Helium valve opened
1/28/2011	3:38:50 PM	Main Vac valve opened
1/28/2011	3:38:50 PM	Bypass valve opened
1/28/2011	3:38:50 PM	Helium MFC set to  100.000000
1/28/2011	3:38:50 PM	H2 MFC set to  0.000000
1/28/2011	3:38:50 PM	BCl3 MFC set to  0.000000
1/28/2011	3:38:50 PM	PHl3 MFC set to  0.000000
1/28/2011	3:38:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:38:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:38:50 PM	Tube furnace set to 0
1/28/2011	3:39:50 PM	Helium valve closed
1/28/2011	3:39:50 PM	H2 valve closed
1/28/2011	3:39:50 PM	BCl3 valve closed
1/28/2011	3:39:50 PM	PH3 valve closed
1/28/2011	3:39:50 PM	SiCl4 pre valve closed
1/28/2011	3:39:50 PM	SiCl4 post valve closed
1/28/2011	3:39:50 PM	Bubbler valve closed
1/28/2011	3:39:50 PM	Main Vac valve opened
1/28/2011	3:39:50 PM	Bypass valve opened
1/28/2011	3:39:50 PM	Helium MFC set to  0.000000
1/28/2011	3:39:50 PM	H2 MFC set to  0.000000
1/28/2011	3:39:50 PM	BCl3 MFC set to  0.000000
1/28/2011	3:39:50 PM	PHl3 MFC set to  0.000000
1/28/2011	3:39:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:39:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:39:51 PM	Tube furnace set to 0
1/28/2011	3:40:51 PM	H2 valve closed
1/28/2011	3:40:51 PM	BCl3 valve closed
1/28/2011	3:40:51 PM	PH3 valve closed
1/28/2011	3:40:51 PM	SiCl4 pre valve closed
1/28/2011	3:40:51 PM	SiCl4 post valve closed
1/28/2011	3:40:51 PM	Bubbler valve closed
1/28/2011	3:40:51 PM	Helium valve opened
1/28/2011	3:40:51 PM	Main Vac valve opened
1/28/2011	3:40:51 PM	Bypass valve opened
1/28/2011	3:40:51 PM	Helium MFC set to  100.000000
1/28/2011	3:40:51 PM	H2 MFC set to  0.000000
1/28/2011	3:40:51 PM	BCl3 MFC set to  0.000000
1/28/2011	3:40:51 PM	PHl3 MFC set to  0.000000
1/28/2011	3:40:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:40:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:40:51 PM	Tube furnace set to 0
1/28/2011	3:41:51 PM	Helium valve closed
1/28/2011	3:41:51 PM	H2 valve closed
1/28/2011	3:41:51 PM	BCl3 valve closed
1/28/2011	3:41:51 PM	PH3 valve closed
1/28/2011	3:41:51 PM	SiCl4 pre valve closed
1/28/2011	3:41:51 PM	SiCl4 post valve closed
1/28/2011	3:41:51 PM	Bubbler valve closed
1/28/2011	3:41:51 PM	Main Vac valve opened
1/28/2011	3:41:51 PM	Bypass valve opened
1/28/2011	3:41:51 PM	Helium MFC set to  0.000000
1/28/2011	3:41:51 PM	H2 MFC set to  0.000000
1/28/2011	3:41:51 PM	BCl3 MFC set to  0.000000
1/28/2011	3:41:51 PM	PHl3 MFC set to  0.000000
1/28/2011	3:41:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:41:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:41:51 PM	Tube furnace set to 0
1/28/2011	3:42:51 PM	H2 valve closed
1/28/2011	3:42:51 PM	BCl3 valve closed
1/28/2011	3:42:51 PM	PH3 valve closed
1/28/2011	3:42:51 PM	SiCl4 pre valve closed
1/28/2011	3:42:51 PM	SiCl4 post valve closed
1/28/2011	3:42:51 PM	Bubbler valve closed
1/28/2011	3:42:51 PM	Helium valve opened
1/28/2011	3:42:51 PM	Main Vac valve opened
1/28/2011	3:42:51 PM	Bypass valve opened
1/28/2011	3:42:51 PM	Helium MFC set to  100.000000
1/28/2011	3:42:51 PM	H2 MFC set to  0.000000
1/28/2011	3:42:51 PM	BCl3 MFC set to  0.000000
1/28/2011	3:42:51 PM	PHl3 MFC set to  0.000000
1/28/2011	3:42:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:42:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:42:51 PM	Tube furnace set to 0
1/28/2011	3:43:51 PM	Helium valve closed
1/28/2011	3:43:51 PM	H2 valve closed
1/28/2011	3:43:51 PM	BCl3 valve closed
1/28/2011	3:43:51 PM	PH3 valve closed
1/28/2011	3:43:51 PM	SiCl4 pre valve closed
1/28/2011	3:43:51 PM	SiCl4 post valve closed
1/28/2011	3:43:51 PM	Bubbler valve closed
1/28/2011	3:43:51 PM	Main Vac valve opened
1/28/2011	3:43:51 PM	Bypass valve opened
1/28/2011	3:43:51 PM	Helium MFC set to  0.000000
1/28/2011	3:43:51 PM	H2 MFC set to  0.000000
1/28/2011	3:43:51 PM	BCl3 MFC set to  0.000000
1/28/2011	3:43:51 PM	PHl3 MFC set to  0.000000
1/28/2011	3:43:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:43:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:43:51 PM	Tube furnace set to 0
1/28/2011	3:44:51 PM	H2 valve closed
1/28/2011	3:44:51 PM	BCl3 valve closed
1/28/2011	3:44:51 PM	PH3 valve closed
1/28/2011	3:44:51 PM	SiCl4 pre valve closed
1/28/2011	3:44:51 PM	SiCl4 post valve closed
1/28/2011	3:44:51 PM	Bubbler valve closed
1/28/2011	3:44:51 PM	Helium valve opened
1/28/2011	3:44:51 PM	Main Vac valve opened
1/28/2011	3:44:51 PM	Bypass valve opened
1/28/2011	3:44:51 PM	Helium MFC set to  100.000000
1/28/2011	3:44:51 PM	H2 MFC set to  0.000000
1/28/2011	3:44:51 PM	BCl3 MFC set to  0.000000
1/28/2011	3:44:51 PM	PHl3 MFC set to  0.000000
1/28/2011	3:44:51 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:44:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:44:52 PM	Tube furnace set to 0
1/28/2011	3:45:52 PM	Helium valve closed
1/28/2011	3:45:52 PM	H2 valve closed
1/28/2011	3:45:52 PM	BCl3 valve closed
1/28/2011	3:45:52 PM	PH3 valve closed
1/28/2011	3:45:52 PM	SiCl4 pre valve closed
1/28/2011	3:45:52 PM	SiCl4 post valve closed
1/28/2011	3:45:52 PM	Bubbler valve closed
1/28/2011	3:45:52 PM	Main Vac valve opened
1/28/2011	3:45:52 PM	Bypass valve opened
1/28/2011	3:45:52 PM	Helium MFC set to  0.000000
1/28/2011	3:45:52 PM	H2 MFC set to  0.000000
1/28/2011	3:45:52 PM	BCl3 MFC set to  0.000000
1/28/2011	3:45:52 PM	PHl3 MFC set to  0.000000
1/28/2011	3:45:52 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:45:52 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:45:52 PM	Tube furnace set to 0
1/28/2011	3:45:53 PM	Run finished at 3:45 PM
1/28/2011	3:45:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	3:46:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	3:46:42 PM	Recipe started at 3:46 PM
1/28/2011	3:46:42 PM	Helium valve closed
1/28/2011	3:46:42 PM	H2 valve closed
1/28/2011	3:46:42 PM	BCl3 valve closed
1/28/2011	3:46:42 PM	PH3 valve closed
1/28/2011	3:46:42 PM	SiCl4 pre valve closed
1/28/2011	3:46:42 PM	SiCl4 post valve closed
1/28/2011	3:46:42 PM	Main Vac valve closed
1/28/2011	3:46:42 PM	Bypass valve closed
1/28/2011	3:46:42 PM	Bubbler valve closed
1/28/2011	3:46:42 PM	Helium MFC set to  0.000000
1/28/2011	3:46:42 PM	H2 MFC set to  0.000000
1/28/2011	3:46:42 PM	BCl3 MFC set to  0.000000
1/28/2011	3:46:42 PM	PHl3 MFC set to  0.000000
1/28/2011	3:46:42 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:46:42 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:46:43 PM	Tube furnace set to 0
1/28/2011	3:46:43 PM	Run finished at 3:46 PM
1/28/2011	3:46:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	3:47:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	3:47:38 PM	Recipe started at 3:47 PM
1/28/2011	3:47:38 PM	Helium valve closed
1/28/2011	3:47:38 PM	H2 valve closed
1/28/2011	3:47:38 PM	BCl3 valve closed
1/28/2011	3:47:38 PM	PH3 valve closed
1/28/2011	3:47:38 PM	SiCl4 pre valve closed
1/28/2011	3:47:38 PM	SiCl4 post valve closed
1/28/2011	3:47:38 PM	Main Vac valve closed
1/28/2011	3:47:38 PM	Bubbler valve closed
1/28/2011	3:47:38 PM	Bypass valve opened
1/28/2011	3:47:38 PM	Helium MFC set to  0.000000
1/28/2011	3:47:38 PM	H2 MFC set to  0.000000
1/28/2011	3:47:38 PM	BCl3 MFC set to  0.000000
1/28/2011	3:47:38 PM	PHl3 MFC set to  0.000000
1/28/2011	3:47:38 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:47:38 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:47:38 PM	Tube furnace set to 0
1/28/2011	3:47:38 PM	Helium valve closed
1/28/2011	3:47:38 PM	H2 valve closed
1/28/2011	3:47:38 PM	BCl3 valve closed
1/28/2011	3:47:38 PM	PH3 valve closed
1/28/2011	3:47:38 PM	SiCl4 pre valve closed
1/28/2011	3:47:38 PM	SiCl4 post valve closed
1/28/2011	3:47:38 PM	Bubbler valve closed
1/28/2011	3:47:38 PM	Main Vac valve opened
1/28/2011	3:47:38 PM	Bypass valve opened
1/28/2011	3:47:38 PM	Helium MFC set to  0.000000
1/28/2011	3:47:38 PM	H2 MFC set to  0.000000
1/28/2011	3:47:38 PM	BCl3 MFC set to  0.000000
1/28/2011	3:47:38 PM	PHl3 MFC set to  0.000000
1/28/2011	3:47:38 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:47:38 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:47:39 PM	Tube furnace set to 0
1/28/2011	3:47:39 PM	Run finished at 3:47 PM
1/28/2011	3:47:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	3:49:15 PM	Recipe started at 3:49 PM
1/28/2011	3:49:15 PM	Helium valve closed
1/28/2011	3:49:15 PM	BCl3 valve closed
1/28/2011	3:49:15 PM	PH3 valve closed
1/28/2011	3:49:15 PM	SiCl4 pre valve closed
1/28/2011	3:49:15 PM	SiCl4 post valve closed
1/28/2011	3:49:15 PM	Main Vac valve closed
1/28/2011	3:49:15 PM	Bypass valve closed
1/28/2011	3:49:15 PM	Bubbler valve closed
1/28/2011	3:49:15 PM	H2 valve opened
1/28/2011	3:49:15 PM	Helium MFC set to  0.000000
1/28/2011	3:49:15 PM	H2 MFC set to  500.000000
1/28/2011	3:49:15 PM	BCl3 MFC set to  0.000000
1/28/2011	3:49:15 PM	PHl3 MFC set to  0.000000
1/28/2011	3:49:15 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:49:15 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:49:15 PM	Tube furnace set to 0
1/28/2011	3:50:32 PM	Helium valve closed
1/28/2011	3:50:32 PM	BCl3 valve closed
1/28/2011	3:50:32 PM	PH3 valve closed
1/28/2011	3:50:32 PM	SiCl4 pre valve closed
1/28/2011	3:50:32 PM	SiCl4 post valve closed
1/28/2011	3:50:32 PM	Main Vac valve closed
1/28/2011	3:50:32 PM	Bypass valve closed
1/28/2011	3:50:32 PM	H2 valve opened
1/28/2011	3:50:32 PM	Bubbler valve opened
1/28/2011	3:50:32 PM	Helium MFC set to  0.000000
1/28/2011	3:50:32 PM	H2 MFC set to  500.000000
1/28/2011	3:50:32 PM	BCl3 MFC set to  0.000000
1/28/2011	3:50:32 PM	PHl3 MFC set to  0.000000
1/28/2011	3:50:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	3:50:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	3:50:32 PM	Tube furnace set to 1000
1/28/2011	4:10:32 PM	Helium valve closed
1/28/2011	4:10:32 PM	PH3 valve closed
1/28/2011	4:10:32 PM	Main Vac valve closed
1/28/2011	4:10:32 PM	Bypass valve closed
1/28/2011	4:10:32 PM	H2 valve opened
1/28/2011	4:10:32 PM	BCl3 valve opened
1/28/2011	4:10:32 PM	SiCl4 pre valve opened
1/28/2011	4:10:32 PM	SiCl4 post valve opened
1/28/2011	4:10:32 PM	Bubbler valve opened
1/28/2011	4:10:32 PM	Helium MFC set to  0.000000
1/28/2011	4:10:32 PM	H2 MFC set to  500.000000
1/28/2011	4:10:32 PM	BCl3 MFC set to  3.000000
1/28/2011	4:10:32 PM	PHl3 MFC set to  0.000000
1/28/2011	4:10:32 PM	SiCl4 MFC set to  50.000000
1/28/2011	4:10:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:10:32 PM	Tube furnace set to 1000
1/28/2011	4:35:32 PM	H2 valve closed
1/28/2011	4:35:32 PM	BCl3 valve closed
1/28/2011	4:35:32 PM	PH3 valve closed
1/28/2011	4:35:32 PM	SiCl4 pre valve closed
1/28/2011	4:35:32 PM	SiCl4 post valve closed
1/28/2011	4:35:32 PM	Main Vac valve closed
1/28/2011	4:35:32 PM	Bypass valve closed
1/28/2011	4:35:32 PM	Helium valve opened
1/28/2011	4:35:32 PM	Bubbler valve opened
1/28/2011	4:35:32 PM	Helium MFC set to  500.000000
1/28/2011	4:35:32 PM	H2 MFC set to  0.000000
1/28/2011	4:35:32 PM	BCl3 MFC set to  0.000000
1/28/2011	4:35:32 PM	PHl3 MFC set to  0.000000
1/28/2011	4:35:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	4:35:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:35:32 PM	Tube furnace set to 0
1/28/2011	4:55:32 PM	Helium valve closed
1/28/2011	4:55:32 PM	H2 valve closed
1/28/2011	4:55:32 PM	BCl3 valve closed
1/28/2011	4:55:32 PM	PH3 valve closed
1/28/2011	4:55:32 PM	SiCl4 pre valve closed
1/28/2011	4:55:32 PM	SiCl4 post valve closed
1/28/2011	4:55:32 PM	Main Vac valve closed
1/28/2011	4:55:32 PM	Bypass valve closed
1/28/2011	4:55:32 PM	Bubbler valve closed
1/28/2011	4:55:32 PM	Helium MFC set to  0.000000
1/28/2011	4:55:32 PM	H2 MFC set to  0.000000
1/28/2011	4:55:32 PM	BCl3 MFC set to  0.000000
1/28/2011	4:55:32 PM	PHl3 MFC set to  0.000000
1/28/2011	4:55:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	4:55:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	4:55:33 PM	Tube furnace set to 0
1/28/2011	4:55:33 PM	Run finished at 4:55 PM
1/28/2011	5:17:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	5:17:09 PM	Recipe started at 5:17 PM
1/28/2011	5:17:09 PM	H2 valve closed
1/28/2011	5:17:09 PM	BCl3 valve closed
1/28/2011	5:17:09 PM	PH3 valve closed
1/28/2011	5:17:09 PM	SiCl4 pre valve closed
1/28/2011	5:17:09 PM	SiCl4 post valve closed
1/28/2011	5:17:09 PM	Main Vac valve closed
1/28/2011	5:17:09 PM	Bypass valve closed
1/28/2011	5:17:09 PM	Bubbler valve closed
1/28/2011	5:17:09 PM	Helium valve opened
1/28/2011	5:17:09 PM	Helium MFC set to  500.000000
1/28/2011	5:17:09 PM	H2 MFC set to  0.000000
1/28/2011	5:17:09 PM	BCl3 MFC set to  0.000000
1/28/2011	5:17:09 PM	PHl3 MFC set to  0.000000
1/28/2011	5:17:09 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:17:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:17:10 PM	Tube furnace set to 0
1/28/2011	5:17:13 PM	Helium valve closed
1/28/2011	5:17:13 PM	H2 valve closed
1/28/2011	5:17:13 PM	BCl3 valve closed
1/28/2011	5:17:13 PM	PH3 valve closed
1/28/2011	5:17:13 PM	SiCl4 pre valve closed
1/28/2011	5:17:13 PM	SiCl4 post valve closed
1/28/2011	5:17:13 PM	Main Vac valve closed
1/28/2011	5:17:13 PM	Bypass valve closed
1/28/2011	5:17:13 PM	Bubbler valve closed
1/28/2011	5:17:13 PM	Helium MFC set to  0.000000
1/28/2011	5:17:13 PM	H2 MFC set to  0.000000
1/28/2011	5:17:13 PM	BCl3 MFC set to  0.000000
1/28/2011	5:17:13 PM	PHl3 MFC set to  0.000000
1/28/2011	5:17:13 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:17:13 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:17:13 PM	Tube furnace set to 0
1/28/2011	5:17:13 PM	Run finished at 5:17 PM
1/28/2011	5:17:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	5:22:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	5:22:04 PM	Recipe started at 5:22 PM
1/28/2011	5:22:04 PM	Helium valve closed
1/28/2011	5:22:04 PM	H2 valve closed
1/28/2011	5:22:04 PM	BCl3 valve closed
1/28/2011	5:22:04 PM	PH3 valve closed
1/28/2011	5:22:04 PM	SiCl4 pre valve closed
1/28/2011	5:22:04 PM	SiCl4 post valve closed
1/28/2011	5:22:04 PM	Main Vac valve closed
1/28/2011	5:22:04 PM	Bubbler valve closed
1/28/2011	5:22:04 PM	Bypass valve opened
1/28/2011	5:22:04 PM	Helium MFC set to  0.000000
1/28/2011	5:22:04 PM	H2 MFC set to  0.000000
1/28/2011	5:22:04 PM	BCl3 MFC set to  0.000000
1/28/2011	5:22:04 PM	PHl3 MFC set to  0.000000
1/28/2011	5:22:04 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:22:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:22:04 PM	Tube furnace set to 0
1/28/2011	5:22:38 PM	Helium valve closed
1/28/2011	5:22:38 PM	H2 valve closed
1/28/2011	5:22:38 PM	BCl3 valve closed
1/28/2011	5:22:38 PM	PH3 valve closed
1/28/2011	5:22:38 PM	SiCl4 pre valve closed
1/28/2011	5:22:38 PM	SiCl4 post valve closed
1/28/2011	5:22:38 PM	Bubbler valve closed
1/28/2011	5:22:38 PM	Main Vac valve opened
1/28/2011	5:22:38 PM	Bypass valve opened
1/28/2011	5:22:38 PM	Helium MFC set to  0.000000
1/28/2011	5:22:38 PM	H2 MFC set to  0.000000
1/28/2011	5:22:38 PM	BCl3 MFC set to  0.000000
1/28/2011	5:22:38 PM	PHl3 MFC set to  0.000000
1/28/2011	5:22:38 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:22:38 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:22:38 PM	Tube furnace set to 0
1/28/2011	5:22:38 PM	Run finished at 5:22 PM
1/28/2011	5:22:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	5:23:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	5:23:31 PM	Recipe started at 5:23 PM
1/28/2011	5:23:31 PM	Helium valve closed
1/28/2011	5:23:31 PM	H2 valve closed
1/28/2011	5:23:31 PM	BCl3 valve closed
1/28/2011	5:23:31 PM	PH3 valve closed
1/28/2011	5:23:31 PM	SiCl4 pre valve closed
1/28/2011	5:23:31 PM	SiCl4 post valve closed
1/28/2011	5:23:31 PM	Main Vac valve closed
1/28/2011	5:23:31 PM	Bubbler valve closed
1/28/2011	5:23:31 PM	Bypass valve opened
1/28/2011	5:23:31 PM	Helium MFC set to  0.000000
1/28/2011	5:23:31 PM	H2 MFC set to  0.000000
1/28/2011	5:23:31 PM	BCl3 MFC set to  0.000000
1/28/2011	5:23:31 PM	PHl3 MFC set to  0.000000
1/28/2011	5:23:31 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:23:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:23:31 PM	Tube furnace set to 0
1/28/2011	5:23:31 PM	Helium valve closed
1/28/2011	5:23:31 PM	H2 valve closed
1/28/2011	5:23:31 PM	BCl3 valve closed
1/28/2011	5:23:31 PM	PH3 valve closed
1/28/2011	5:23:31 PM	SiCl4 pre valve closed
1/28/2011	5:23:31 PM	SiCl4 post valve closed
1/28/2011	5:23:31 PM	Bubbler valve closed
1/28/2011	5:23:31 PM	Main Vac valve opened
1/28/2011	5:23:31 PM	Bypass valve opened
1/28/2011	5:23:31 PM	Helium MFC set to  0.000000
1/28/2011	5:23:31 PM	H2 MFC set to  0.000000
1/28/2011	5:23:31 PM	BCl3 MFC set to  0.000000
1/28/2011	5:23:31 PM	PHl3 MFC set to  0.000000
1/28/2011	5:23:31 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:23:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:23:32 PM	Tube furnace set to 0
1/28/2011	5:24:32 PM	H2 valve closed
1/28/2011	5:24:32 PM	BCl3 valve closed
1/28/2011	5:24:32 PM	PH3 valve closed
1/28/2011	5:24:32 PM	SiCl4 pre valve closed
1/28/2011	5:24:32 PM	SiCl4 post valve closed
1/28/2011	5:24:32 PM	Bubbler valve closed
1/28/2011	5:24:32 PM	Helium valve opened
1/28/2011	5:24:32 PM	Main Vac valve opened
1/28/2011	5:24:32 PM	Bypass valve opened
1/28/2011	5:24:32 PM	Helium MFC set to  100.000000
1/28/2011	5:24:32 PM	H2 MFC set to  0.000000
1/28/2011	5:24:32 PM	BCl3 MFC set to  0.000000
1/28/2011	5:24:32 PM	PHl3 MFC set to  0.000000
1/28/2011	5:24:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:24:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:24:32 PM	Tube furnace set to 0
1/28/2011	5:25:32 PM	Helium valve closed
1/28/2011	5:25:32 PM	H2 valve closed
1/28/2011	5:25:32 PM	BCl3 valve closed
1/28/2011	5:25:32 PM	PH3 valve closed
1/28/2011	5:25:32 PM	SiCl4 pre valve closed
1/28/2011	5:25:32 PM	SiCl4 post valve closed
1/28/2011	5:25:32 PM	Bubbler valve closed
1/28/2011	5:25:32 PM	Main Vac valve opened
1/28/2011	5:25:32 PM	Bypass valve opened
1/28/2011	5:25:32 PM	Helium MFC set to  0.000000
1/28/2011	5:25:32 PM	H2 MFC set to  0.000000
1/28/2011	5:25:32 PM	BCl3 MFC set to  0.000000
1/28/2011	5:25:32 PM	PHl3 MFC set to  0.000000
1/28/2011	5:25:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:25:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:25:32 PM	Tube furnace set to 0
1/28/2011	5:26:32 PM	H2 valve closed
1/28/2011	5:26:32 PM	BCl3 valve closed
1/28/2011	5:26:32 PM	PH3 valve closed
1/28/2011	5:26:32 PM	SiCl4 pre valve closed
1/28/2011	5:26:32 PM	SiCl4 post valve closed
1/28/2011	5:26:32 PM	Bubbler valve closed
1/28/2011	5:26:32 PM	Helium valve opened
1/28/2011	5:26:32 PM	Main Vac valve opened
1/28/2011	5:26:32 PM	Bypass valve opened
1/28/2011	5:26:32 PM	Helium MFC set to  100.000000
1/28/2011	5:26:32 PM	H2 MFC set to  0.000000
1/28/2011	5:26:32 PM	BCl3 MFC set to  0.000000
1/28/2011	5:26:32 PM	PHl3 MFC set to  0.000000
1/28/2011	5:26:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:26:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:26:32 PM	Tube furnace set to 0
1/28/2011	5:27:32 PM	Helium valve closed
1/28/2011	5:27:32 PM	H2 valve closed
1/28/2011	5:27:32 PM	BCl3 valve closed
1/28/2011	5:27:32 PM	PH3 valve closed
1/28/2011	5:27:32 PM	SiCl4 pre valve closed
1/28/2011	5:27:32 PM	SiCl4 post valve closed
1/28/2011	5:27:32 PM	Bubbler valve closed
1/28/2011	5:27:32 PM	Main Vac valve opened
1/28/2011	5:27:32 PM	Bypass valve opened
1/28/2011	5:27:32 PM	Helium MFC set to  0.000000
1/28/2011	5:27:32 PM	H2 MFC set to  0.000000
1/28/2011	5:27:32 PM	BCl3 MFC set to  0.000000
1/28/2011	5:27:32 PM	PHl3 MFC set to  0.000000
1/28/2011	5:27:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:27:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:27:32 PM	Tube furnace set to 0
1/28/2011	5:28:32 PM	H2 valve closed
1/28/2011	5:28:32 PM	BCl3 valve closed
1/28/2011	5:28:32 PM	PH3 valve closed
1/28/2011	5:28:32 PM	SiCl4 pre valve closed
1/28/2011	5:28:32 PM	SiCl4 post valve closed
1/28/2011	5:28:32 PM	Bubbler valve closed
1/28/2011	5:28:32 PM	Helium valve opened
1/28/2011	5:28:32 PM	Main Vac valve opened
1/28/2011	5:28:32 PM	Bypass valve opened
1/28/2011	5:28:32 PM	Helium MFC set to  100.000000
1/28/2011	5:28:32 PM	H2 MFC set to  0.000000
1/28/2011	5:28:32 PM	BCl3 MFC set to  0.000000
1/28/2011	5:28:32 PM	PHl3 MFC set to  0.000000
1/28/2011	5:28:32 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:28:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:28:33 PM	Tube furnace set to 0
1/28/2011	5:29:33 PM	Helium valve closed
1/28/2011	5:29:33 PM	H2 valve closed
1/28/2011	5:29:33 PM	BCl3 valve closed
1/28/2011	5:29:33 PM	PH3 valve closed
1/28/2011	5:29:33 PM	SiCl4 pre valve closed
1/28/2011	5:29:33 PM	SiCl4 post valve closed
1/28/2011	5:29:33 PM	Bubbler valve closed
1/28/2011	5:29:33 PM	Main Vac valve opened
1/28/2011	5:29:33 PM	Bypass valve opened
1/28/2011	5:29:33 PM	Helium MFC set to  0.000000
1/28/2011	5:29:33 PM	H2 MFC set to  0.000000
1/28/2011	5:29:33 PM	BCl3 MFC set to  0.000000
1/28/2011	5:29:33 PM	PHl3 MFC set to  0.000000
1/28/2011	5:29:33 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:29:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:29:33 PM	Tube furnace set to 0
1/28/2011	5:30:33 PM	H2 valve closed
1/28/2011	5:30:33 PM	BCl3 valve closed
1/28/2011	5:30:33 PM	PH3 valve closed
1/28/2011	5:30:33 PM	SiCl4 pre valve closed
1/28/2011	5:30:33 PM	SiCl4 post valve closed
1/28/2011	5:30:33 PM	Bubbler valve closed
1/28/2011	5:30:33 PM	Helium valve opened
1/28/2011	5:30:33 PM	Main Vac valve opened
1/28/2011	5:30:33 PM	Bypass valve opened
1/28/2011	5:30:33 PM	Helium MFC set to  100.000000
1/28/2011	5:30:33 PM	H2 MFC set to  0.000000
1/28/2011	5:30:33 PM	BCl3 MFC set to  0.000000
1/28/2011	5:30:33 PM	PHl3 MFC set to  0.000000
1/28/2011	5:30:33 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:30:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:30:33 PM	Tube furnace set to 0
1/28/2011	5:31:33 PM	Helium valve closed
1/28/2011	5:31:33 PM	H2 valve closed
1/28/2011	5:31:33 PM	BCl3 valve closed
1/28/2011	5:31:33 PM	PH3 valve closed
1/28/2011	5:31:33 PM	SiCl4 pre valve closed
1/28/2011	5:31:33 PM	SiCl4 post valve closed
1/28/2011	5:31:33 PM	Bubbler valve closed
1/28/2011	5:31:33 PM	Main Vac valve opened
1/28/2011	5:31:33 PM	Bypass valve opened
1/28/2011	5:31:33 PM	Helium MFC set to  0.000000
1/28/2011	5:31:33 PM	H2 MFC set to  0.000000
1/28/2011	5:31:33 PM	BCl3 MFC set to  0.000000
1/28/2011	5:31:33 PM	PHl3 MFC set to  0.000000
1/28/2011	5:31:33 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:31:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:31:33 PM	Tube furnace set to 0
1/28/2011	5:32:33 PM	H2 valve closed
1/28/2011	5:32:33 PM	BCl3 valve closed
1/28/2011	5:32:33 PM	PH3 valve closed
1/28/2011	5:32:33 PM	SiCl4 pre valve closed
1/28/2011	5:32:33 PM	SiCl4 post valve closed
1/28/2011	5:32:33 PM	Bubbler valve closed
1/28/2011	5:32:33 PM	Helium valve opened
1/28/2011	5:32:33 PM	Main Vac valve opened
1/28/2011	5:32:33 PM	Bypass valve opened
1/28/2011	5:32:33 PM	Helium MFC set to  100.000000
1/28/2011	5:32:33 PM	H2 MFC set to  0.000000
1/28/2011	5:32:33 PM	BCl3 MFC set to  0.000000
1/28/2011	5:32:33 PM	PHl3 MFC set to  0.000000
1/28/2011	5:32:33 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:32:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:32:33 PM	Tube furnace set to 0
1/28/2011	5:33:33 PM	Helium valve closed
1/28/2011	5:33:33 PM	H2 valve closed
1/28/2011	5:33:33 PM	BCl3 valve closed
1/28/2011	5:33:33 PM	PH3 valve closed
1/28/2011	5:33:33 PM	SiCl4 pre valve closed
1/28/2011	5:33:33 PM	SiCl4 post valve closed
1/28/2011	5:33:33 PM	Bubbler valve closed
1/28/2011	5:33:33 PM	Main Vac valve opened
1/28/2011	5:33:33 PM	Bypass valve opened
1/28/2011	5:33:33 PM	Helium MFC set to  0.000000
1/28/2011	5:33:33 PM	H2 MFC set to  0.000000
1/28/2011	5:33:33 PM	BCl3 MFC set to  0.000000
1/28/2011	5:33:33 PM	PHl3 MFC set to  0.000000
1/28/2011	5:33:33 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:33:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:33:34 PM	Tube furnace set to 0
1/28/2011	5:34:34 PM	H2 valve closed
1/28/2011	5:34:34 PM	BCl3 valve closed
1/28/2011	5:34:34 PM	PH3 valve closed
1/28/2011	5:34:34 PM	SiCl4 pre valve closed
1/28/2011	5:34:34 PM	SiCl4 post valve closed
1/28/2011	5:34:34 PM	Bubbler valve closed
1/28/2011	5:34:34 PM	Helium valve opened
1/28/2011	5:34:34 PM	Main Vac valve opened
1/28/2011	5:34:34 PM	Bypass valve opened
1/28/2011	5:34:34 PM	Helium MFC set to  100.000000
1/28/2011	5:34:34 PM	H2 MFC set to  0.000000
1/28/2011	5:34:34 PM	BCl3 MFC set to  0.000000
1/28/2011	5:34:34 PM	PHl3 MFC set to  0.000000
1/28/2011	5:34:34 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:34:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:34:34 PM	Tube furnace set to 0
1/28/2011	5:35:34 PM	Helium valve closed
1/28/2011	5:35:34 PM	H2 valve closed
1/28/2011	5:35:34 PM	BCl3 valve closed
1/28/2011	5:35:34 PM	PH3 valve closed
1/28/2011	5:35:34 PM	SiCl4 pre valve closed
1/28/2011	5:35:34 PM	SiCl4 post valve closed
1/28/2011	5:35:34 PM	Bubbler valve closed
1/28/2011	5:35:34 PM	Main Vac valve opened
1/28/2011	5:35:34 PM	Bypass valve opened
1/28/2011	5:35:34 PM	Helium MFC set to  0.000000
1/28/2011	5:35:34 PM	H2 MFC set to  0.000000
1/28/2011	5:35:34 PM	BCl3 MFC set to  0.000000
1/28/2011	5:35:34 PM	PHl3 MFC set to  0.000000
1/28/2011	5:35:34 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:35:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:35:34 PM	Tube furnace set to 0
1/28/2011	5:36:34 PM	H2 valve closed
1/28/2011	5:36:34 PM	BCl3 valve closed
1/28/2011	5:36:34 PM	PH3 valve closed
1/28/2011	5:36:34 PM	SiCl4 pre valve closed
1/28/2011	5:36:34 PM	SiCl4 post valve closed
1/28/2011	5:36:34 PM	Bubbler valve closed
1/28/2011	5:36:34 PM	Helium valve opened
1/28/2011	5:36:34 PM	Main Vac valve opened
1/28/2011	5:36:34 PM	Bypass valve opened
1/28/2011	5:36:34 PM	Helium MFC set to  100.000000
1/28/2011	5:36:34 PM	H2 MFC set to  0.000000
1/28/2011	5:36:34 PM	BCl3 MFC set to  0.000000
1/28/2011	5:36:34 PM	PHl3 MFC set to  0.000000
1/28/2011	5:36:34 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:36:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:36:34 PM	Tube furnace set to 0
1/28/2011	5:37:34 PM	Helium valve closed
1/28/2011	5:37:34 PM	H2 valve closed
1/28/2011	5:37:34 PM	BCl3 valve closed
1/28/2011	5:37:34 PM	PH3 valve closed
1/28/2011	5:37:34 PM	SiCl4 pre valve closed
1/28/2011	5:37:34 PM	SiCl4 post valve closed
1/28/2011	5:37:34 PM	Bubbler valve closed
1/28/2011	5:37:34 PM	Main Vac valve opened
1/28/2011	5:37:34 PM	Bypass valve opened
1/28/2011	5:37:34 PM	Helium MFC set to  0.000000
1/28/2011	5:37:34 PM	H2 MFC set to  0.000000
1/28/2011	5:37:34 PM	BCl3 MFC set to  0.000000
1/28/2011	5:37:34 PM	PHl3 MFC set to  0.000000
1/28/2011	5:37:34 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:37:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:37:34 PM	Tube furnace set to 0
1/28/2011	5:38:34 PM	H2 valve closed
1/28/2011	5:38:34 PM	BCl3 valve closed
1/28/2011	5:38:34 PM	PH3 valve closed
1/28/2011	5:38:34 PM	SiCl4 pre valve closed
1/28/2011	5:38:34 PM	SiCl4 post valve closed
1/28/2011	5:38:34 PM	Bubbler valve closed
1/28/2011	5:38:34 PM	Helium valve opened
1/28/2011	5:38:34 PM	Main Vac valve opened
1/28/2011	5:38:34 PM	Bypass valve opened
1/28/2011	5:38:34 PM	Helium MFC set to  100.000000
1/28/2011	5:38:34 PM	H2 MFC set to  0.000000
1/28/2011	5:38:34 PM	BCl3 MFC set to  0.000000
1/28/2011	5:38:34 PM	PHl3 MFC set to  0.000000
1/28/2011	5:38:34 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:38:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:38:35 PM	Tube furnace set to 0
1/28/2011	5:39:35 PM	Helium valve closed
1/28/2011	5:39:35 PM	H2 valve closed
1/28/2011	5:39:35 PM	BCl3 valve closed
1/28/2011	5:39:35 PM	PH3 valve closed
1/28/2011	5:39:35 PM	SiCl4 pre valve closed
1/28/2011	5:39:35 PM	SiCl4 post valve closed
1/28/2011	5:39:35 PM	Bubbler valve closed
1/28/2011	5:39:35 PM	Main Vac valve opened
1/28/2011	5:39:35 PM	Bypass valve opened
1/28/2011	5:39:35 PM	Helium MFC set to  0.000000
1/28/2011	5:39:35 PM	H2 MFC set to  0.000000
1/28/2011	5:39:35 PM	BCl3 MFC set to  0.000000
1/28/2011	5:39:35 PM	PHl3 MFC set to  0.000000
1/28/2011	5:39:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:39:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:39:35 PM	Tube furnace set to 0
1/28/2011	5:40:35 PM	H2 valve closed
1/28/2011	5:40:35 PM	BCl3 valve closed
1/28/2011	5:40:35 PM	PH3 valve closed
1/28/2011	5:40:35 PM	SiCl4 pre valve closed
1/28/2011	5:40:35 PM	SiCl4 post valve closed
1/28/2011	5:40:35 PM	Bubbler valve closed
1/28/2011	5:40:35 PM	Helium valve opened
1/28/2011	5:40:35 PM	Main Vac valve opened
1/28/2011	5:40:35 PM	Bypass valve opened
1/28/2011	5:40:35 PM	Helium MFC set to  100.000000
1/28/2011	5:40:35 PM	H2 MFC set to  0.000000
1/28/2011	5:40:35 PM	BCl3 MFC set to  0.000000
1/28/2011	5:40:35 PM	PHl3 MFC set to  0.000000
1/28/2011	5:40:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:40:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:40:35 PM	Tube furnace set to 0
1/28/2011	5:41:35 PM	Helium valve closed
1/28/2011	5:41:35 PM	H2 valve closed
1/28/2011	5:41:35 PM	BCl3 valve closed
1/28/2011	5:41:35 PM	PH3 valve closed
1/28/2011	5:41:35 PM	SiCl4 pre valve closed
1/28/2011	5:41:35 PM	SiCl4 post valve closed
1/28/2011	5:41:35 PM	Bubbler valve closed
1/28/2011	5:41:35 PM	Main Vac valve opened
1/28/2011	5:41:35 PM	Bypass valve opened
1/28/2011	5:41:35 PM	Helium MFC set to  0.000000
1/28/2011	5:41:35 PM	H2 MFC set to  0.000000
1/28/2011	5:41:35 PM	BCl3 MFC set to  0.000000
1/28/2011	5:41:35 PM	PHl3 MFC set to  0.000000
1/28/2011	5:41:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:41:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:41:35 PM	Tube furnace set to 0
1/28/2011	5:42:35 PM	H2 valve closed
1/28/2011	5:42:35 PM	BCl3 valve closed
1/28/2011	5:42:35 PM	PH3 valve closed
1/28/2011	5:42:35 PM	SiCl4 pre valve closed
1/28/2011	5:42:35 PM	SiCl4 post valve closed
1/28/2011	5:42:35 PM	Bubbler valve closed
1/28/2011	5:42:35 PM	Helium valve opened
1/28/2011	5:42:35 PM	Main Vac valve opened
1/28/2011	5:42:35 PM	Bypass valve opened
1/28/2011	5:42:35 PM	Helium MFC set to  100.000000
1/28/2011	5:42:35 PM	H2 MFC set to  0.000000
1/28/2011	5:42:35 PM	BCl3 MFC set to  0.000000
1/28/2011	5:42:35 PM	PHl3 MFC set to  0.000000
1/28/2011	5:42:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:42:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:42:35 PM	Tube furnace set to 0
1/28/2011	5:43:35 PM	Helium valve closed
1/28/2011	5:43:35 PM	H2 valve closed
1/28/2011	5:43:35 PM	BCl3 valve closed
1/28/2011	5:43:35 PM	PH3 valve closed
1/28/2011	5:43:35 PM	SiCl4 pre valve closed
1/28/2011	5:43:35 PM	SiCl4 post valve closed
1/28/2011	5:43:35 PM	Bubbler valve closed
1/28/2011	5:43:35 PM	Main Vac valve opened
1/28/2011	5:43:35 PM	Bypass valve opened
1/28/2011	5:43:35 PM	Helium MFC set to  0.000000
1/28/2011	5:43:35 PM	H2 MFC set to  0.000000
1/28/2011	5:43:35 PM	BCl3 MFC set to  0.000000
1/28/2011	5:43:35 PM	PHl3 MFC set to  0.000000
1/28/2011	5:43:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	5:43:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	5:43:36 PM	Tube furnace set to 0
1/28/2011	5:43:37 PM	Run finished at 5:43 PM
1/28/2011	5:43:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	6:06:25 PM	Helium MFC set to  100.000000
1/28/2011	6:06:26 PM	Helium valve opened
1/28/2011	6:07:16 PM	Helium MFC set to  0.000000
1/28/2011	6:07:17 PM	Helium valve closed
1/28/2011	6:09:41 PM	Helium MFC set to  100.000000
1/28/2011	6:09:42 PM	Helium valve opened
1/28/2011	6:12:45 PM	Helium MFC set to  0.000000
1/28/2011	6:12:46 PM	Helium valve closed
1/28/2011	6:13:35 PM	Recipe started at 6:13 PM
1/28/2011	6:13:35 PM	Helium valve closed
1/28/2011	6:13:35 PM	BCl3 valve closed
1/28/2011	6:13:35 PM	PH3 valve closed
1/28/2011	6:13:35 PM	SiCl4 pre valve closed
1/28/2011	6:13:35 PM	SiCl4 post valve closed
1/28/2011	6:13:35 PM	Main Vac valve closed
1/28/2011	6:13:35 PM	Bypass valve closed
1/28/2011	6:13:35 PM	Bubbler valve closed
1/28/2011	6:13:35 PM	H2 valve opened
1/28/2011	6:13:35 PM	Helium MFC set to  0.000000
1/28/2011	6:13:35 PM	H2 MFC set to  500.000000
1/28/2011	6:13:35 PM	BCl3 MFC set to  0.000000
1/28/2011	6:13:35 PM	PHl3 MFC set to  0.000000
1/28/2011	6:13:35 PM	SiCl4 MFC set to  0.000000
1/28/2011	6:13:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:13:35 PM	Tube furnace set to 0
1/28/2011	6:14:50 PM	Helium valve closed
1/28/2011	6:14:50 PM	BCl3 valve closed
1/28/2011	6:14:50 PM	PH3 valve closed
1/28/2011	6:14:50 PM	SiCl4 pre valve closed
1/28/2011	6:14:50 PM	SiCl4 post valve closed
1/28/2011	6:14:50 PM	Main Vac valve closed
1/28/2011	6:14:50 PM	Bypass valve closed
1/28/2011	6:14:50 PM	H2 valve opened
1/28/2011	6:14:50 PM	Bubbler valve opened
1/28/2011	6:14:50 PM	Helium MFC set to  0.000000
1/28/2011	6:14:50 PM	H2 MFC set to  500.000000
1/28/2011	6:14:50 PM	BCl3 MFC set to  0.000000
1/28/2011	6:14:50 PM	PHl3 MFC set to  0.000000
1/28/2011	6:14:50 PM	SiCl4 MFC set to  0.000000
1/28/2011	6:14:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:14:51 PM	Tube furnace set to 1000
1/28/2011	6:34:51 PM	Helium valve closed
1/28/2011	6:34:51 PM	PH3 valve closed
1/28/2011	6:34:51 PM	Main Vac valve closed
1/28/2011	6:34:51 PM	Bypass valve closed
1/28/2011	6:34:51 PM	H2 valve opened
1/28/2011	6:34:51 PM	BCl3 valve opened
1/28/2011	6:34:51 PM	SiCl4 pre valve opened
1/28/2011	6:34:51 PM	SiCl4 post valve opened
1/28/2011	6:34:51 PM	Bubbler valve opened
1/28/2011	6:34:51 PM	Helium MFC set to  0.000000
1/28/2011	6:34:51 PM	H2 MFC set to  500.000000
1/28/2011	6:34:51 PM	BCl3 MFC set to  3.000000
1/28/2011	6:34:51 PM	PHl3 MFC set to  0.000000
1/28/2011	6:34:51 PM	SiCl4 MFC set to  50.000000
1/28/2011	6:34:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	6:34:51 PM	Tube furnace set to 1000
1/28/2011	6:59:51 PM	H2 valve closed
1/28/2011	6:59:51 PM	BCl3 valve closed
1/28/2011	6:59:51 PM	PH3 valve closed
1/28/2011	6:59:51 PM	SiCl4 pre valve closed
1/28/2011	6:59:51 PM	SiCl4 post valve closed
1/28/2011	6:59:51 PM	Main Vac valve closed
1/28/2011	6:59:51 PM	Bypass valve closed
1/28/2011	6:59:51 PM	Helium valve opened
1/28/2011	6:59:51 PM	Bubbler valve opened
1/28/2011	6:59:51 PM	Error setting the  Helium MFC to 500.000000
1/28/2011	7:00:47 PM	Error setting the  H2 MFC to 0.000000
1/28/2011	7:00:48 PM	Error setting the  BCl3 MFC to 0.000000
1/28/2011	7:00:49 PM	PHl3 MFC set to  0.000000
1/28/2011	7:00:49 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:00:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	7:00:49 PM	Tube furnace set to 0
1/28/2011	7:01:11 PM	Run aborted at 7:01 PM
1/28/2011	7:01:11 PM	Helium valve closed
1/28/2011	7:01:11 PM	H2 valve closed
1/28/2011	7:01:11 PM	BCl3 valve closed
1/28/2011	7:01:11 PM	PH3 valve closed
1/28/2011	7:01:11 PM	SiCl4 pre valve closed
1/28/2011	7:01:11 PM	SiCl4 post valve closed
1/28/2011	7:01:11 PM	Bypass valve closed
1/28/2011	7:01:11 PM	Main Vac valve closed
1/28/2011	7:01:11 PM	Bubbler valve closed
1/28/2011	7:01:11 PM	Error setting the  Helium MFC to 0.000000
1/28/2011	7:01:13 PM	Error setting the  H2 MFC to 0.000000
1/28/2011	7:01:14 PM	Error setting the  BCl3 MFC to 0.000000
1/28/2011	7:01:14 PM	PHl3 MFC set to  0.000000
1/28/2011	7:01:14 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:01:14 PM	Tube furnace set to 0
1/28/2011	7:01:21 PM	Error setting the  H2 MFC to 0.000000
1/28/2011	7:01:27 PM	Error setting the  Helium MFC to 100.000000
1/28/2011	7:01:58 PM	Program started after a nonstandard shutdown
1/28/2011	7:01:58 PM	Helium valve closed
1/28/2011	7:01:58 PM	H2 valve closed
1/28/2011	7:01:58 PM	BCl3 valve closed
1/28/2011	7:01:58 PM	PH3 valve closed
1/28/2011	7:01:58 PM	SiCl4 pre valve closed
1/28/2011	7:01:58 PM	SiCl4 post valve closed
1/28/2011	7:01:58 PM	Main Vac valve closed
1/28/2011	7:01:58 PM	Bypass valve closed
1/28/2011	7:01:58 PM	Bubbler valve closed
1/28/2011	7:01:58 PM	Error setting the  Helium MFC to 0.000000
1/28/2011	7:01:59 PM	Error setting the  H2 MFC to 0.000000
1/28/2011	7:02:00 PM	Error setting the  BCl3 MFC to 0.000000
1/28/2011	7:02:00 PM	PHl3 MFC set to  0.000000
1/28/2011	7:02:00 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:02:00 PM	Bypass solenoid MFC set to  760.000000
1/28/2011	7:02:00 PM	Tube furnace set to 0
1/28/2011	7:02:34 PM	Program started after a nonstandard shutdown
1/28/2011	7:02:35 PM	Helium valve closed
1/28/2011	7:02:35 PM	H2 valve closed
1/28/2011	7:02:35 PM	BCl3 valve closed
1/28/2011	7:02:35 PM	PH3 valve closed
1/28/2011	7:02:35 PM	SiCl4 pre valve closed
1/28/2011	7:02:35 PM	SiCl4 post valve closed
1/28/2011	7:02:35 PM	Main Vac valve closed
1/28/2011	7:02:35 PM	Bypass valve closed
1/28/2011	7:02:35 PM	Bubbler valve closed
1/28/2011	7:02:35 PM	Error setting the  Helium MFC to 0.000000
1/28/2011	7:02:36 PM	Error setting the  H2 MFC to 0.000000
1/28/2011	7:02:36 PM	Error setting the  BCl3 MFC to 0.000000
1/28/2011	7:02:37 PM	PHl3 MFC set to  0.000000
1/28/2011	7:02:37 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:02:37 PM	Bypass solenoid MFC set to  760.000000
1/28/2011	7:02:37 PM	Tube furnace set to 0
1/28/2011	7:05:09 PM	Program started after a nonstandard shutdown
1/28/2011	7:05:10 PM	Helium valve closed
1/28/2011	7:05:10 PM	H2 valve closed
1/28/2011	7:05:10 PM	BCl3 valve closed
1/28/2011	7:05:10 PM	PH3 valve closed
1/28/2011	7:05:10 PM	SiCl4 pre valve closed
1/28/2011	7:05:10 PM	SiCl4 post valve closed
1/28/2011	7:05:10 PM	Main Vac valve closed
1/28/2011	7:05:10 PM	Bypass valve closed
1/28/2011	7:05:10 PM	Bubbler valve closed
1/28/2011	7:05:10 PM	Helium MFC set to  0.000000
1/28/2011	7:05:10 PM	H2 MFC set to  0.000000
1/28/2011	7:05:10 PM	BCl3 MFC set to  0.000000
1/28/2011	7:05:10 PM	PHl3 MFC set to  0.000000
1/28/2011	7:05:10 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:05:10 PM	Bypass solenoid MFC set to  760.000000
1/28/2011	7:05:11 PM	Tube furnace set to 0
1/28/2011	7:05:41 PM	Helium MFC set to  0.000000
1/28/2011	7:05:51 PM	Helium MFC set to  500.000000
1/28/2011	7:05:52 PM	Helium valve opened
1/28/2011	7:05:54 PM	Bubbler valve opened
1/28/2011	7:08:08 PM	Recipe started at 7:08 PM
1/28/2011	7:08:08 PM	H2 valve closed
1/28/2011	7:08:08 PM	BCl3 valve closed
1/28/2011	7:08:08 PM	PH3 valve closed
1/28/2011	7:08:08 PM	SiCl4 pre valve closed
1/28/2011	7:08:08 PM	SiCl4 post valve closed
1/28/2011	7:08:08 PM	Main Vac valve closed
1/28/2011	7:08:08 PM	Bypass valve closed
1/28/2011	7:08:08 PM	Helium valve opened
1/28/2011	7:08:08 PM	Bubbler valve opened
1/28/2011	7:08:08 PM	Helium MFC set to  500.000000
1/28/2011	7:08:08 PM	H2 MFC set to  0.000000
1/28/2011	7:08:08 PM	BCl3 MFC set to  0.000000
1/28/2011	7:08:08 PM	PHl3 MFC set to  0.000000
1/28/2011	7:08:08 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:08:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	7:08:08 PM	Tube furnace set to 0
1/28/2011	7:28:08 PM	Helium valve closed
1/28/2011	7:28:08 PM	H2 valve closed
1/28/2011	7:28:08 PM	BCl3 valve closed
1/28/2011	7:28:08 PM	PH3 valve closed
1/28/2011	7:28:08 PM	SiCl4 pre valve closed
1/28/2011	7:28:08 PM	SiCl4 post valve closed
1/28/2011	7:28:08 PM	Main Vac valve closed
1/28/2011	7:28:08 PM	Bypass valve closed
1/28/2011	7:28:08 PM	Bubbler valve closed
1/28/2011	7:28:08 PM	Helium MFC set to  0.000000
1/28/2011	7:28:08 PM	H2 MFC set to  0.000000
1/28/2011	7:28:08 PM	BCl3 MFC set to  0.000000
1/28/2011	7:28:08 PM	PHl3 MFC set to  0.000000
1/28/2011	7:28:08 PM	SiCl4 MFC set to  0.000000
1/28/2011	7:28:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	7:28:08 PM	Tube furnace set to 0
1/28/2011	7:28:09 PM	Run finished at 7:28 PM
1/28/2011	10:01:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	10:01:21 PM	Recipe started at 10:01 PM
1/28/2011	10:01:21 PM	H2 valve closed
1/28/2011	10:01:21 PM	BCl3 valve closed
1/28/2011	10:01:21 PM	PH3 valve closed
1/28/2011	10:01:21 PM	SiCl4 pre valve closed
1/28/2011	10:01:21 PM	SiCl4 post valve closed
1/28/2011	10:01:21 PM	Main Vac valve closed
1/28/2011	10:01:21 PM	Bypass valve closed
1/28/2011	10:01:21 PM	Bubbler valve closed
1/28/2011	10:01:21 PM	Helium valve opened
1/28/2011	10:01:21 PM	Helium MFC set to  500.000000
1/28/2011	10:01:21 PM	H2 MFC set to  0.000000
1/28/2011	10:01:21 PM	BCl3 MFC set to  0.000000
1/28/2011	10:01:21 PM	PHl3 MFC set to  0.000000
1/28/2011	10:01:21 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:01:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:01:21 PM	Tube furnace set to 0
1/28/2011	10:01:28 PM	Helium valve closed
1/28/2011	10:01:28 PM	H2 valve closed
1/28/2011	10:01:28 PM	BCl3 valve closed
1/28/2011	10:01:28 PM	PH3 valve closed
1/28/2011	10:01:28 PM	SiCl4 pre valve closed
1/28/2011	10:01:28 PM	SiCl4 post valve closed
1/28/2011	10:01:28 PM	Main Vac valve closed
1/28/2011	10:01:28 PM	Bypass valve closed
1/28/2011	10:01:28 PM	Bubbler valve closed
1/28/2011	10:01:28 PM	Helium MFC set to  0.000000
1/28/2011	10:01:28 PM	H2 MFC set to  0.000000
1/28/2011	10:01:28 PM	BCl3 MFC set to  0.000000
1/28/2011	10:01:28 PM	PHl3 MFC set to  0.000000
1/28/2011	10:01:28 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:01:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:01:28 PM	Tube furnace set to 0
1/28/2011	10:01:28 PM	Run finished at 10:01 PM
1/28/2011	10:01:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2011	10:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:10:58 PM	Recipe started at 10:10 PM
1/28/2011	10:10:58 PM	Helium valve closed
1/28/2011	10:10:58 PM	H2 valve closed
1/28/2011	10:10:58 PM	BCl3 valve closed
1/28/2011	10:10:58 PM	PH3 valve closed
1/28/2011	10:10:58 PM	SiCl4 pre valve closed
1/28/2011	10:10:58 PM	SiCl4 post valve closed
1/28/2011	10:10:58 PM	Main Vac valve closed
1/28/2011	10:10:58 PM	Bubbler valve closed
1/28/2011	10:10:58 PM	Bypass valve opened
1/28/2011	10:10:58 PM	Helium MFC set to  0.000000
1/28/2011	10:10:58 PM	H2 MFC set to  0.000000
1/28/2011	10:10:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:10:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:10:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:10:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:10:58 PM	Tube furnace set to 0
1/28/2011	10:11:31 PM	Helium valve closed
1/28/2011	10:11:31 PM	H2 valve closed
1/28/2011	10:11:31 PM	BCl3 valve closed
1/28/2011	10:11:31 PM	PH3 valve closed
1/28/2011	10:11:31 PM	SiCl4 pre valve closed
1/28/2011	10:11:31 PM	SiCl4 post valve closed
1/28/2011	10:11:31 PM	Bubbler valve closed
1/28/2011	10:11:31 PM	Main Vac valve opened
1/28/2011	10:11:31 PM	Bypass valve opened
1/28/2011	10:11:31 PM	Helium MFC set to  0.000000
1/28/2011	10:11:31 PM	H2 MFC set to  0.000000
1/28/2011	10:11:31 PM	BCl3 MFC set to  0.000000
1/28/2011	10:11:31 PM	PHl3 MFC set to  0.000000
1/28/2011	10:11:31 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:11:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:11:32 PM	Tube furnace set to 0
1/28/2011	10:11:32 PM	Run finished at 10:11 PM
1/28/2011	10:11:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:11:46 PM	Tube furnace set to 200
1/28/2011	10:14:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	10:14:54 PM	Recipe started at 10:14 PM
1/28/2011	10:14:54 PM	Helium valve closed
1/28/2011	10:14:54 PM	H2 valve closed
1/28/2011	10:14:54 PM	BCl3 valve closed
1/28/2011	10:14:54 PM	PH3 valve closed
1/28/2011	10:14:54 PM	SiCl4 pre valve closed
1/28/2011	10:14:54 PM	SiCl4 post valve closed
1/28/2011	10:14:54 PM	Main Vac valve closed
1/28/2011	10:14:54 PM	Bubbler valve closed
1/28/2011	10:14:54 PM	Bypass valve opened
1/28/2011	10:14:54 PM	Helium MFC set to  0.000000
1/28/2011	10:14:54 PM	H2 MFC set to  0.000000
1/28/2011	10:14:54 PM	BCl3 MFC set to  0.000000
1/28/2011	10:14:54 PM	PHl3 MFC set to  0.000000
1/28/2011	10:14:54 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:14:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:14:55 PM	Tube furnace set to 0
1/28/2011	10:14:55 PM	Helium valve closed
1/28/2011	10:14:55 PM	H2 valve closed
1/28/2011	10:14:55 PM	BCl3 valve closed
1/28/2011	10:14:55 PM	PH3 valve closed
1/28/2011	10:14:55 PM	SiCl4 pre valve closed
1/28/2011	10:14:55 PM	SiCl4 post valve closed
1/28/2011	10:14:55 PM	Bubbler valve closed
1/28/2011	10:14:55 PM	Main Vac valve opened
1/28/2011	10:14:55 PM	Bypass valve opened
1/28/2011	10:14:55 PM	Helium MFC set to  0.000000
1/28/2011	10:14:55 PM	H2 MFC set to  0.000000
1/28/2011	10:14:55 PM	BCl3 MFC set to  0.000000
1/28/2011	10:14:55 PM	PHl3 MFC set to  0.000000
1/28/2011	10:14:55 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:14:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:14:55 PM	Tube furnace set to 0
1/28/2011	10:15:55 PM	H2 valve closed
1/28/2011	10:15:55 PM	BCl3 valve closed
1/28/2011	10:15:55 PM	PH3 valve closed
1/28/2011	10:15:55 PM	SiCl4 pre valve closed
1/28/2011	10:15:55 PM	SiCl4 post valve closed
1/28/2011	10:15:55 PM	Bubbler valve closed
1/28/2011	10:15:55 PM	Helium valve opened
1/28/2011	10:15:55 PM	Main Vac valve opened
1/28/2011	10:15:55 PM	Bypass valve opened
1/28/2011	10:15:55 PM	Helium MFC set to  100.000000
1/28/2011	10:15:55 PM	H2 MFC set to  0.000000
1/28/2011	10:15:55 PM	BCl3 MFC set to  0.000000
1/28/2011	10:15:55 PM	PHl3 MFC set to  0.000000
1/28/2011	10:15:55 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:15:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:15:55 PM	Tube furnace set to 0
1/28/2011	10:16:55 PM	Helium valve closed
1/28/2011	10:16:55 PM	H2 valve closed
1/28/2011	10:16:55 PM	BCl3 valve closed
1/28/2011	10:16:55 PM	PH3 valve closed
1/28/2011	10:16:55 PM	SiCl4 pre valve closed
1/28/2011	10:16:55 PM	SiCl4 post valve closed
1/28/2011	10:16:55 PM	Bubbler valve closed
1/28/2011	10:16:55 PM	Main Vac valve opened
1/28/2011	10:16:55 PM	Bypass valve opened
1/28/2011	10:16:55 PM	Helium MFC set to  0.000000
1/28/2011	10:16:55 PM	H2 MFC set to  0.000000
1/28/2011	10:16:55 PM	BCl3 MFC set to  0.000000
1/28/2011	10:16:55 PM	PHl3 MFC set to  0.000000
1/28/2011	10:16:55 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:16:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:16:55 PM	Tube furnace set to 0
1/28/2011	10:17:55 PM	H2 valve closed
1/28/2011	10:17:55 PM	BCl3 valve closed
1/28/2011	10:17:55 PM	PH3 valve closed
1/28/2011	10:17:55 PM	SiCl4 pre valve closed
1/28/2011	10:17:55 PM	SiCl4 post valve closed
1/28/2011	10:17:55 PM	Bubbler valve closed
1/28/2011	10:17:55 PM	Helium valve opened
1/28/2011	10:17:55 PM	Main Vac valve opened
1/28/2011	10:17:55 PM	Bypass valve opened
1/28/2011	10:17:55 PM	Helium MFC set to  100.000000
1/28/2011	10:17:55 PM	H2 MFC set to  0.000000
1/28/2011	10:17:55 PM	BCl3 MFC set to  0.000000
1/28/2011	10:17:55 PM	PHl3 MFC set to  0.000000
1/28/2011	10:17:55 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:17:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:17:56 PM	Tube furnace set to 0
1/28/2011	10:18:56 PM	Helium valve closed
1/28/2011	10:18:56 PM	H2 valve closed
1/28/2011	10:18:56 PM	BCl3 valve closed
1/28/2011	10:18:56 PM	PH3 valve closed
1/28/2011	10:18:56 PM	SiCl4 pre valve closed
1/28/2011	10:18:56 PM	SiCl4 post valve closed
1/28/2011	10:18:56 PM	Bubbler valve closed
1/28/2011	10:18:56 PM	Main Vac valve opened
1/28/2011	10:18:56 PM	Bypass valve opened
1/28/2011	10:18:56 PM	Helium MFC set to  0.000000
1/28/2011	10:18:56 PM	H2 MFC set to  0.000000
1/28/2011	10:18:56 PM	BCl3 MFC set to  0.000000
1/28/2011	10:18:56 PM	PHl3 MFC set to  0.000000
1/28/2011	10:18:56 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:18:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:18:56 PM	Tube furnace set to 0
1/28/2011	10:19:56 PM	H2 valve closed
1/28/2011	10:19:56 PM	BCl3 valve closed
1/28/2011	10:19:56 PM	PH3 valve closed
1/28/2011	10:19:56 PM	SiCl4 pre valve closed
1/28/2011	10:19:56 PM	SiCl4 post valve closed
1/28/2011	10:19:56 PM	Bubbler valve closed
1/28/2011	10:19:56 PM	Helium valve opened
1/28/2011	10:19:56 PM	Main Vac valve opened
1/28/2011	10:19:56 PM	Bypass valve opened
1/28/2011	10:19:56 PM	Helium MFC set to  100.000000
1/28/2011	10:19:56 PM	H2 MFC set to  0.000000
1/28/2011	10:19:56 PM	BCl3 MFC set to  0.000000
1/28/2011	10:19:56 PM	PHl3 MFC set to  0.000000
1/28/2011	10:19:56 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:19:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:19:56 PM	Tube furnace set to 0
1/28/2011	10:20:56 PM	Helium valve closed
1/28/2011	10:20:56 PM	H2 valve closed
1/28/2011	10:20:56 PM	BCl3 valve closed
1/28/2011	10:20:56 PM	PH3 valve closed
1/28/2011	10:20:56 PM	SiCl4 pre valve closed
1/28/2011	10:20:56 PM	SiCl4 post valve closed
1/28/2011	10:20:56 PM	Bubbler valve closed
1/28/2011	10:20:56 PM	Main Vac valve opened
1/28/2011	10:20:56 PM	Bypass valve opened
1/28/2011	10:20:56 PM	Helium MFC set to  0.000000
1/28/2011	10:20:56 PM	H2 MFC set to  0.000000
1/28/2011	10:20:56 PM	BCl3 MFC set to  0.000000
1/28/2011	10:20:56 PM	PHl3 MFC set to  0.000000
1/28/2011	10:20:56 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:20:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:20:56 PM	Tube furnace set to 0
1/28/2011	10:21:56 PM	H2 valve closed
1/28/2011	10:21:56 PM	BCl3 valve closed
1/28/2011	10:21:56 PM	PH3 valve closed
1/28/2011	10:21:56 PM	SiCl4 pre valve closed
1/28/2011	10:21:56 PM	SiCl4 post valve closed
1/28/2011	10:21:56 PM	Bubbler valve closed
1/28/2011	10:21:56 PM	Helium valve opened
1/28/2011	10:21:56 PM	Main Vac valve opened
1/28/2011	10:21:56 PM	Bypass valve opened
1/28/2011	10:21:56 PM	Helium MFC set to  100.000000
1/28/2011	10:21:56 PM	H2 MFC set to  0.000000
1/28/2011	10:21:56 PM	BCl3 MFC set to  0.000000
1/28/2011	10:21:56 PM	PHl3 MFC set to  0.000000
1/28/2011	10:21:56 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:21:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:21:56 PM	Tube furnace set to 0
1/28/2011	10:22:56 PM	Helium valve closed
1/28/2011	10:22:56 PM	H2 valve closed
1/28/2011	10:22:56 PM	BCl3 valve closed
1/28/2011	10:22:56 PM	PH3 valve closed
1/28/2011	10:22:56 PM	SiCl4 pre valve closed
1/28/2011	10:22:56 PM	SiCl4 post valve closed
1/28/2011	10:22:56 PM	Bubbler valve closed
1/28/2011	10:22:56 PM	Main Vac valve opened
1/28/2011	10:22:56 PM	Bypass valve opened
1/28/2011	10:22:56 PM	Helium MFC set to  0.000000
1/28/2011	10:22:56 PM	H2 MFC set to  0.000000
1/28/2011	10:22:56 PM	BCl3 MFC set to  0.000000
1/28/2011	10:22:56 PM	PHl3 MFC set to  0.000000
1/28/2011	10:22:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:22:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:22:57 PM	Tube furnace set to 0
1/28/2011	10:23:57 PM	H2 valve closed
1/28/2011	10:23:57 PM	BCl3 valve closed
1/28/2011	10:23:57 PM	PH3 valve closed
1/28/2011	10:23:57 PM	SiCl4 pre valve closed
1/28/2011	10:23:57 PM	SiCl4 post valve closed
1/28/2011	10:23:57 PM	Bubbler valve closed
1/28/2011	10:23:57 PM	Helium valve opened
1/28/2011	10:23:57 PM	Main Vac valve opened
1/28/2011	10:23:57 PM	Bypass valve opened
1/28/2011	10:23:57 PM	Helium MFC set to  100.000000
1/28/2011	10:23:57 PM	H2 MFC set to  0.000000
1/28/2011	10:23:57 PM	BCl3 MFC set to  0.000000
1/28/2011	10:23:57 PM	PHl3 MFC set to  0.000000
1/28/2011	10:23:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:23:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:23:57 PM	Tube furnace set to 0
1/28/2011	10:24:57 PM	Helium valve closed
1/28/2011	10:24:57 PM	H2 valve closed
1/28/2011	10:24:57 PM	BCl3 valve closed
1/28/2011	10:24:57 PM	PH3 valve closed
1/28/2011	10:24:57 PM	SiCl4 pre valve closed
1/28/2011	10:24:57 PM	SiCl4 post valve closed
1/28/2011	10:24:57 PM	Bubbler valve closed
1/28/2011	10:24:57 PM	Main Vac valve opened
1/28/2011	10:24:57 PM	Bypass valve opened
1/28/2011	10:24:57 PM	Helium MFC set to  0.000000
1/28/2011	10:24:57 PM	H2 MFC set to  0.000000
1/28/2011	10:24:57 PM	BCl3 MFC set to  0.000000
1/28/2011	10:24:57 PM	PHl3 MFC set to  0.000000
1/28/2011	10:24:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:24:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:24:57 PM	Tube furnace set to 0
1/28/2011	10:25:57 PM	H2 valve closed
1/28/2011	10:25:57 PM	BCl3 valve closed
1/28/2011	10:25:57 PM	PH3 valve closed
1/28/2011	10:25:57 PM	SiCl4 pre valve closed
1/28/2011	10:25:57 PM	SiCl4 post valve closed
1/28/2011	10:25:57 PM	Bubbler valve closed
1/28/2011	10:25:57 PM	Helium valve opened
1/28/2011	10:25:57 PM	Main Vac valve opened
1/28/2011	10:25:57 PM	Bypass valve opened
1/28/2011	10:25:57 PM	Helium MFC set to  100.000000
1/28/2011	10:25:57 PM	H2 MFC set to  0.000000
1/28/2011	10:25:57 PM	BCl3 MFC set to  0.000000
1/28/2011	10:25:57 PM	PHl3 MFC set to  0.000000
1/28/2011	10:25:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:25:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:25:57 PM	Tube furnace set to 0
1/28/2011	10:26:57 PM	Helium valve closed
1/28/2011	10:26:57 PM	H2 valve closed
1/28/2011	10:26:57 PM	BCl3 valve closed
1/28/2011	10:26:57 PM	PH3 valve closed
1/28/2011	10:26:57 PM	SiCl4 pre valve closed
1/28/2011	10:26:57 PM	SiCl4 post valve closed
1/28/2011	10:26:57 PM	Bubbler valve closed
1/28/2011	10:26:57 PM	Main Vac valve opened
1/28/2011	10:26:57 PM	Bypass valve opened
1/28/2011	10:26:57 PM	Helium MFC set to  0.000000
1/28/2011	10:26:57 PM	H2 MFC set to  0.000000
1/28/2011	10:26:57 PM	BCl3 MFC set to  0.000000
1/28/2011	10:26:57 PM	PHl3 MFC set to  0.000000
1/28/2011	10:26:57 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:26:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:26:57 PM	Tube furnace set to 0
1/28/2011	10:27:57 PM	H2 valve closed
1/28/2011	10:27:57 PM	BCl3 valve closed
1/28/2011	10:27:57 PM	PH3 valve closed
1/28/2011	10:27:58 PM	SiCl4 pre valve closed
1/28/2011	10:27:58 PM	SiCl4 post valve closed
1/28/2011	10:27:58 PM	Bubbler valve closed
1/28/2011	10:27:58 PM	Helium valve opened
1/28/2011	10:27:58 PM	Main Vac valve opened
1/28/2011	10:27:58 PM	Bypass valve opened
1/28/2011	10:27:58 PM	Helium MFC set to  100.000000
1/28/2011	10:27:58 PM	H2 MFC set to  0.000000
1/28/2011	10:27:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:27:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:27:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:27:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:27:58 PM	Tube furnace set to 0
1/28/2011	10:28:58 PM	Helium valve closed
1/28/2011	10:28:58 PM	H2 valve closed
1/28/2011	10:28:58 PM	BCl3 valve closed
1/28/2011	10:28:58 PM	PH3 valve closed
1/28/2011	10:28:58 PM	SiCl4 pre valve closed
1/28/2011	10:28:58 PM	SiCl4 post valve closed
1/28/2011	10:28:58 PM	Bubbler valve closed
1/28/2011	10:28:58 PM	Main Vac valve opened
1/28/2011	10:28:58 PM	Bypass valve opened
1/28/2011	10:28:58 PM	Helium MFC set to  0.000000
1/28/2011	10:28:58 PM	H2 MFC set to  0.000000
1/28/2011	10:28:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:28:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:28:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:28:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:28:58 PM	Tube furnace set to 0
1/28/2011	10:29:58 PM	H2 valve closed
1/28/2011	10:29:58 PM	BCl3 valve closed
1/28/2011	10:29:58 PM	PH3 valve closed
1/28/2011	10:29:58 PM	SiCl4 pre valve closed
1/28/2011	10:29:58 PM	SiCl4 post valve closed
1/28/2011	10:29:58 PM	Bubbler valve closed
1/28/2011	10:29:58 PM	Helium valve opened
1/28/2011	10:29:58 PM	Main Vac valve opened
1/28/2011	10:29:58 PM	Bypass valve opened
1/28/2011	10:29:58 PM	Helium MFC set to  100.000000
1/28/2011	10:29:58 PM	H2 MFC set to  0.000000
1/28/2011	10:29:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:29:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:29:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:29:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:29:58 PM	Tube furnace set to 0
1/28/2011	10:30:58 PM	Helium valve closed
1/28/2011	10:30:58 PM	H2 valve closed
1/28/2011	10:30:58 PM	BCl3 valve closed
1/28/2011	10:30:58 PM	PH3 valve closed
1/28/2011	10:30:58 PM	SiCl4 pre valve closed
1/28/2011	10:30:58 PM	SiCl4 post valve closed
1/28/2011	10:30:58 PM	Bubbler valve closed
1/28/2011	10:30:58 PM	Main Vac valve opened
1/28/2011	10:30:58 PM	Bypass valve opened
1/28/2011	10:30:58 PM	Helium MFC set to  0.000000
1/28/2011	10:30:58 PM	H2 MFC set to  0.000000
1/28/2011	10:30:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:30:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:30:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:30:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:30:58 PM	Tube furnace set to 0
1/28/2011	10:31:58 PM	H2 valve closed
1/28/2011	10:31:58 PM	BCl3 valve closed
1/28/2011	10:31:58 PM	PH3 valve closed
1/28/2011	10:31:58 PM	SiCl4 pre valve closed
1/28/2011	10:31:58 PM	SiCl4 post valve closed
1/28/2011	10:31:58 PM	Bubbler valve closed
1/28/2011	10:31:58 PM	Helium valve opened
1/28/2011	10:31:58 PM	Main Vac valve opened
1/28/2011	10:31:58 PM	Bypass valve opened
1/28/2011	10:31:58 PM	Helium MFC set to  100.000000
1/28/2011	10:31:58 PM	H2 MFC set to  0.000000
1/28/2011	10:31:58 PM	BCl3 MFC set to  0.000000
1/28/2011	10:31:58 PM	PHl3 MFC set to  0.000000
1/28/2011	10:31:58 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:31:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:31:58 PM	Tube furnace set to 0
1/28/2011	10:32:59 PM	Helium valve closed
1/28/2011	10:32:59 PM	H2 valve closed
1/28/2011	10:32:59 PM	BCl3 valve closed
1/28/2011	10:32:59 PM	PH3 valve closed
1/28/2011	10:32:59 PM	SiCl4 pre valve closed
1/28/2011	10:32:59 PM	SiCl4 post valve closed
1/28/2011	10:32:59 PM	Bubbler valve closed
1/28/2011	10:32:59 PM	Main Vac valve opened
1/28/2011	10:32:59 PM	Bypass valve opened
1/28/2011	10:32:59 PM	Helium MFC set to  0.000000
1/28/2011	10:32:59 PM	H2 MFC set to  0.000000
1/28/2011	10:32:59 PM	BCl3 MFC set to  0.000000
1/28/2011	10:32:59 PM	PHl3 MFC set to  0.000000
1/28/2011	10:32:59 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:32:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:32:59 PM	Tube furnace set to 0
1/28/2011	10:33:59 PM	H2 valve closed
1/28/2011	10:33:59 PM	BCl3 valve closed
1/28/2011	10:33:59 PM	PH3 valve closed
1/28/2011	10:33:59 PM	SiCl4 pre valve closed
1/28/2011	10:33:59 PM	SiCl4 post valve closed
1/28/2011	10:33:59 PM	Bubbler valve closed
1/28/2011	10:33:59 PM	Helium valve opened
1/28/2011	10:33:59 PM	Main Vac valve opened
1/28/2011	10:33:59 PM	Bypass valve opened
1/28/2011	10:33:59 PM	Helium MFC set to  100.000000
1/28/2011	10:33:59 PM	H2 MFC set to  0.000000
1/28/2011	10:33:59 PM	BCl3 MFC set to  0.000000
1/28/2011	10:33:59 PM	PHl3 MFC set to  0.000000
1/28/2011	10:33:59 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:33:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:33:59 PM	Tube furnace set to 0
1/28/2011	10:34:59 PM	Helium valve closed
1/28/2011	10:34:59 PM	H2 valve closed
1/28/2011	10:34:59 PM	BCl3 valve closed
1/28/2011	10:34:59 PM	PH3 valve closed
1/28/2011	10:34:59 PM	SiCl4 pre valve closed
1/28/2011	10:34:59 PM	SiCl4 post valve closed
1/28/2011	10:34:59 PM	Bubbler valve closed
1/28/2011	10:34:59 PM	Main Vac valve opened
1/28/2011	10:34:59 PM	Bypass valve opened
1/28/2011	10:34:59 PM	Helium MFC set to  0.000000
1/28/2011	10:34:59 PM	H2 MFC set to  0.000000
1/28/2011	10:34:59 PM	BCl3 MFC set to  0.000000
1/28/2011	10:34:59 PM	PHl3 MFC set to  0.000000
1/28/2011	10:34:59 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:34:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:34:59 PM	Tube furnace set to 0
1/28/2011	10:35:00 PM	Run finished at 10:35 PM
1/28/2011	10:35:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/28/2011	10:36:57 PM	Helium MFC set to  100.000000
1/28/2011	10:36:58 PM	Helium valve opened
1/28/2011	10:37:15 PM	Helium MFC set to  0.000000
1/28/2011	10:37:17 PM	Helium valve closed
1/28/2011	10:38:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	10:38:08 PM	Recipe started at 10:38 PM
1/28/2011	10:38:08 PM	Helium valve closed
1/28/2011	10:38:08 PM	H2 valve closed
1/28/2011	10:38:08 PM	BCl3 valve closed
1/28/2011	10:38:08 PM	PH3 valve closed
1/28/2011	10:38:08 PM	SiCl4 pre valve closed
1/28/2011	10:38:08 PM	SiCl4 post valve closed
1/28/2011	10:38:08 PM	Main Vac valve closed
1/28/2011	10:38:08 PM	Bypass valve closed
1/28/2011	10:38:08 PM	Bubbler valve closed
1/28/2011	10:38:08 PM	Helium MFC set to  0.000000
1/28/2011	10:38:08 PM	H2 MFC set to  0.000000
1/28/2011	10:38:08 PM	BCl3 MFC set to  0.000000
1/28/2011	10:38:08 PM	PHl3 MFC set to  0.000000
1/28/2011	10:38:08 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:38:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:38:08 PM	Tube furnace set to 0
1/28/2011	10:38:08 PM	Run finished at 10:38 PM
1/28/2011	10:38:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/28/2011	10:38:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:38:18 PM	Recipe started at 10:38 PM
1/28/2011	10:38:18 PM	Helium valve closed
1/28/2011	10:38:18 PM	H2 valve closed
1/28/2011	10:38:18 PM	BCl3 valve closed
1/28/2011	10:38:18 PM	PH3 valve closed
1/28/2011	10:38:18 PM	SiCl4 pre valve closed
1/28/2011	10:38:18 PM	SiCl4 post valve closed
1/28/2011	10:38:18 PM	Main Vac valve closed
1/28/2011	10:38:18 PM	Bubbler valve closed
1/28/2011	10:38:18 PM	Bypass valve opened
1/28/2011	10:38:18 PM	Helium MFC set to  0.000000
1/28/2011	10:38:18 PM	H2 MFC set to  0.000000
1/28/2011	10:38:18 PM	BCl3 MFC set to  0.000000
1/28/2011	10:38:18 PM	PHl3 MFC set to  0.000000
1/28/2011	10:38:18 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:38:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:38:18 PM	Tube furnace set to 0
1/28/2011	10:38:19 PM	Helium valve closed
1/28/2011	10:38:19 PM	H2 valve closed
1/28/2011	10:38:19 PM	BCl3 valve closed
1/28/2011	10:38:19 PM	PH3 valve closed
1/28/2011	10:38:19 PM	SiCl4 pre valve closed
1/28/2011	10:38:19 PM	SiCl4 post valve closed
1/28/2011	10:38:19 PM	Bubbler valve closed
1/28/2011	10:38:19 PM	Main Vac valve opened
1/28/2011	10:38:19 PM	Bypass valve opened
1/28/2011	10:38:19 PM	Helium MFC set to  0.000000
1/28/2011	10:38:19 PM	H2 MFC set to  0.000000
1/28/2011	10:38:19 PM	BCl3 MFC set to  0.000000
1/28/2011	10:38:19 PM	PHl3 MFC set to  0.000000
1/28/2011	10:38:19 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:38:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:38:19 PM	Tube furnace set to 0
1/28/2011	10:38:19 PM	Run finished at 10:38 PM
1/28/2011	10:38:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2011	10:38:23 PM	Helium MFC set to  100.000000
1/28/2011	10:38:24 PM	Helium valve opened
1/28/2011	10:38:54 PM	Helium MFC set to  0.000000
1/28/2011	10:38:55 PM	Helium valve closed
1/28/2011	10:39:47 PM	Recipe started at 10:39 PM
1/28/2011	10:39:47 PM	Helium valve closed
1/28/2011	10:39:47 PM	BCl3 valve closed
1/28/2011	10:39:47 PM	PH3 valve closed
1/28/2011	10:39:47 PM	SiCl4 pre valve closed
1/28/2011	10:39:47 PM	SiCl4 post valve closed
1/28/2011	10:39:47 PM	Main Vac valve closed
1/28/2011	10:39:47 PM	Bypass valve closed
1/28/2011	10:39:47 PM	Bubbler valve closed
1/28/2011	10:39:47 PM	H2 valve opened
1/28/2011	10:39:47 PM	Helium MFC set to  0.000000
1/28/2011	10:39:47 PM	H2 MFC set to  500.000000
1/28/2011	10:39:47 PM	BCl3 MFC set to  0.000000
1/28/2011	10:39:47 PM	PHl3 MFC set to  0.000000
1/28/2011	10:39:47 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:39:47 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:39:47 PM	Tube furnace set to 0
1/28/2011	10:41:04 PM	Helium valve closed
1/28/2011	10:41:04 PM	BCl3 valve closed
1/28/2011	10:41:04 PM	PH3 valve closed
1/28/2011	10:41:04 PM	SiCl4 pre valve closed
1/28/2011	10:41:04 PM	SiCl4 post valve closed
1/28/2011	10:41:04 PM	Main Vac valve closed
1/28/2011	10:41:04 PM	Bypass valve closed
1/28/2011	10:41:04 PM	H2 valve opened
1/28/2011	10:41:04 PM	Bubbler valve opened
1/28/2011	10:41:04 PM	Helium MFC set to  0.000000
1/28/2011	10:41:04 PM	H2 MFC set to  500.000000
1/28/2011	10:41:04 PM	BCl3 MFC set to  0.000000
1/28/2011	10:41:04 PM	PHl3 MFC set to  0.000000
1/28/2011	10:41:04 PM	SiCl4 MFC set to  0.000000
1/28/2011	10:41:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	10:41:04 PM	Tube furnace set to 1000
1/28/2011	11:01:04 PM	Helium valve closed
1/28/2011	11:01:04 PM	PH3 valve closed
1/28/2011	11:01:04 PM	Main Vac valve closed
1/28/2011	11:01:04 PM	Bypass valve closed
1/28/2011	11:01:04 PM	H2 valve opened
1/28/2011	11:01:04 PM	BCl3 valve opened
1/28/2011	11:01:04 PM	SiCl4 pre valve opened
1/28/2011	11:01:04 PM	SiCl4 post valve opened
1/28/2011	11:01:04 PM	Bubbler valve opened
1/28/2011	11:01:04 PM	Helium MFC set to  0.000000
1/28/2011	11:01:04 PM	H2 MFC set to  500.000000
1/28/2011	11:01:04 PM	BCl3 MFC set to  1.800000
1/28/2011	11:01:04 PM	PHl3 MFC set to  0.000000
1/28/2011	11:01:04 PM	SiCl4 MFC set to  50.000000
1/28/2011	11:01:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:01:04 PM	Tube furnace set to 1000
1/28/2011	11:20:04 PM	Helium valve closed
1/28/2011	11:20:04 PM	PH3 valve closed
1/28/2011	11:20:04 PM	Main Vac valve closed
1/28/2011	11:20:04 PM	Bypass valve closed
1/28/2011	11:20:04 PM	H2 valve opened
1/28/2011	11:20:04 PM	BCl3 valve opened
1/28/2011	11:20:04 PM	SiCl4 pre valve opened
1/28/2011	11:20:04 PM	SiCl4 post valve opened
1/28/2011	11:20:04 PM	Bubbler valve opened
1/28/2011	11:20:04 PM	Helium MFC set to  0.000000
1/28/2011	11:20:04 PM	H2 MFC set to  500.000000
1/28/2011	11:20:04 PM	BCl3 MFC set to  5.000000
1/28/2011	11:20:04 PM	PHl3 MFC set to  0.000000
1/28/2011	11:20:04 PM	SiCl4 MFC set to  50.000000
1/28/2011	11:20:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:20:04 PM	Tube furnace set to 1000
1/28/2011	11:21:05 PM	H2 valve closed
1/28/2011	11:21:05 PM	BCl3 valve closed
1/28/2011	11:21:05 PM	PH3 valve closed
1/28/2011	11:21:05 PM	SiCl4 pre valve closed
1/28/2011	11:21:05 PM	SiCl4 post valve closed
1/28/2011	11:21:05 PM	Main Vac valve closed
1/28/2011	11:21:05 PM	Bypass valve closed
1/28/2011	11:21:05 PM	Helium valve opened
1/28/2011	11:21:05 PM	Bubbler valve opened
1/28/2011	11:21:05 PM	Helium MFC set to  500.000000
1/28/2011	11:21:05 PM	H2 MFC set to  0.000000
1/28/2011	11:21:05 PM	BCl3 MFC set to  0.000000
1/28/2011	11:21:05 PM	PHl3 MFC set to  0.000000
1/28/2011	11:21:05 PM	SiCl4 MFC set to  0.000000
1/28/2011	11:21:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:21:05 PM	Tube furnace set to 0
1/28/2011	11:41:05 PM	Helium valve closed
1/28/2011	11:41:05 PM	H2 valve closed
1/28/2011	11:41:05 PM	BCl3 valve closed
1/28/2011	11:41:05 PM	PH3 valve closed
1/28/2011	11:41:05 PM	SiCl4 pre valve closed
1/28/2011	11:41:05 PM	SiCl4 post valve closed
1/28/2011	11:41:05 PM	Main Vac valve closed
1/28/2011	11:41:05 PM	Bypass valve closed
1/28/2011	11:41:05 PM	Bubbler valve closed
1/28/2011	11:41:05 PM	Helium MFC set to  0.000000
1/28/2011	11:41:05 PM	H2 MFC set to  0.000000
1/28/2011	11:41:05 PM	BCl3 MFC set to  0.000000
1/28/2011	11:41:05 PM	PHl3 MFC set to  0.000000
1/28/2011	11:41:05 PM	SiCl4 MFC set to  0.000000
1/28/2011	11:41:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2011	11:41:05 PM	Tube furnace set to 0
1/28/2011	11:41:05 PM	Run finished at 11:41 PM
